1aEc(k)EV(k)Ec=0220122021202236)(,)(3mkhmkhkEmkkhmkhV0mnmaak314.0,11;2;3;41eVmkEkEEEkmdkEdkmkdkdEEckkmmmdkEdkkmkkmkVCgVVVc64.012)0()43(0,0600643038232430)(2320212102220202020222101202043222*83)2(1mdkEdmkkCnCsNkkkpkpmdkEdmkkkkVnV/1095.7043)()()4(6)3(25104300222*112.0.25nm102V/m107V/mtkhqEfqEktsatsat137192821911027.810106.1)0(1027.810106.1)0(1Si100110111ρSi1001101111a(100)b(110)c(111)2)2cos81cos87()22kakamakEa123k4*nm5*pm10)(dkkdEankn=012ank)12(Ek214221422142822/1083.7342232212414111/1059.92422124142110/1078.6)1043.5(224141100cmatomaaacmatomaaacmatomaa222)makEMAXank2Ekank)12((2)222)()makEkEMINMAX(3k)2sin41(sin1kakamadkdEv4)2cos21(cos222*kakamdkEdmnank2mmn2*(5)ank)12(**npmm32*mmp21.1ρρ232.AsGenAs5GeAsAsGe.,AsNN3.GaGepGa3GeGeGaGaGeGaGaP4.SiGaAsIVIII-VSiGaAsGaSiGaAsAsGaAs5.1NDNANAND-NAn=ND-NANAeffND-NA2NANDNA-NDNA-NDp=NA-ND.NAeffNA-ND3NAND6.7.Eg=0.18eVr=17*nm=0.015m0,m0eVEmmqmErnrnD42200*2204*101.7176.130015.0)4(28.Eg=2.26eVr=11.1m*p=0.86m0,m0eVEmmqmErPrPA0096.01.116.13086.0)4(22200*2204*1.E=Ec2*n2CL2m100EEnmrmmmqhrnmmqhrnrnr60053.00*0*20202020nmrmmmqhrnmmqhrPrPr68.6053.00*0*202020202.3-63.E-EF1.5k0T4k0T,10k0T1.5k0T0.1820.2234k0T0.0180.0183322233*28100E21233*22100E0021233*231000L8100)(3222)(22)(1ZVZZ)(Z)(22)(2322C22CLEmhEEEmVdEEEmVdEEgVddEEgdEEmVEgcncCnlmhECnlmECnncnc)(21)(,)(2)()(,)(,)()(2~.2'213''''''2'21'21'21'2222222CaalttzyxacczlazytayxtaxztyxCCeEEmhkVmmmmkgkkkkkmhEkEkmmkkmmkkmmkmlkmkkhEkEKICEGsiFEETkEEeEfF011)(TkEEFeEf0)(3123221232'2123231'2'''')()2(4)()(111100)()(24)(4)()(~ltncnclttzmmsmVEEhmEsgEgsiVEEhmmmdEdzEgdkkkgVkkgdkdEEE10k0T4.-78oC27oC500oC5.3-2m*nm*pNC,NV6.-78oC27oC300oC7.Nc=1.051019cm-3NV=3.91018cm-3m*nm*p77KNCNV300KEg=0.67eV77kEg=0.76eV77K1017cm-3Ec-ED=0.01eVED51054.451054.4evEmommmAGevEmommmsievEmommmGeNNnhkoTmNhkoTmNgpnsagpngpnekoTEvcipvnCg428.1;47.;068.0:12.1;59.;08.1:67.0;37.;56.0:)()2(2)2(25000000221232232eVkTeVkTKTeVkTeVkTKTeVmmkTeVkTKTmmkTEEEEmmmmSiSinpVCiFpn022.008.159.0ln43,0497.0573012.008.159.0ln43,026.03000072.008.159.0ln43,016.0195ln43259.0,08.1:32220011008.7NcNVEg=0.67eV300K500KND=51015cm-3NA=2109cm-33173183'3183193'3''/1008.530077109.330077/1037.1300771005.13007730077772cmNNcmNNTTKNKNNNKVVCCCCVC317181717003777276.0211718313300267.0211819221/1017.1)1037.110067.001.021(10)21(2121exp21/1098.1)1008.51037.1(77/107.1)109.31005.1()()3(00000cmeNnkoTEenNeNeNNnncmenKcmeneNNnCoDDNnTkEDTkEEEEDTkEEDDkikikoTEgvciCoDFCcDFD3150212202122020202000031521''313221/105)2(2)2(20)(0/109.6)(500/100.2)(300.8'020cmnnNNNNpnNNNNnnNNnnnpnNNpncmeNNnKcmeNNnKiDADAiADADiADiADVCiTkEVciTkgegkgmNTkmkgmNTkmTmkNTmkNvpcnpvnc31031202310320223202320106.229.022101.556.022)2(2)2(21.79.1016cm3,1018cm-31019cm-30.05eV%902111%102111%10%,9005.0)2(27.0.0108.210ln026.0;/10087.0108.210ln026.0;/1021.0108.210ln026.0;/10,ln/105.1/108.2,300,ln.90019193191918318191631603103190TkEEeNnTkEEeNneVEEeVEEEcmNeVEEEcmNeVEEEcmNNNTkEEcmncmNKTNNTkEEEFDDDFDDDDCccFDccFDccFDiDiFiCCDcFF317181631716317026.005.0'026.0023.019026.0037.018026.016.0026.021.016105.210,10105.210/105.221.0,026.005.02%10()2(2%10%802111:10%302111:10%42.021112111:10cmNcmNcmeNNeNNkoTEeNNDeNnNeNnNeeNnNDDCDCDDCDDDDDDDEEDDDCD10.90%n300K11.ED=0.01eVND=1014cm-3j1017cm-399%90%50%12.ED=0.04eV1015cm-31018cm-399%90%50%13.nND=1015cm-3,77K300K500KDFFDDDFFDDFDDFDFDEEEEcmNEEEEcmNEEcmNTkEEEE026.0023.0;/1026.0~037.0;/10026.016.021.005.0;/102319318316''31714313317026.00127.019026.00127.00319/1022.3~104.2~5/104.2/1022.321005.11.021.0026.00127.0exp2%10)exp(2300/1005.1,0127.0.10cmNnAcmnGNAcmeeNNNNTkENNDAKcmNeVEADisieDsCDCDDCDsCDs800K3-714.ND=91015cm-31.11016cm333KρeVnpTkEEeVNpTkEEcmpnncmNNpcmnSiKTiiFvVFiDAi336.0105.1102ln026.0ln224.0101.1102ln026.0ln10125.1102,105.130010150019150035020315031015.1022300K600Kρ3-73170317315203143150315310/10/108000)4(/1014.124~/104500)3(/10/10/103002.13cmnncmnKcmnNNnNcmnKcmNncmNcmnKiiiDDDiDDieVnpTkEEcmncmpnpnNnpcmnKTeVNpTkEEeVnpTkEEcmpnncmpacmnKTiiFiAivVEiiEii025.01011062.1ln052.0ln/1017.6/1062.1/101600)2(184.0ln359.01010ln026.0ln/1025.2/10,/105.1300)1(16160031503160200003160010160034020316031016.1.5102351022300K600Kρ3-73171317003917260203170313316317102:60022.0102101ln026.0ln10101104101300102:300105,105.1cmnKeVnnTkEEcmnnpcmNNnKcmnKcmNcmNiiiFiADiADeVnnTkEEnnpnNNNNnnpnNpNniiFiiADADiDA01.0102106.2ln072.0ln106.1106.224)(17170017020172202000017.1013cm3n400Kρ18.n.eVρeVnnTkEEcmnnpnNNnnnpNpncmnKcmNsiiiFoiiDDiDiD017.01011062.1ln035.0ln/1017.61062.14212,0(/101400,/10:.17131303122013222313313318026.0062.0190000/191015.5%5031054.2108.2534.0,12.1:062.02ln026.0044.02ln2ln2ln.221211.180cmNNncmeeNneVEEeVEsieVEETkEETkEETkEEeNnTkEEeNnDDTkEEciFgcCDCDFDFkoTEEDDFDDDFCFD19.nEF=EC+ED/20.039eV20.nn1n0.039eV300KEF0.026eV2n4.61015cm-3,300KEFρ35.21015cm-3,300KEFρ4500K31821002100210318192102100/1048.9026.00195.0exp21026.00195.02exp(212)exp(2120195.022/1048.93.014.32108.2)71.0(220195.02039.022222.19cmFNTkEETkEEFNNTkEENTkEEFNEEEEEEEnncmFNTkEEFNnTkEEEEEEEEEEEEECDFCFCDDFDCFCDCDDCDFDCCFcDCDCCDCCFCDCF3-7eVnpTkEEnpiiE0245.0ln109.11083.80014014021.20000314105.11060035142100203141515034152100203150031