victorystress-users1-silvaco用户手册

SILVACO,Inc.4701PatrickHenryDrive,Bldg.2March7,2012SantaClara,CA95054Phone:[phone]Web:’sManual2VictoryStressUser’sManualTheinformationcontainedinthisdocumentissubjecttochangewithoutnotice.SILVACO,Inc.MAKESNOWARRANTYOFANYKINDWITHREGARDTOTHISMATERIAL,INCLUDING,BUTNOTLIMITEDTO,THEIMPLIEDWARRANTYOFFITNESSFORAPARTICULARPURPOSE.SILVACO,Inc.shallnotbeheldliableforerrorscontainedhereinorforincidentalorconsequentialdamagesinconnectionwiththefurnishing,performance,oruseofthismaterial.Thisdocumentcontainsproprietaryinformation,whichisprotectedbycopyrightlawsoftheUnitedStates.Allrightsarereserved.Nopartofthisdocumentmaybephotocopied,reproduced,ortranslatedintoanotherlanguagewithoutthepriorwrittenconsentofSILVACO,Inc.ACCUCELL,ACCUCORE,ACCUMODEL,ACCUTEST,ATHENA,ATHENA1D,ATLAS,BLAZE,C-INTERPRETER,CATALYSTAD,CATALYSTDA,CELEBRITY,CELEBRITYC++,CIRCUITOPTIMIZER,CLARITYRLC,CLEVER,DECKBUILD,DEVEDIT,DEVEDIT3D,DEVICE3D,DISCOVERY,EDAOMNI,EDIFWRITER,ELITE,EXACT,EXPERT,EXPERT200,EXPERTVIEWS,FERRO,GATEWAY,GATEWAY200,GIGA,GIGA3D,GUARDIAN,GUARDIANDRC,GUARDIANLVS,GUARDIANNET,HARMONY,HIPEX,HIPEX-C,HIPEX-NET,HIPEX-RC,HYPERFAULT,LASER,LED,LED3D,LISA,LUMINOUS,LUMINOUS3D,MAGNETIC,MAGNETIC3D,MASKVIEWS,MCDEPO/ETCH,MCDEVICE,MCIMPLANT,MERCURY,MIXEDMODE,MIXEDMODE3D,MOCASIM,MODELLIB,NOISE,NOMAD,OLED,OPTOLITH,ORGANICDISPLAY,ORGANICSOLAR,OTFT,PROMOST,QUANTUM,QUANTUM3D,QUEST,REALTIMEDRC,RESILIENCE,S-PISCES,S-SUPREM3,S-SUPREM4,SCOUT,SDDL,SFLM,SIC,SILOS,SIMULATIONSTANDARD,SMARTLIB,SMARTSPICE,SMARTSPICERF,SMARTSPICE200,SMARTVIEW,SOLVERLIB,SPAYN,SPDB,SPIDER,SPRINT,STELLAR,TCADDRIVENCAD,TCADOMNI,TFT,TFT3D,THERMAL3D,TONYPLOT,TONYPLOT3D,TWISTER,TWISTERFP,UTMOST,UTMOSTIII,UTMOSTIV,UTMOSTIV-FIT,UTMOSTIV-MEASURE,UTMOSTIV-OPTIMIZATION,VCSEL,VERILOG-A,VICTORY,VICTORYCELL,VICTORYDEVICE,VICTORYPROCESS,VICTORYSTRESS,VIRTUALWAFERFAB,VWF,VWFAUTOMATIONTOOLS,VWFINTERACTIVETOOLS,VWFMANUFACTURINGTOOLS,andVYPERaretrademarksofSILVACO,Inc.Allothertrademarksmentionedinthismanualarethepropertyoftheirrespectiveowners.Copyright©1984-2012,SILVACO,Inc.NoticeStyleConventions�Thisrepresentsalistofitemsorterms.•BulletA•BulletB•BulletCThisrepresentsasetofdirectionstoperformanaction.Toopenadoor:ThisrepresentsasequenceofmenuoptionsandGUIbuttonstoperformanaction.FileOpenCourierThisrepresentsthecommands,parameters,andvariablessyntax.HAPPYBIRTHDAYTimesRomanBoldThisrepresentsthemenuoptionsandbuttonsintheGUI.FileNewCenturySchoolbookItalicsThisrepresentsthevariablesofequations.x+y=1Note:Thisrepresentstheadditionalimportantinformation.Note:Makesureyousaveoftenwhenworkingonamanual.TIMESNEWROMANINSMALLCAPSThisrepresentsthenamesoftheSILVACOproducts.ATHENAandATLAS.3VictoryStressUser’sManualFontStyle/ConventionDescriptionExample1.2.3.1.Unlockthedoorbyinsertingthekeyintokeyhole.2.Turnkeycounter-clockwise.3.Pulloutthekeyfromthekeyhole.4.Grabthedoorknobandturnclockwiseandpull.HowtoReadthisManual4VictoryStressUser’sManualChapter1Introduction.............................................................61.1VictoryStressOverview.................................................................71.2UsingthisManual......................................................................81.3TechnicalSupport......................................................................91.4VictoryStressFeaturesandCapabilities..................................................10Chapter2Tutorial................................................................112.1UsingVictoryStress...................................................................122.2FlowofInformation....................................................................132.3DescriptionofInputFiles...............................................................142.3.1CommandFile...................................................................142.4DescriptionofOutputFiles.............................................................152.4.1StructureFile.....................................................................152.5StartingVictoryStress.................................................................162.5.1DeckBuild.......................................................................162.5.2BatchMode......................................................................172.6TutorialExamples.....................................................................182.7StressInaFinFETDevice..............................................................192.7.1LayoutDefinition..................................................................192.7.2ExecutingtheCommandFile........................................................202.7.3BuildingFinFETStructure...........................................................212.7.4PerformingStressAnalysis..........................................................23Chapter3StressModels..........................................................243.1MathematicalModelofElasticityPhenomena..............................................253.1.1DisplacementandStrainFuncti