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183VO1.18NO.3MaterialsScienceSEngineering71=========================================================Sep.2000:1999-04-02;:(1973D~~~..:1004-793X(2000D03-0100-05~~(~310027D~;~;:TN304.1;0614.41:AProgressinstudyofcrystalsiliconMechanicalPropertiesLIdong-sheng~YANGde-ren~OUEduan-lin(stateKeyLaboratoryofsiliconMaterialsscience~ZhejiangUniversity~Hangzhou310027~chinaDAbstractTheprOgressinstudyOfthemechanicalprOpertiesOfmOnOcrystallinesilicOnhaVebeenre-VieWed.BymeansOftensiletestsathightemperature~bendingstrengthandindentatiOn~itisfOundthatthemechanicalprOpertiesOfsilicOnmainlydependOnsurfacestates~dislOcatiOnsandimpurities.TheupperyieldstrengthandbendingstrengthdecreaseWiththedamageOnsurface~asWellasthegeneratiOnandmOVementOfdislOcatiOns.~OWeVer~thrOughpinningdislOcatiOns~theimpuritiescanstrengthentheme-chanicalprOpertiesOfcrystalsilicOn.KeyWordsmOnOcrystallinesilicOn;mechanicalprOperties1~~TZ0.5Tm(Tm=1690KD~~~~~~~~~IC~~~~;~~IC~~~~~00195O[1]099990999(D9\\0909\902990902.1K.SuminO[2](FZD(CZD09990900FZCZ909099CZ99FZ0990090CZ90999;9909999CZFZ0999999CZ9FZ02.29909\90909\0K.SuminO[3]99;dZc/dE=[1-{NmVOb(Zc-Gb(NmD1/2/BDEXP(-0/KTD}/E~](1D9Zc;;E;;;;Nm;;VO;;b;;G;;0;;B;;K;;T;;E~;09T\E\Nm90(1D99Nm9cZc/cE;9T9E9dZc/cE02.3FZ9CZ9CZ99[4]009\9999902.3.113OOC9999[5]09X09099091O5OC99CZ'0K.SuminO9[6]09099-1O1-1O111O62SOOC[129]1.11O4S1O[5]O2.9.2Z6OOCOO[6]O2O9ONFZDO[6]O2NFZ~FZZ9OOC[129]1.11O4S1[6]OGD1D9SOOC[129]1.11O4S1O2DO2O1FZFZ[6]00FZCZ0CZ03000''00()[1]03-1000Nikifenk0[7]00M.J.Hill[8]300C{111}01111230600300C;550C0003-2(KIC):KIC=XrP/(C0)3/2(2):P;C0;Xr0:KIC=Xr/P/(C)3/2+OC(TOC)1/2(CZC0);(3):Xr/;OC;TO;C00L.Zhang[9]V0nMises0EYS()0A00;00A0K.Yasufake[10];''00043019O;9O9O4.]999O[11121314]99OGriffith999;999OGriffith:~6=4E7/TC(3D:6;E;7;CO9O4.29O99(DO999[13]O9O999[13]O9O999O9O51.99O9O2.9(111D;O3.999O[1]P.FelthamandR.Banerjee[J]:J.Mater.Sci.1992927:1626[2]K.SuminoandI.Yonenaga[J].Jpn.J.Appl.Phys.1981920:L618[3]K.Sumino[J].Mater.Sci.Engi.19899134:335[4]K.Sumino9~.~aradaandI.Yonenage[J].Jpn.J.Appl.Phys.1980919:L49[5]I.YonenageK.SuminoandK.~oshi[J].Appl.Phys.1984956:2346[6]K.SuminoI.YonenagaandM.Imai[J].J.Appl.Phys.1983954:5016[7][M].(1987D27[8]M.J.~illandD.J.Rowcliffe[J].J.Mater.Sci.197499:1569[9]L.ZhangandM.Mahdi[J].J.Mater.Sci.1996931:5671[10]K.YasutakeM.IwataK.YoshiiM.Umenoand~.Kawabe[J].J.Mater.Sci.1986921:2185[11]999[J].91997918:710[12]99[J].91995916:618[13]99[J].91993914:174[14]L.D.ChenM.J.ZhangandS.Zhang[J].J.Appl.Phys.1994976:1574401单晶硅材料机械性能研究及进展作者：李东升，杨德仁，阙端麟，LIDong-sheng，YANGDe-ren，QUEDuan-lin作者单位：浙江大学硅材料国家重点实验室,浙江,杭州,310027刊名：材料科学与工程英文刊名：MATERIALSSCIENCE&ENGINEERING年，卷(期)：2000,18(3)被引用次数：5次参考文献(14条)1.PFeltham;RBanerjee查看详情[外文期刊]19922.KSumino;IYonenaga查看详情19813.KSumino查看详情19894.KSumino;HHarada;IYonenage查看详情[外文期刊]19805.IYonenage;KSumino;KHoshi查看详情[外文期刊]19846.KSumino;IYonenaga;MImai查看详情[外文期刊]19837.硬度试验科学及其应用19878.MJHill;DJRowcliffe查看详情[外文期刊]19749.LZhang;MMahdi查看详情199610.KYasutakeM;IwataK;YoshiiMUmeno;H.Kawabe查看详情[外文期刊]198611.谢书银;石志仪;陈忠祥;张维连查看详情199712.谢书银;石志仪查看详情[期刊论文]-半导体学报199513.石志仪;谢书银查看详情199314.LDChen;MJZhang;SZhang查看详情1994本文读者也读过(1条)1.陈明君.董申.李旦.张飞虎单晶硅脆性材料塑性域超精密磨削加工的研究[期刊论文]-航空精密制造技术2000,36(2)引证文献(5条)1.周健伟.尚德广.刘小冬.柳会单晶硅微薄膜V形缺口疲劳特性研究[期刊论文]-机械强度2010(5)2.张静宜.钱林茂.周仲荣高载下单晶铜和单晶硅的径向纳动与损伤行为研究[期刊论文]-摩擦学学报2006(1)3.张银霞单晶硅片超精密磨削加工表面层损伤的研究[学位论文]博士20064.孟剑峰环形电镀金刚石线锯加工技术及加工质量研究[学位论文]博士20065.孟剑峰环形电镀金刚石线锯加工技术及加工质量研究[学位论文]博士2006本文链接：