V.L.MironovThetextbookforstudentsoftheseniorcoursesofhighereducationalinstitutionsFundamentalsofScanningProbeMicroscopyTHERUSSIANACADEMYOFSCIENCESINSTITUTEOFPHYSICSOFMICROSTRUCTURESNizhniyNovgorod2004V.L.MironovTextbookforstudentsoftheseniorcoursesofhighereducationalinstitutions________________________________________________________________________________________________________________________________________________________________FundamentalsofscanningprobemicroscopyTHERUSSIANACADEMYOFSCIENCESINSTITUTEFORPHYSICSOFMICROSTRUCTURESNizhniyNovgorod2004V.L.MironovThetextbookforstudentsoftheseniorcoursesofhighereducationalinstitutionsTHERUSSIANACADEMYOFSCIENCESINSTITUTEFORPHYSICSOFMICROSTRUCTURESNizhniyNovgorod2004AbstractThisworkisatext-bookforseniorstudents,dedicatedtooneofthemostmoderntechniqueinthefieldofsurfacescience:theScanningProbeMicroscopy(SPM).ThebooktakesintoaccountthebasicSPMtypes:ScanningTunnelingMicroscopy(STM),AtomicForceMicroscopy(AFM),ElectricForceMicroscopy(EFM),MagneticForceMicroscopy(MFM),ScanningNear-fieldOpticalMicroscopy(SNOM),whichhavefoundthemostwidespreadapplicationinscientificresearchactivities.©2004,NT-MDTAllrightreservedTableofContentsForeword.............................................................................................................................................4Introduction.........................................................................................................................................51.Thescanningprobemicroscopytechnique.....................................................................................61.1.Workingprinciplesofscanningprobemicroscopes...............................................................61.2.Scanningelements(scanners).................................................................................................71.3.Devicesforprecisecontroloftipandsamplepositions........................................................131.4.ProtectionofSPMagainstexternalinfluences.....................................................................171.5.AcquisitionandprocessingofSPMimages..........................................................................212.Operatingmodesinscanningprobemicroscopy..........................................................................362.1.Scanningtunnelingmicroscopy............................................................................................362.2.Atomicforcemicroscopy......................................................................................................522.3.Electricforcemicroscopy......................................................................................................742.4.Magneticforcemicroscopy...................................................................................................772.5.Near-fieldopticalmicroscopy...............................................................................................85Conclusion.........................................................................................................................................92BasicstagesofSPMdevelopment....................................................................................................93REFERENCES..................................................................................................................................95FundamentalsofthescanningprobemicroscopyForewordThistextbookiswrittenonthebasisofthecourseoflecturesgivenbytheauthorin2002–2003tothestudentsofseniorcoursesoftheradiophysicalfacultyandtheAdvancedschoolforgeneralandappliedphysicsfacultywiththeStateUniversityofNizhnyNovgorod.Theunderlyingmotiveformakingthiseffort,althoughthereisanextensiveliteratureonscanningprobemicroscopyavailabletoday[1-13],wasanearlytotallackofeducationalmanualsontheSPMmethodology.Thetextbookwaswrittenwithinashortperiodoftime(twomonths,actually)attherequestoftheNT-MDTcompany(Moscow,Russia),producerofscanningprobemicroscopesforscientificresearchandaspecialSPMeducationalsystem.Iadmitthatwithintheshorttimeavailableforcompletingthisworkcertaindrawbackscan’thavebeenavoidedandwillbegratefultoeveryoneforpointingoutpossibleerrors,inaccuraciesandforothercriticalremarks.ThewritingofthetextbookwasinmanywaysinspiredbyS.V.Gaponov,DirectoroftheInstituteforphysicsofmicrostructuresoftheRussianAcademyofScience,correspondingmemberoftheRussianAcademyofScience.IexpressdeepgratitudetotheIPMRASemployees,D.G.Volgunov,S.A.TreskovandO.G.Udalov,fornumerousfruitfuldiscussions;tomywife,G.V.Mironova,forcarefulproof-readingofthemanuscript;toDr.V.N.Rjabokon(NT-MDT)forcriticalandconstructivereviewingoftheRussianversionofthisbook;toDr.G.Torzo(ResearchDirectoratICIS-CNRUniversityinPadova,Italy)forcarefulreviewingandcorrectionoftheEnglishversion.IamalsosincerelygratefultotheNT-MDTcompany,especiallytoV.A.Bykov,V.V.KotovandA.V.Bykov,fortheirsupportofthepublishingproject.V.L.Mironov4IntroductionIntroductionThescanningprobemicroscopy(SPM)isoneofthepowerfulmodernresearchtechniquesthat