机电一体化微电机的开发现状和发展前景

õREVIEW(223400),,EXPLOITINGSTATUSANDDEVELOPINGFOREGROUNDOFMECHATRONICSMICROMOTORAbstractMechatronicsmicromotorisakindofhightechniqueproductinvolvingmanysci2encefieldse.Thethesisintroducesitsexploitingstatusanddevelopingforeground,discribesitsapplicationinindustrywithexamples.Keywordsmachatronics,micromotor,status,application,development1,,,[1],2[23],70,,,,,,70,,(PEAC)B.K.Bose(AdvancedMotor),1÷100000,IGBTMCT,(DSP),,33©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,,,,,,,,,,,,,80,,(FG),,1,,(FG),,1OAFAHAFDD33.1[4,5](1mm),,(),(MEMS),1983RogerHowe(Sacrificiallayer),19887,11.5Lm100Lm,,,,,3,120Lm,1200römin,,100Lm,0.00120römin,,20V,,,,,431997302(97)©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,,,sio222,,,;;3.2(BacterialFlagellarMotor)(),(50nm),Lm(,),,Lm10Lm,20nm3,10,,,,LP,(Mott)344.180,,,4,,,,,5,2CPUMN18982(,8bit,8KROM),IM(),SM()53©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.4IM5SM4.2[6],,()(631997302(97)©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.6),(),,(20000römin),25000120000römin,6›„ˆ,,,,5,(CNC),,,,,,,,,,,1..,1994(3)2..,,:1995(4)3..,1993(4)4..,1995(4)5M.nehregary.¾„ÍÂ-Ÿ.,1991(14)6..,1994(4)(:19960826):,1958,73©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.