DBD等离子体及其应用技术的发展

7,,.NaA.,2000;45(8):83528378ZhangZhanxia,XiongGuohua,alet.Samplepretreatmentwithmicro2wave2assistedtechniques.AnalyticalScience,2000;16:2219StraussC.R.,TrainorR.W.Developmentsinmicrowaveassistedorganicchemistry.AustJ.Chem.,1995;48:11652169210,..,2001;22(3)284228611,,.EHD.,2000;21(1):97210012..:,199113,..,1998;20(2):7914,,..(A),2001;31(10):934293815HanGuangze,HuaBen,ChenQinglinetal.Generalizedexpressionofexergyinthethermodynamics.ScienceinChina(SeriesA),2002;45(1):7027516HakenH.SynergeticsAnIntroduction.Berlin,Heidelberg,NewYork:SpringerVerlag,1977ANewApproachofTransferProcessEnhancementFieldSynergyHanGuang2ze,HuaBen,WeiYao2dongDoctor,AssociateProfessor,DepartmentofAppliedPhysics,SouthChinaUniversityofTechnology,Guangzhou,Guangdong510640Professor,SupervisorofPh.D.Student,Doctor,AssociateProfessor,theKeyLaboratoryofEnhancedHeatTransferandEnergyConservation,Min2istryofEducation,SouthChinaUniversityofTechnology,Guangzhou510640Keywordstransferprocessenhancement,physicfield,fieldsynergyDBD()3(69871002).CO2.DBD.,,[1,2].,,.,.(dielectricbarrierdischarge,DBD),,,,CO2.,DBD,.DBD(plasma)1930Langmuir[3]...DBD,.1839SchÊnbein,,(ozone)[4,5]..1857,Siemens.,,[6,7].DBD.2070,772245©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,[1].,,DBD..,[4].,DBD.20,[8-10],DBD,.[4,5,11-15],,DBD[16-18],.DBDDBD.,[19].(50MHz),.,,,[20].,(1),,.DBD,DBD[5,11,21].DBD1.1CCD(40mm40mm)1DBDp0.01MPaEg0.1300kVPcmEgPn100600Td110nsr0.10.2mmq100100010-12Cj1001000APcm2J10-410-2JPcm3ne10141015Pcm3Te1-30eVX10-4Tg300KDBD,,,,.,,.,,,,,,,,.,.,,.,..,,,,;,,,.,DBD,.1998FrancoiseMassines[22];1999I.Mller[23]DBD;2000E.E.Kunhardt[24]DBD(capillary2plasma2electrodedischarge,CPED)[24];,3:1,872ZiranZazhiVol.24No.5©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,[25].DBD,:,;,;,DBD.,DBD,DBD,DBDDBD,.DBD1..,,[26-28],.DBD,,.:12m,,14mm,350kHz520kV,,.:,,0.21.0mm(-Al2O3),0.10.5mm,110kV,510kHz,.,,.:,,1.0mm,.510kV,515kHz,.,,,.DBD,.DBD,:O2(X3g-)+eO2(A3u+)+eO(3P)+O(3P)+e(1)O2(X3g-)+eO2(B3u-)+eO(3P)+O(1D)+e(2)O2(X3g-)+eO2(A2u)+eO(3P)+O+(4So)+2e(3)O+O2+MO33+MO3+M(4)O3(3A2+1A2)+eO2(a)+O(1D)(5),2[35].,.O2(X3g-)O2(A3u+)O2(C3u)O2(C1u-).6.1eV,.8.4eV,O2(B3u-).8.4eV,O(3P)O(1D)O-(2P0)O+(4S0)O+(1S0).,.2,,,.,DBD,(8.4eV),.,.(0.5mm),,.972245©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.DBD,200gPm3,100gPkWh.2.DBDCO240010nm.(UV-A,400320nm)(UV-B,320280nm)(UV-C,280200nm)(UV-D,20010nm).200nm,,.,,.,[30-32]..,,,,.(He32Ne32Ar32Kr32Xe32)(ArF3KrF3XeF3XeCl3Hg32Hg33).(Xe):Xe+eXe3+e(6)Xe3+Xe+XeXe32+Xe(7)Xe32Xe+Xe+UV(172nm)(8),.Ar32127nmKr32147nmArCl3175nmKrCl3222nmXeCl3308nm.,.,.(1%2%).DBD,.DBD,,0.52mm,DBD.B.Gellert0.1MPa20kV1kHzXe,172nm,10%,14nm[33].DBDCO2.(DC)CO2[34]:,,12WPcm3;,-;;,;1P31P4.,DBD,,,,,,,,,.,.,DBD,,,,.,DBDCO2,,,2050mm,50200kHz.CO2,,0.8mm,,1500mm30mm45mm,CO2-CO-N2-Ne,8:4:60:28,9.3kPa,100kHz,21mm.DBDCO2CO2,,DBD,,,.3.,.(PDP,plasmadisplaypanel)DBD.DBD.082ZiranZazhiVol.24No.5©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.PDP;PDP,,.:,,,,160;,;,PDP[35].PDP,,,,PDP,[36].4.DBDDBD.,,.DBD.1974,LukYanovDBD,CO2CH4CH,1083molPmin[37].1987FinlaysonDBDCH[38].1999BaiMindong0.1MPa,DBDN2H2NH3,3795mgPm3[22],,.,,,,10%,:,,;,;,,.[16,39].5.DBD.,NOXSO2CO2..SO2,,,.2060NH3SO2.2080,Masuda[40](NH3);[41-44].(NH4)2SO3,54,,,NH3[45].,SO2,620km3Ph,,X,.DBD,DBD.1989S.K.Dhall[46]60Hz15kVSO244%;1991DBDSO275%,[47];MooBeenChang[48]DBDSO280%;1992ManabuHigashi[49]DBDSO270%NOx20%100%;1993MooBeenChang[50]SO2NO29%79%;1997[51]54%;1998HansR.Snyder[52]DBD;DBDCF2ClBr,CF2ClBr0.6%10s,95%;2001ZhitaoZhang[53]DBDSO288%.DBD,DBD,,.,,182245©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,DBD.,20DBD,DBD,DBD,.DBD,,DBD,DBD.,DBD,.(200248),,116026,,116026,,116026,,1160261.:.,1994;(5):162192..,1995;(2):142173KunhardtE.E.IEEETransactionsonPlasmaScience,2000;28(1):18921994BlaichL.,FriedrichM.,ShadiAkhyA.H.OzoneScienceandEngineer2ing,20322165EliassonB.,KogelschatzU.IEEETransactionsonPlasmaScience,1991;19(2):30923236KogelschatzU.XVIInt.Conf.onPhenomenainIonizedGases(ICPIGXVI),Germany:Dsseldorf,1983:24022507KogelschatzU.ProcessTechnologiesforWaterTreatment.NewYorkandLondon:S.Stucki,1988:8721208,.,2000;(4):142169.,2001;35(5):1010OheK.,KamiyaK.,KimuraT.IEEETransactionsonPlasmaScience,1999;27(6):15822158711EliassonB.,HirthM.,KogelschatzU.J.Phys.D:Appl.Phys.,1987;20:14212143712DazR.,MenndezD.,TabaresF.OzoneScienceandEngineering,2001;23:171217613.,2001;22(2):12614,,2000;29(10):615261915.,2001;21(3):18316.,2000;22(3):156216017,.,2000;27(5):38523818KimH.H.,WuC.etal.IEEETransactionsonIndustryApplications,2001;37(2):480248719,..:,1996:309233520,.,1995;34(1):7828621PashaieB.,SankaranarayananR.,DhaliS.K.IEEETransactionsonPlasmaScience,1999;27(1):2222322MassinesF.,RabehiA.etal.J.Appl.Phys.,1998;83(6):29502295723PunsetM.C.etal.IEEETransactionsonPlasmaScience,1999;27(1):2022124KunhardtE.E.IEEETransactionsonPlasmaScience,2000;28(1):189219925BaiMindong,ZhangZhitao.IEEEIndustryApplicationsConference36thIASAnnualMeeting,200126.,2000;22(6):347235427.,2000;20(4):309231228.ˆ­ËŽ,1999;20(5):2622829,,.,1996;26(3):