气敏传感器的研究现状与发展趋势

:100320794(2005)04200032031,1,1,1,2(11,221008;21,310000):,,,:;SnO2;MEMS;:TP212:A1,(),,,,2,,,:(1),,(2),,,(3)(4)(MEMS),MEMS,,30100m(5),,,,,;;,3,,,,,,SnO2SnO2,SnO2SnO2,,,,,,,SnO2SnO2,,,,,-,--SnO2SnO2,,SnCl4,,-,,,,SnO2,,SnO2,320054SnO2,,,,SnO2,SnO2,,,,,SnO2,,,,:(l),SnO2,,,,,,,,,,,,,,,,(2)SnO2,,SiO2,COH2,PdCl2,SiO2PdCl2;CuO(2.4%4.6%)H2S;MgOAl2O3CaO;CdOPbOCaO,V2O5Nb2O5MoO3SnO2,Ti4+Ge4+Li+Al+H2S,Pb3+Tn4+Ge4+;PtSiO2,600,;CO(Y2O3Er2O3ZrO2Sb2O3),Er2O3;AgCuOZnO,SnO2,ZrRe2O3SnO2;PtPdRhIr;ReddyMoN2LPG,;YulongXuLiO2,;DongHyunkimLa2O3SnO20.01Mla,1000CO;FukuiCOCr;Quaranta5%OsCH4,;ChaudharfRuPdAgH2(3),SiO2H2,(4),,,,,SnO2,,(5),(-),,--,(6)4(Nano-ST)0.1100nm,,(1),:,,;;(2),,,,,,,,,4,20054,,,,,,5SnO2,,:;;;,;,;,;,:MOSSnO2,,,,,:[1],.[M].:,2002.[2].[J].,2000,14(9):1-5.[3].[J].(),2001,14(1):37-41.[4].[J].,2002,(1):2.[5].SnO2[J].(),2002,(5):65-68.[6],,.[J].,2002,(7):1-6.[7],.SnO2[J].,1999,18(6):36-39.[8].-[J].,1998,17(4):5-8.:(1981-),,,03,1E-mail:[e-mail].:2005203201TheCurrentResearchSituationandDevelopmentTrendofGasSensorJIALiang-ju1,YINGPeng-zhan1,XULin-min1,NIZi-feng1,WANGYa-qing2(1.ChinaUniversityofMineandTechnology,Xuzhou221008,China;2.ZhejiangTeacherUniversity,Hangzhou310000,China)Abstract:Thetechnologyofthesensorisamodernmeasuringandoneoftheimportantfoundationsoftheautomatictech2nology,ithasalreadygotdeeplytoeachfieldofhumanlife.Withthepopularizationandapplicationdaybydayofthemicrocomputerandmicroelectrictechnique,haveputforwardthenewdemandfortheperformance,quantityanduseofthesensor,thismakespeopleaddandpayattentiontothedevelopmenttothenew-typesensorevenmore.Thistextin2troducestheresearchcurrentsituationoftheangryquicksensoranddevelopmenttrendespecially.Keywords:gassensor;SnO2;MEMS;nano-technology2005:20058911:(6):::():1:,,,,,,;,200520058911,,,,,,2:3:31118:100043:010-6868347781606655:010-68683076:E-mail:[e-mail]:13838026323520054,