LTCC基板上电阻的设计与制造_王啸

8Vol.25No.820068ELECTRONICCOMPONENTS&MATERIALSAug.2006LTCCLTCC,LTCCLTCCTCRTM54TN605A1001-2028200608-0064-03DesignandManufactureofResistorsonLTCCSubstrateWANGXiao,MATao,LIFeng(NORINCONo.214Institute,Bengbu233042,China)Abstract:Therearemainly3waysinmanufactuingfilm-resistorsonLTCCsubstrate:top-layerco-firing,top-layerpost-firingandin-beddedresistor-making.Inproductionpractice,suitableresistorprocessingwayshouldbechosentomeetthespecificrequirementsofeachpart.Althoughallthreewaysshallhavefilm-resistorsmadebyprintingontheLTCCsubstratesurface,theresistancevalue,accuracyandreliablitityvariesfromeachother.AnapproachandtheoryareprovidedindesigningandmanufacturingfilmresistorsonLTCC.Keywords:electronictechnology;squaureresistance;co-fire;post-fire;TCRLTCCLTCCLTCCDuPontFerroHeraeusESLDuPontFerroHeraeusCT2000ESLLTCCLTCCLTCC11.1LTCCLTCC1.2DuPont95119LTCC11959FerroA6R&D2006-04-121969LTCCE-mail:[e-mail]865LTCCFX8721DuPont19Tab.1SqureresistancevaluesofduPont19-seriesresistancepastes19211931193919491959100Ω1kΩ10kΩ100kΩ1MΩ2FerroFX87Tab.2SqureresistancevaluesofferrpFX87-seriesresistancepastes10–6–110–6–1FX8701110Ω±30%——FX87—01110Ω±30%——FX87—101100Ω±30%±450±450FX87—101100Ω±30%±450±450FX87—1021kΩ±30%±200±200FX87—1021kΩ±30%±200±200FX87—10310kΩ±30%±200±200FX87—10310kΩ±30%±200±20022.1DuPont192.1.11LTCC25µm1mm×1mm19LTCC33LTCC19Tab.3Actfiredresistorlength/widthratiovaluesofvariedsizes,printedwithduPont19-seriesresistancepastes×19211931193919491mm×1mm1.3151.2880.9981.4731.5mm×1.5mm1.6371.1781.2511.7182mm×2mm1.8081.5391.3801.9261.5mm×1mm2.1341.8031.6012.3822mm×1mm2.8622.4352.3233.404319211931194919391mm×1mm232528µm25µm22.5°28N25µm21MPa10min10min44Tab.4Firingparameters&mainindexes25~45010/min30min45060min87515min2.1.2125µm1921193119491.9~21921100Ω/□19311kΩ/□1949100kΩ/□0.9mm×1mm175Ω1.8kΩ180kΩ37~39µm79Ω0.78kΩ90kΩ0.5~0.62850/10min1h2.2FerroFX8787FerroA6A61FX87FX33188232515µm25~28µm3705~10min4A652TCR2.3LTCC12LTCC3LTCC662006ABC0.125mm0.125mm0.250mm0.250mm0.250mm0.375mm0.250mm0.250mm0.375mm1Fig.1Resistorpatternsandendingsizes(minimum)specificationA()B()C()0.375mm0.375mm0.750mm0.500mm0.500mm1.00mm0.750mm0.750mm1.250mm2LTCCFig.2LTCCresistordimension3.1R=ρL/(tw)1ρLtwRρLwtR=f(ρ,L,w,t)2ρLwtρLwt±10%±2%±2%±10%1R=[(ρ±10%)×(L±2%)]/[(t±10%)×(w±2%)]33R[(1–10%)×(1–2%)]/[(1+10%)×(1+2%)]~[(1+10%)×(1+2%)]/[(1–10%)×(1–2%)]=0.7861~1.2721R–21.39%~+27.21%±27%±27%3ρ3.2FerroFX871233FX87453FX87Fig.3FX87-seriesresistanceandtheinter-relationschartwiththeresistor-printinglayers4FX87103Fig.4FX87103resistorthermalcoefficientchanginggraphwithvariedinbedlayers5FX87102Fig.5FX87102resistorthermalcoefficientchanginggraphwithvariedinbedlayers69BCA0.375mm×0.375mmABC10Ω100Ω1000Ω10000Ω0246810121416100001000100101/(Ω·□–1)10000Ω10000Ω1234567250200150100500–50–100–150/10–6–1/10–6–11000Ω1000Ω012345678910500450400350300250869165Fig.5PCBofthefrequencymultiplier33Tab.3ComponentvaluesinfinalcircuitL/nHCt/pFLm/nHCm/pFRb/Ω1582337503RbRbCj3dBp10dBm6316N56Fig.6Spectrumoftheoutputsignal[1],,,.[M].:,2004.198–206.[2].[M].:,1976.319–337.[3][]-.——[M]..:,1982.196–200.6341NDϕ0PTCPTC2Ca2+PTCCa2+15%3CaTiO3Ca2+Ca2+1350[1],,.PTCR[J].,2005,24(4):48–51.[2].[M].:,1993.[3],,,.BaTiO3PTC[J].,2004,23(4):25–28.66FX87103FX871024LTCCLTCCLTCC–55~125±0.5%±0.5%LTCC[1],.LTCC[J].,2003,(3–4):83–84.[2].[J].,2000,19(5):1–2.[3]RaymondBrown.ReliabilityTestingofLTCCStructures.DesignRulesforPhysicalLayoutofLTCC[Z].NationalSemiconductor,2000.BPF100MHz1.5961.5981.6001.6021.604f/GHz10–10–30–50–70P/dBm