红外窗口和整流罩材料研究现状与发展趋势

364人工晶体学报Vo.l36No.420078JOURNALOFSYNTHETICCRYSTALSAugust,2007李跃龙,黎建明,苏小平,杨海,那木吉拉图,李楠,杨鹏,李金权(,,100088)::;;,:;;;:O78:A:1000985X(2007)04087708ResearchTrendsandCurrentStatusinInfraredWindowandDomeMaterialsLIYaolong,LIJianming,SUXiaoping,YANGHai,NAMujilatu,LINan,YANGPeng,LIJinquan(BeijingGuojingInfraredOpticalTechnologyCo.,Ltd,BeijingGeneralResearchInstituteforNonferrousMetals,Beijing100088,China)(Received31January2007,accepted5April2007)Abstract:Thethermalfracturefigureofmerit,opticaldistortionfigureofmerit,andthethermalshockfigureofmeritareintroduced,andappliedtoevaluatemagnesiumfluoride,spine,lsapphire,AlON,ZnS,ZnSeanddiamond.Theresearchstatusandtrendsofthesematerialsarealsosummarized.Keywords:infrared;window;dome;figureofmerit:20070131;:20070405:(1983),,,Emai:[e-mail]1引言,[1],,;;/,[2,3],,,,,,2红外窗口和整流罩性能评价[4],87836M:M=K/E(1):,K,,,E(1),,,Q:Q=K/X(2)X,:X=dn/dT+(1+v)(n-1)+0.5n3!(3):n,T,v,!,(1)(3),,,(2)(3),,,,,,[5],R:R=5/3(1-v)K/E(4)(1)(3)(4),,,,;;,,;[6]/,(10)(0.01)[3]1,212,,,MgF2,,,AlON,,ZnS,ZnSe,,,,,,1Table1BasicpropertiesofthedominatinginfraredmaterialsMaterialsOpticalwaveband/∀mRefractiveindexMeltingpoint/Densityg/cm3Knoophardness/MPaDielectricconstantDielectriclossHPMgF20.791.333a12553.186405.10.001Spinel0.261.698b21353.5816009.20.0022Sapphire(0001)0.1461.622b20503.98160022009.40.0005AlON0.25.51.656b21583.7819509.30.0027CVDZnS0.6132.192c18304.092508.350.024ZnSe0.5202.403c15205.271508.980.017!adiamond0.25351002.376c37703.5290005.70.0044:8792Table2FiguresofmeritofthedominatinginfraredmaterialsMaterialsvEMPa∀102cm-1MPaKW/m#K∀106/Kdn/dt∀106K-1M∀10-3Q∀10-6R∀10-3HPMgF20.301141.4a[4]15014.710.411.1132.7187.336.7Spinel0.2619340b[7]19014.65.6136.42.0462.8Sapphire(0001)0.2734480b[7]448680345.31010.43.00357.1AlON0.24317160b[7]30012.65.8131.30.4470.0CVDZnS0.307410c100197.05036.73.1255.3ZnSe0.28700.04c50167.6603759543.114.7!adiamond0.10105047c[8]250020000.81012664379.6106:a5.25∀m,b5∀m,c10.6∀m;[5];,3红外材料研究现状,:,3.1(MgF2)1255,0.7~9∀m,3~5∀m,,,,,[9,10],/MgF2,,MgF2[10],,600~700,1000~3000Kg/cm2,,,,,,#360mm∀15mm#300mm188036,,,[11][12],,,,3.2(MgAl2O4)2135,(0.2~6∀m),,[1315],1961,://[5],,,(MgAl2O4),,,,,,[16]2AlphaOpticalSystems,Inc90,AlphaOpticalSystem220mm[4]90,,,[6]3.3(Al2O3)2055,,3~5∀m85%,,,,,[5]90,MellerOptics.Inc[17],,,,,,,,monocrystal(Kyropolous)300mmCrystalSystemsInc.(HeatExchangerMethod)380mm[18]3HEMGSMFig.3SamplesofHEMsapphirecrystalbouleandGSMsapphiredome,,,(NearNetShaping),Rotem(GradientSolidificationMethod),4:881[19](EdgedefinedfilmfedgrowthEFG)(NoncapillaryShapingMethod)(LocalDynamicShaping),[2025]3(HEM)(GSM),,[26](#200mm)[27,28]2002,180mm,,3.4(AlON)AlON2158,,,,[29]Raytheon80Al2O3N2,,N2AlNAl2O3,AlNAl2O3,AlON,,[5]:Al(64+x)/3V(8-x)/3O32-xNx,V27~40%,AlONAlON,,,∃Al2O3,N2,,,Al2O3AlNAlONAlON,:,;;;[30]AlON[31]4AlONFig.4SamplesofAlONwindowsanddomesRaytheonAlON,2002SurmetRaytheon,,AlON1168∀610∀31mm3[30],4SurmetAlONAlON,AlON,∃%,AlON,AlON,[6]3.5(ZnS)(ZnSe)(CVD)ZnSZnSeZnS,1830,0.6~13∀m,,,88236,,[31]ZnS,,1987,AdvancedOpticalMaterialsLab(AOML)ZnS[32],ZnS,,10∀m55~70%[33]Raytheon,!&Corporation,300mmZnS,NortonZnS,[31,34]!&ZnSeZnS,ZnSeZnS,,,ZnS/ZnSe(TUFTRANNTM)(CVD),ZnSe1mmZnS,ZnSeZnS14∀m,ZnS,ZnSeZnSe,ZnSe,Norton[35]ZnSZnSe,280mmZnS5ZnS3.6(C),,,,[36](CVD),CVD!a(!a),CVDCVD(100~300∀m)10010,CVD[37]CVD,,,CVD,[8]6MalvernTechnologyCentre2003,Raytheon#120mm∀2.5mm,#70mm,0.7mm[37]4:883,,,,[38,39],,4发展与展望,,,,,,:(1):,;(2),,ZnS/ZnSe,,,[1],.[M].,2004:5.[2],,,.15~50∀m[J].,2004,27(4):27.[3],,./[J].,2001,1:57.[4]ThomasDeutschF.LaserWindowMaterialsAnReview[J].ElectronicsMaterials,1975,4(4):663677.[5].[M].,2006:4344,188,192193,281.[6],,,.[J].,2003,32(3):276.[7]AlexanderMarkerJ,MarkDavisJ,MarkPatterson.FabricationofLargeThickPanelsofTransparentSpinel[J].InorganicOpticalMaterialsIII,SPIE,2001,4452:126129.[8]DanielHarrisC.PropertiesofDiamondforWindowandDomeApplications[J].SPIE,1994,2286:221.[9]DavidTenyH,MichaelThomasE.OpticalPropertiesofPolycrystallineMagnesiumFluoride[C].PartoftheSPIEConferenceonWindowandDomeTechnologiesandMaterialsVI,SPIE,1999,3705:105.[10],,,.[J].,2004,36(1):41.[11],[J].,2000,29(5):39.[12],.[J].2001,27(6):486.[13]MarkCLPatterson,AnthonyA,eta.lSpine:lGainingMomentuminOpticalApplications[J].WindowandDomeTechnologies∋,SPIE,2003,5078:71.[14],,,.[J].,2005,4:19.[15],,,.[J].,2001,30(1):6970.[16]RonaldCook,MichaelKochisa,IvarReimanisb,eta.lANewPowderProductionRouteforTransparentSpinelWindows:PowderSynthesisandWindowProperties[J].SPIE,2005.[17],.[J].,2005,25(2):133.[18]ChandraPKhattak,PaulJGuggenheim,FrederickSchmid.Growthof15InchDiameterSapphireBoules[J].SPIE,2003,5087:47.[19]BidermanS,HorowitzA,EinavY,eta.lProductionofSapphireDomesbytheGrowthofNearnetshapeSingleCrystals[J].SPIE,1991,1535:2734.[20]ChandraP,Khattak,FrederickSchmid.ProductionofNearnetshapedSapphireDomesUsingtheHeatExchangerMethod(HEM)[J].WindowandDomeTechnologiesandMaterials(,SPIE,1992,1760:4147.[21]PeterIAntonov,VladimirNKurlov.AReviewofDevelopmentsInShapedCrystalGrowthofSapphirebyTheStepanovandRelatedTechniques[J].PmgressinCrystalGrowthandCharacterizationo