guolinli@tsinghua.edu.cn20052DUPLEXERLNAPAADCDACDSP(De/Mod)Baseband20053DUPLEXERLNAPAADCDACBasebandDSP(De/Mod)/200542005520056AgilentKazunariOkada,ToshimasaSekino,AgilentTechnologiesImpedanceMeasurementHandbook,Dec,2003…EricBogatin,SignalIntegrity:Simplified,PrenticeHall,20032005HowardJohnson,HighSpeedDigitalDesign---AHandbookofBlackMagic,PrenticeHall,199320042005720058Therearetwokindsofdesigners,thosewithsignal-integrityproblemsandthosethatwillhavethem.Asclockfrequenciesincrease,identifyingandsolvingsignal-integrityproblemsbecomescritical.Thesuccessfulcompanieswillbethosethatmastersignal-integrityproblemsandimplementanefficientdesignprocesstoeliminatetheseproblems.Itisbyincorporatingnewdesignrules,newtechnologies,andnewanalysistoolsthathigherperformancedesignscanbeimplementedandmeetever-shrinkingschedules200592005101.Aline-widthchange2.Alayerchange3.Agapinreturn-pathplane4.Aconnector5.Abranch,tee,orstub6.TheendofanetThewaytominimizetheproblemsassociatedwithimpedancechangesistokeeptheimpedancethesignalseesconstantthroughoutthenet200511Crosstalk∆200512Rail-CollapseNoiseΩΩ2005133MC-PlyH=8umε=200.5V/div5ns/div200514EMI200515200516200517……3214567890*#200518IVZ=Ω5.0Ω1Ω10MHz10MHz100GHz1//…Onlyrealdevicescanbemeasured,andonlyidealelementscanbecalculatedorsimulated200519RIVZ==()dtdVCVdtCVdVdtdQVIVZ====IdtIdLIVZ==200520dtdVCVIVZ==?ttCdttdCtZωωωωωcossin1sinsin==√?90°200521ttCdttdCtIVZCωωωωωcossin1sinsin===CjeCeeCZjtjtjCωωωπωπω11122===−⎟⎠⎞⎜⎝⎛−LjZLω=Ω=×××==016.010114.3211nFGHzCXCω200522jBGVIY+==jXRIVZ+==admittanceimpedanceGjBconductancejXRsusceptancereactanceresistance200523ϑ∠=+=YjBGYresistiveinductivecapacitiveZθθ∠=+=ZjXRZRX22XRZ+=RXarctan=θconductiveinductivecapacitiveZY1=ϑGB22BGY+=GBarctan=ϑ200524=QresistiveinductivecapacitiveZθRXRXQ==θtanconductiveinductivecapacitiveϑGBGBQ==ϑtanBGD===δϑtanctanDissipationfactorCGBGωδ==tanδQualityfactor200525Q:165Q=120?DUTZAnalyzerQ:165Q:120LCRmeterL:5.231uH?DUTL:5.310uHLCRmeter5.310uHLCRmeter5.231uH200526……200527…200528RLC200529VacCLowεMidεHighε200530IdcL/%05010002-2-4-6-8-10-20VdcTypeITypeIIC/%05010002-2-4-6-8-10-20NPO(lowε)X7R(highε)200531TypeIandIISMDCapacitorsT/CTypeITypeIIC/%-6060140101550-5-10-15-20NPO(lowε)X7R(highε)-2020100200532dACr0εε=+/-InstrumentTestfixtureRealworlddevice%200533DUTR+jXxxTestFixtureInstrumentPortExtensionTechniqueInaccuraciesComplexResidualsResidualsRFINoiseParasiticsCalibrationLOADCompensationCompensationEShieldingGuarding200534200535IV,ΓΓ−Γ+=110ZZIVZ=200536CRpp()PPSCDCC≈+=21CRss21QRRPS+=200537AutobalancingbridgeQResonantI-VI-VprobeI-VRFI-VNetworkanalysisTDR200538…200539NetworkAnalysis100KHz%5.1RFI-V1MHz1.8GHzI-V10KHz110MHz22KHzResonant30MHz70MHzAutoBalancingBridge5HZ40MHz%05.01101001K10K100K1M10M100M1G10GFrequency(Hz)2005401101001K10K100K1M10M100M1G10M1M100K10K1K100101100m10nH1nH100pH100nH1uH10uH100uH1mH10mH100mH10H1KH100KH1mF10mF100mF100uF10uF1uF100nF10nF1nF10pF100fF1fFFrequency(Hz)Impedance(Ohms)200541Frequency10M1M100K10K1K100101100mImpedance(Ohms)10m1m100M100K1M10M100M1GHz10GNetworkAnalysisRFI-V101001K10KI-V(Probe)AutoBalancingBridge200542200543VirtualgroundV-+2V1DUTR2I2HLII=I2222RIV−=221211RVVIVIVZdut−===200544ΩΩ…200545200546resistiveZθRXRXQ=200547V~OSCTuningC(Xc)VL(X),RDDDUTeI=eZ()CfLDUT2021π=eVQ=200548requiresexperienceduserVectorScalarautomaticandfastmanualandsloweasytouseNocompensationlimitedcompensation75kHz-30MHz22kHz-70MHz200549V2V1DUTV=IR22Z=VI12=VRV12I2R200550200551ViVvRoRoDUTVoltageCurrentDetectionDetectionLowImpedanceTestHeadCurrentDetectionVoltageDetectionCurrentDetectionVoltageDetection1−=vioDVVRZViVvRoRoDUTVoltageCurrentDetectionDetectionHighImpedanceTestHead⎟⎟⎠⎞⎜⎜⎝⎛−=1ivoDVVRZ200552Ω200553Γ−Γ+=110ZZ200554ΩSeriesR&LParallelR&C0tZLDUTOscilloscopeStepGeneratorVVINCR200555200556AutoBalancingBridge(Four-TerminalPair)Resonant(Q-Meter)RFI-VMeasurementMethodHPProductsFrequencyrangeHP41941AImpedanceProbe(withHP4194A)HP4193AVectorImpedanceMeterHP42851AQAdapter(withHP4285A)10KHzto100MHz400KHzto110MHz10Hzto40MHz5Hzto13MHz20Hzto1MHzspot100Hzto10MHzspot75KHzto30MHz75KHzto30MHzHP4263ALCRMeterHP4284APrecisionLCRMeterHP4192ALFImpedanceAnalyzerHP4194AImpedance/Gain-PhaseAnalyzerHP4285APrecisionLCRMeterHP427xALCRMetersHP4286ARFLCRMeterHP4291AImpedance/MaterialAnalyzer100Hzto100kHzspot1MHzto1GHz1MHzto1.8GHzI-V(Probe)Ω−ΩkBAgilent101.0:4291200557NetworkAnalysis(ReflectionCoefficient)TDNA(TDR)MeasurementMethodHPProductsFrequencyrange300KHzto1.3GHz/6GHz130MHzto13.5GHz/20GHz45MHzto100GHz5Hzto500MHz100kHzto500MHz100kHzto1.8GHzHP8751ANetworkAnalyzerHP8752C/8753DRFNetworkAnalyzersHP8510BNetworkAnalyzerHP54121TDigitizingOscilloscopeandTDRHP4195ANetwork/SpectrumAnalyzerwithHP41951AImpedanceTestSetHP8752C/8753DRFNetworkAnalyzersHP8719C/8720CNetworkAnalyzersHP8510BNetworkAnalyzerHP8719C/8720CNetworkAnalyzersHP4396ANetwork/SpectrumAnalyzerwithHP43961AImpedanceTestKit200558200559StandardDev