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和英Ver.2.1CNCONFIDENTIAL-Donotmodifyorcopytheglossary12345678910111213141516171819202122232425262728ABCD中文アーカイブ存档,到记录记录arcimage弧像ground地RRReticleRotation掩模板旋转RAReticleAlignment掩模板对准RETResolutionEnhancedTechnology分辨率增强技术RMSRouteMeanSquareRLATReticleLibraryAssignmentTable板库分配表RDFRandompatternfilter随机图形过滤片RPrepairparts维修部品RPPReservedProcessProgram预存工艺程序AISAerialImageSensor空间图像传感器ISSImageScanningSlit图像扫描狭缝ISOTFOisolatedlinetotalfocusdeviationIndustrialTelevisionMonitor工业用监视器IUilluminationunit照明单元scaling伸缩salesorderfromSalestoMfgdept.axial轴achromat单色raisedfloor上夹层assistcorrection辅助连接scaffold脚手架astigmatism散光ASCIIASCII码distortedwaveform波形失真ページ1和英Ver.2.1CNCONFIDENTIAL-Donotmodifyorcopytheglossary29303132333435363738394041424344454647484950515253545556ABCDcompression压缩compressivestress压缩力compressor压缩机assemblerlanguage汇编语言terminallug接线端子Abbeerror阿贝误差pressure压力pressuresensor压力传感器address地址analogIC模拟ICanneal退火avalanchevoltage雪崩电压aplanat消球差透镜apochromat高度消色透镜grayscale灰色标尺shadedarea阴影区域AMSAutomaticMeasurementSystem自动测量系统amorphous未定型的alignment对准alignmentprinciple对准原理alignmentshotplacement对准管芯位置alignmentcount对准计数Alignmentcheck对准检查alignmentbeampath对准光路alignmentmark对准标记stormdrain冷却塔水管ARITH数学Alcohol酒精ページ2和英Ver.2.1CNCONFIDENTIAL-Donotmodifyorcopytheglossary57585960616263646566676869707172737475767778798081828384ABCDalgorithm运算法则Aluminum铝Aluminuminterconnection铝连接aluminumblock铝块levelingaccuracy调平精度darkfield暗场darkfieldillumination暗场照明backgroundvibration(spectrum)背景震动（频谱）safety安全SafetyAudit(INTEL)安全监察safetyvalve,reliefvalve安全阀stabilization稳定性stability稳定性darkcurrent暗电流ANDgate与门ampere安培unloadcassette收片盒Electronics2ndprocessＥ２工程EMOEmergencyMachineOff设备急停开关Ethernet以太网EGAEnhancedGlobalAlignment增强型整片对准EGLEnhancedGlobalLeveling高效整片调平EPROMErasableProgrammableReadOnlyMemory可擦写的可编程只读存储器ionimplantation离子注入high/lowlimittemperaturealarmsetting温度报警上下极限设置anomalousZeemaneffect异常Zeeman效应outlier異常値ページ3和英Ver.2.1CNCONFIDENTIAL-Donotmodifyorcopytheglossary858687888990919293949596979899100101102103104105106107108109110111112ABCDrelocation设备搬移phasedifference,phasecontrast相差phasecontrastmicroscope相位差显微镜phasecontrastplate相位差板phaseplate相位板sheetmetal金属板flatspring,leafspring板弹簧positioningflatspring定位板弹簧position位置positioning定位positioningmonitoringtolerance位置监视容差positioningpin(reticle)定位栓(掩模板)positionthetaandmaintainittheta定位保持positioningaccuracy位置精度positioningerror位置误差firstorderlight一次光primarycurrent初级电流1stround第一回positionshifterror位置偏移误差positionskiporjump位置跳动positioncompensatingplate位置补偿板list清单1stlevel第一级conventional(non-scan)stepper传统步进光刻机batchconversion整组变换batchexposure整组曝光movingmirror移动镜movablemirrororthogonality移动镜的正交性ページ4和英Ver.2.1CNCONFIDENTIAL-Donotmodifyorcopytheglossary113114115116117118119120121122123124125126127128129130131132133134135136137138139140ABCDmirrorbowcorrection移动镜曲面补正movingelement移动单元movingaverage移动平均inertiadelay惯性延迟castinghole铸造孔particles灰尘颗粒setscrew固定螺钉casting,molding模具nest,nesting嵌套softwareinstallation软件安装colormatching(wiring)配色achromaticlens消色透镜chromaticaberration色収差colorspectrum光谱FIAspectrumFIA光谱colornonuniformity色的不均匀性colorgradation色谱applyingvoltage施加电压cathodeterminal阴极端子InclinationexposureINC曝光cabletie电缆扎带argument争论interlacesystem隔行扫描系统intra-shotcoordinate芯片内坐标integrator积分器integratorsensor照度传感器Invar(materialusedforstepper)不变钢inverter转换器ページ5和英Ver.2.1CNCONFIDENTIAL-Donotmodifyorcopytheglossary141142143144145146147148149150151152153154155156157158159160161162163164165166167168ABCDimpinger撞击inputlens输入透镜in-line互连式windowtoolfetcherror工具窗获取错误windowwidth窗口宽度windowcomparator窗口比较仪wafer硅片wafercarrier硅片架waferloaderaccessdoors传片室门waferstage工作台waferholder(chuck)承片台waferloader上片warm-up预热wobble抖动XYstagefixture(shippingfixture)XY工作台固定夹具acceptancetest验收测试backgroundscreen背景屏projectionlens投影物镜rewrite,overwrite重写supportcommands命令支持bubblewrap包装用泡沫Aero-ShellFluidAdjustment1stprocessＡ１工程AIPAdvancedIntelligentPanel高级操作面板ASUSAuto-SetupService自动安装服务AFFPAutoFocusFunctionProcessor自动调焦功能处理器ページ6和英Ver.2.1CNCONFIDENTIAL-Donotmodifyorcopytheglossary169170171172173174175176177178179180181182183184185186187188189190191192193194195196ABCDAMAutomaticpelliclemountingsystem自动薄膜粘贴系统AMSAutomaticMeasurementSystem自动测量系统AOMAcousticOpticalModulator声光调节器AGMassistantgeneralmanager总经理助理alphanumericcharacter数字字母符image,picture图象AWRAtomicWavelengthReference基准原子波长HPFhighpassfilter高通过过滤器HVhalving(mirror,motor)二等分internalHV(Cymerlaser)内部高压ADJadjustment调整AVISActiveVibrationIsolationSystem振动隔离系统ARLAutoReticleLoader掩模板自动上板ARBAutoReticleBlind自动掩模板光栏AELAccessibleEmissionLimit可达到的发射光极限ALCPAutomaticLaserCompensator自动激光补偿AGCAutomaticGainControl自动增益控制chamberA,lensroomA镜头控制室Aexcimerlaser准分子激光liquidcrystal液晶immersionobjective液浸物镜expander扩张器liquid液体Echelongrating梯形光栅SRRRSteppingbyResidualReticleRotation掩模板旋转残量步距SRAScanningReticleAlignment扫描掩模板对准SRCSingleReticleChanger单个掩模板更换betweenphotoresistandwafer胶与硅片之间ページ7和英Ver.2.1CNCONFIDENTIAL-Donotmodifyorcopytheglossary197198199200201202203204205206207208209210211212213214215216217218219220221222223224ABCDSEMScanningElectronMicroscope扫描电子显微镜S/GSCSI/GPIBco