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2016-05ＲeceivedDate2016-05*51236003、1506ＲJZA076*730070。0．05mmCu/CuNi。118．8±1．64ms、、。TP212．11TN06A470．2010PreparationofmicrothermocoupleandcalibrationmethodoftimeconstantXuLixinXieJianbinYangZhiweiZhouFutaoSchoolofMechanicalEngineeringLanzhouJiaotongUniversityLanzhou730070ChinaAbstractDuringtransienttemperaturemeasurementthethermocoupleisrequiredtopossessaquickresponseperformancetoachieveanaccurateresultwiththelesstimeconstantthebetter．Thereforeaquickresponsemicrothermocoupleispreparedbyweldingmicrocopperwireandconstantanwireundertheobservationofdigitalzoommicroscope．Andtheexperimentalsystemofmeasuringdynamicthermocouplecharacteristicsisestablishedtocalibratethetimeconstantaccurately．AlsothetimeconstantoftheCu/CuNiquickresponsethermocoupleismeasuredwiththissystem．Asaresulttheresponsetimeofthepreparedmicrothermocouplehasreachedto118．8±1．64msthetimeconstantundercalibrationwiththisexperimentalsystemisaccurateandthedeviceissimplereliableandeconomic．Keywordsmicrothermocoupletimeconstantsteptemperaturestepresponse1、、。12KMAX6675。2s32ms1～2ms4－3．76℃/mm5。。cqstyq.com。。60．5～1．0μmTFTC。Kennedy735μm、、。＞4mm2。。。8。、、、、。910-11、、12-131415、。16。/650nm、。2、17-18。ρVcpdTdt=hATg－T1ρVcphAdTdt+T=Tg2cpρV/hA=ττdTdt+T=Tg3τT、Tgρ、cp、V、A、、ht。1V、A2ρ、cp3h。。3T－T0=Te－T01－e－t/τ4TT0Teτt。t=τ4T－T0=Te－T01－e－1=0．632Te－T055TT0T－T0Te－T00．632τ。0．632Te－T0T0τ。1T0、Te、0．632Te－T0τ。cqstyq.com1Fig．1Schematicdiagramoftheresponsecurveofthermocoupleonsteptemperaturesignal33．119、、、。0．05mm/2。、、。。。2/Fig．2Themagnifiedphotoofself－madeCu/CuNithermocoupleunderdigitalmicroscope3．2。3。、、650nm1W。5μs。B＆K3560C20770025．6kHz。。、。3Fig．3Schematicdiagramofsystemdevicefortestingthermocoupletimeconstant。。21。cqstyq.comτt=5τT－T0/Te－T0=0.993t≥5τT=Te5τ。τ5。44Cu/CuNi。43、、。。13．8mV318℃τ118．8ms115．2ms。4Fig．4Theresponsecurveofself-madeCu/CuNiquickresponsethermocouplesonsteptemperatureτ珔τσＲdUAB。AUAσBUB珔τ=1n∑ni=1τi6σ=1n－1∑ni=1τi－珔()τ槡27Ｒd=σ/珔()τ×100%8UB=1ξ/槡239U=U2A+U2槡B103120．6、118．4、117．4ms。珔τ=118．8msσ≈1．64msＲd=0．11%U≈1．64ms。珔τ=118．8±1．64ms。115.2、112.3、116．9msτ=114．8±2．33ms。、。。、。cqstyq.com。50．05mm/、、、。、、。。1．QGA-SVMJ．2014352343-349．WUPLINT．ＲesearchonidentificationmodelingofsheathedthermocouplesensorbasedonhybridQGA-SVMJ．ChineseJournalofScientificInstrument2014352343-349．2．J．200418421-32．CHENHMYANGCJCHENY．StudyonafacilitatedhighprecisiontemperaturemeasurementsystemJ．JournalofElectronicMeasurementandInstrument200418421-32．3．J．2003244143-144．ZHANGZHHYUANJMHAOTZH．AcompensationalgorithmforimprovingtheresponseofthermocouplesJ．ChineseJournalofScientificInstrument2003244143-144．4．J．200616916-19．HANGLHAOXJZHOUHCH．MeasurementtechniqueofthermocoupletimeconstantJ．SensorWorld200616916-19．5．J．201132193-98．ZENGXHQILHXIAOYetal．DroplettemperaturemeasurementandcalculationduringsprayprocessJ．ChineseJournalofScientificInstrument201132193-98．6MALKINS．J．20012111-5．XUXPMALKINS．Energypartitionatthediamond-workpieceinterfaceingrindingofgraniteJ．Tribology20012111-5．7KENNEDYFEFＲUSESCUDLIJY．ThinfilmthermocouplearraysforslidingsurfacetemperaturemeasurementJ．Wear19972071-246-54．8．M．1987．CHENHSH．TemperatureMeasuringTechnologyandInstrumentM．BeijingHydraulicandPowerPress1987．9．KJ．2010331118-20．FANGLDZHANGJKWANGNetal．StudyofdynamicresponseoncharacteristicsofK-typethermocoupleJ．ElectronicMeasurementTechnology2010331118-20．10．J．20082811-6．LIHYZHAOJ．TheＲesearchofdynamiccalibrationfortemperatureprobesJ．Metrology＆MeasuementTechnology20082811-6．11．J．200844434-36．WUJQINCMWANGL．StudyondynamiccharacteristicofthindiameterthermocoupleJ．AviationPrecisionManufacturingTechnology200844434-36．12．J．20022139-41．QIUGFMENFＲ．AnewmethodtodeterminetheresponsetimeofthermocouplesJ．JournalofNanjingInstituteofMechanicalTechnology20022139-41．13．J．2007284111-113．CHENXBIJJCUIZHW．ApplicationofMATLABtodynamiccalibrationofthin-filmthermocoupleJ．ChineseJournalofScientificInstrument2007284111-113．cqstyq.com