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X()010-85252365100020XFPX1DevelopmentofWavelengthDispersiveX-rayFluorescenceAnalysisShimadzu(HongKong)Ltd.,BeijingOffice.Tel:+86-10-85252365ZIP:100020Abstract:Inthispaper,discussedthedevelopmentsituationofwavelengthdispersiveX-rayfluorescence(WD-XRF)analysis.ExcepttheWD-XRFdevelopscontinuouslythefeatureofhighprecisionandstabilityfornormalandmicrocontentselement,ithadbeenexpanditsanalyticalrangetotraceelement.Toovercometheweakpointsoflightandmiddle-heavyelementalanalysis,ithasresearchedthenewesthighorderspectrumanalysismethod.Developedthemicro-areaelementaldistributionimageanalysis.Tosuitednewmaterialandnanometerscaleespecially,thinfilmanalysishasbeenprogressinthecommercialequipmentandapparatus.Meanwhile,thispaperhasbriefintroducedthedevelopingsituationoftheFundamentalParameter(FP)methodwhichquantitativeanalysiswithoutstandardsamples.Keyword:WavelengthdispersiveX-rayfluorescence(WD-XRF);Micro-areaelementaldistributionimageanalysis(image-XRF,iXRF);Highorderspectrumanalysismethod;Thinfilmanalysis;FundamentalParameter(FP)methodwhichquantitativeanalysiswithoutstandardsamples.2XFP119954KWXXppm4KWX3KWX19K~92U30%4Be~17Cl70%[1]SCl4KWXX4KWX[2]X4KWX3KWXX21995X3[3]1250[4]CCD90XXiXPS[5]XXiXRFXX0.5[1]XiXRFX5~X20iXRFXppmCCD14CN3XPHDXPHD51P2Na1300%Ca3Mg1300%NaCaX26Cu4P1500%Cu2Ti11100%PTiXX[1]4XThinFilmFPMethod1010010-ThinFilmFPMethodXXNetPeakBackgroundFPMethodBG-FPXX[6][7]BG-FP[8]7XC,H,O,N,S[9][10][11]ThinFilmFPMethod5~10Å[1]5ThinFilmFPMethodBulk/PowderFPMethodFP1~2FPQuantitativeFPMethodSemi-FPMethod,SFPMatrixCalibration[12]ODSUniQuantUniQuantUniQuant5[13]FP81FPXFPXEDXFP[14]2ECFPFP[1]3ISOFeKCoK[15]FPXXX(Micro-Calorimetrictype)9X[1]XXRF-1800[2]VARIANOEG-83JRhInstruction1995[3]ShimadzuApplicationDataNo.174,No.175[4]ShimadzuLabCenterXRF-1800(C142-E019)[5]KratosAXIS-HSImageXPS(1992)[6]X-X28X1992[7]X-X541993[8]X-29X1993[9]X27X199010[10]X-521991[11]X-30X1994[12]XRF-1700/15001997[13]Uniquant4and5InstructionManual1999[14]ShimadzuEDX-700/800InstructionManual(1999)[15]ShimadzuApplicationDataNo.9011