微尺度流动研究的简要综述-孙江龙

BRIEFSUMMARIZATIONOFMICRO-SCALEFLOWRESEARCH1112(1.华中科技大学船舶与海洋工程学院,武汉430074)(2.武汉工程大学机电工程学院,武汉430073)SUNJiangLong1LVXuJian1GUOLei1YANGXia2(1.SchoolofNavalArchitectureandOceanEngineering,HuazhongUniversityofScienceandTechnology,Wuhan430074,China)(2.SchoolofMechanicalandElectricalEngineering,WuhanInstituteofTechnology,Wuhan430073,China),,,,MonteCarloTK121AbstractThedevelopmentofmicromachiningtechnologyandmicro-electro-mechanicalsystem(MEMS)opensupanewterritoryfortheresearchofmicro-scalefluidflow.Itillustratesthatbasingphysicalfactorsofmicro-scalefluidflowaredifferentfromthoseofmacro-scalefluidflowbecauseofthelargesurface-volumeratio,surfaceeffects,rarefactionandcompressibility.Now,themicro-scalefluidflowtechnologyisprogressingatafastratethatexceedsitsmechanismresearch.Theprimaryobjectiveistoreviewtherelativein-formationofmicro-scalefluidflow.Ithopesthatitwillgiveahandandnewideastothemechanismresearchindepth.KeywordsMicro-scale;Surfaceeffects;Knudsennumbers(Kn);Moleculardynamics(MD);DirectsimulationMonteCarlo(DSMC)Correspondingauthor:SUNJiangLong,E-mail:[e-mail],Tel:[phone],Fax:[phone]TheprojectsupportedbytheNationalNaturalScienceFoundationofChina(No.50705033),andChinaPostdoctoralScienceFoun-dationFundedProject(No.20080430975),andtheStateKeyLaboratoryofOceanEngineering(ShanghaiJiaotongUniversity)(No.0809).Manuscriptreceived20080108,inrevisedform20081027.1引言,,MEMS(micro-electro-mechanicalsys-tem)[1-2],MEMSMIT(MassachusettesInstituteofTechnology)R.L.Bayt(1999)20mLaval[3],,,,,,1500,,,,,,IBM,20nm[4-5],JournalofMechanicalStrength2010,32(3):502-508,,19764,,,,1998(),2006,20080108,20081027(50705033)(20080430975),[6-10],,,,HaiTai[11]Gad-e-lHak[12]Stone[13],,,,,,,,,,,2研究现状Eringen[14](1964)(Micro-continuum),Little[15],Little,MEMS,,,[16-19]Tukermann[20]198190,,,[21-22]Guo[23-24](19971998),Papantsky[25-26](1999),ReMala[27](1999)50m~254m,Guo[28-29](2003),,MachNagayamaG[30](2004),,,(),[31-41][42](2003),,,,,,[43](2003),Navier-Stokes(NS),NS,[44]42-69(2005),,[45](2006),,,,,Silva[46](2007),,,3流动特性,(1nm),(0.1m),Israelachvili[47](1991),,,,,,(),,,,323:503,Beskok[48](1996),Maxwel-lSmoluchowski,Kn0.3Kn=0.156,,,,,,,,,,,,,,NS;,,,,,[49-55]4理论模型,,,,,,,Kn=L()Kn,,,,,,,KnKn,,,Kn0.1,,,NS,Maxwell,Maxwel-lSmoluchows-ki[56]Kennard[57],,,Kn0.1Beskok[58],,-Flow[59-60],,,,,,Boltz-mann5研究方法,,,,,,,,,,Gak-e-lHak[61],,,Boltzmann,Boltzmann,,Boltzmann,,,BoltzmannNordsieckHicks[62]Yen[63],,Boltzmann,,5042010()[64-65]Boltzmann,,,(moleculardynamics,MD)MonteCarlo(directsimulationMonteCarlo,DSMC)1)N,N,N,(),,,(),,,,[44]70-83,,,C.Y.Ji[66](2008)MD,,,,,,,,Sponer[67](2007)G-DNA(G-deoxyribo-nucleicacid),,,2)MonteCarlo(DSMC)DSMCBird[68](1963),()DSMC,,,,,,[69]DSMC,,[70]Ens-kogMonteCarlo(generalizedenskogMonteCarlo,GEMC)VanderWaals,Park[71]DSMCCouette,BoltzmannDSMC,DSMC,Bird[72],,Ale-xander[73-75]Garcia[76]Boltzmann(con-sistentBoltzmannalgorithm,CBA),DSMC,,[77][78][79]DSMC,,,,,,,,,DSMC[80]:,,,,,,DSMC,,,[81]6若干个前沿问题,[82],,,323:505,,,,,,[44]84-100,,,;,2003,Bush[83],,,2004,[84],,,,,,,,,7结论,,,,,,,,,,(References)[1],,,.[J].,2001,23(4):373-379.MEITao,KONGDeYi,ZHANGPeiQiang,etal.Mechanicalpropertiesandscalingeffectsinmicro-electro-mechanicalsystems[J].JournalofMechanicalStrength,2001,23(4):373-379(InChinese).[2],,.[J].,2001,23(4):465-470.YUJuan,TANGZhenAn,WEIGuangFen.Progressofstudyonm-icroscalethermalpropertiesofmicro-electro-mechanicalsystems[J].Jour-nalofMechanicalStrength,2001,23(4):456-470(InChinese).[3]BaytRL.Analysis,fabricationandtestingofaMEMS-basedmicroprop-ulsionsystem[D].Cambridge:MassachusettsInstituteofTechnology,1999:50-98.[4]GatzenHH.Rigiddiskslidermicromachiningchallengestomeetmicro-tribologyneeds[J].TribologyInternational,2000,33:337-342.[5]MenonAK.Interfacetribologyfor100Gbin2[J].TribologyInternation-al,2000,33:299-308.[6]FukuiS,KanekoR.Adatabaseforinterpolationofpoiseuilleflowratesforhighknudsennumberlubricationproblems[J].J.Tribology,1990,112:78-83.[7]AlexanderFJ,GarciaAL,AlderBJ.DirectsimulationMonteCarloforthin-filmbearings[J].Phys.Fluids,1994,6(12):3854-3860.[8]HuangW,BogyDB.Three-dimensionaldirectsimulationMonteCarlomethodforsliderairbearings[J].Phys.Fluids,1997,9(6):1764-1769.[9]LiuN,NgEYK.Thepostureeffectsofasliderairbearingonitsperfor-mancewithadirectsimulationMonteCarlomethod[J].J.Micromech.Microengine,2001,11:463-473.[10]HonchiM,KohiraH,MatsumotoM.Numericalsimulationofsliderdy-namicsduringslider-diskcontact[J].TribologyInternational,2003,36:235-240.[11]HaiCM,TaiYC.Micro-electro-mechanica-lsystem(MEMS)andfluidflows[J].AnnualReviewofFluidMechanics,1998,30:579-612.[12]Gad-e-lHakM.Thefluidmechanicsofmicrodevicesthefreemanscholarlecture[J].JournalofFluidsEngineering-TransactionsoftheASME,1999,121(1):5-33.[13]StoneHA,StroockAD,AjdariA.Engineeringflowsinsmalldevices:Microfluidicstowardalab-on-a-chip[J].AnnualReviewofFluidMe-chanics,2004,36:381-411.[14]EringenA.Simplemicrofluids[J].Int.J.Sci.,1964,2:205-217.[15]WuP,LittleWA.Mesurementoffrictionfactorsfortheflowofgasesinveryfinechannelsusedformicrominiaturejoule-thomsonrefrig