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:100525630(2006)0620017206CMOSMTFX,(,200093):CMOSMTF,CMOS,,MTF,CMOSMTF,:;CMOS;;:TN402:AApracticalmethodformeasuringmodulationtransferfunctionofopticalimagingsystembyusingCMOSimagersensorZHANGWen2hua,LIXiang2ning(UniversityofShanghaiforScienceandTechnology,Shanghai200093,China)Abstract:Thispaperintroducesapracticalmethodformeasuringmodulationtransferfunction(MTF)ofanopticalimagingsystembyusingCMOSimagersensor.Thismethodbringsinanewcon2ceptionofreferencefrequency.Byreadingthepixelvalueswhichreferencefrequencyandtestedfrequen2cymakeontheCMOSimagersensorthroughtheopticalimagingsystem,thismethodcancalculateouttheMTFoftheopticalimagingsystempromptlyandaccurately.ThereferencefrequencycaneliminatemostoftheimpactCMOSimagersensoritselfmakestothesystemMTFandthereforemaketheMTFvaluesmoreaccurate.Keywords:modulationtransferfunction(MTF);CMOSimagersensor;pixelvalue;referencefre2quency1(modulationtransferfunction,MTF)(opticaltransferfunc2tion,OTF),,[1]MTF,MTF,CMOS(complemen2286200612OPTICALINSTRUMENTSVol.28,No.6December,2006X:2006201205:(19782),,,,,tarymetal2oxidesemiconductor)CMOSCMOS,MTF,MTFCCD[2],CMOSMTF[3],,CMOSMTF,,,Ze2maxMTF,2MTF,M:M=(Imax-Imin)ö(Imax+Imin)(1)M,M,MTF:MTF=MöMMTF,,MTF,MTF:,MTF,MTF,(0.49lpömm),1,,MTF1,,CMOS,CMOSMTF,CMOSM(a)CMOS(b),M=f(a)õf(b)(2)MMTF,CMOSMCMOS,(q),M=F(q)õf(a)õf(b)(3)(3)CMOS,,MTF=MöM(4)1,M=(Imax-Imin)ö(Imax+Imin),M=(imax-imin)ö(imax+imin),ImaxIminCMOS(pixelvalue)imaximin8128CMOS1,21CMOS2()CCD,CMOSMTF,CMOS,,MTF,,,CMOSMTF,,CMOSMTF,,,MöM,CMOS,,CMOS,CMOSCMOS,CMOS3,,MTF(MTF0.3),,ZemaxMTF(Macro),3Zemax(F8)1.5lpömmMTF3ZemaxMTFMTF,MTF,10241280CMOSCMOS7Lm7Lm,CMOS71.43lpömm,,71.43lpömm.,1.5lpömm916:CMOSMTF,,0.49lpömm,1.5lpömm,Matlap(512)1024,2,MM,1.5lpömmMTF5,51.5lpömmMTF,1,411Zemax(mm)Zemax800.210.11200.730.651600.820.752000.520.512400.270.274Zemax141.5lpömmMTF,,,MTF1,,CMOS,,0.2lpömm0.49lpömm,1.5lpömm5,0.2lpömm,0.49lpömm,,,50.49lpömm0.20lpömm,,(8cm16cm),Zemax(0.1);(16cm),,:0228,,MTFMTF,,,MTF,70.49lpömm=80mm,(pixelvalue);0.2lpömm,,,,ZemaxMTF,,,MM,MM6,(a)80mm,(b)240mm[(b)],,,(a)(b)6(a)80mm;(b)240mm7MTF(=1.95lpömm)8MTF(=2.44lpömm)126:CMOSMTF,CMOS,2.44lpömm1.95lpömmF9,CMOS71.43lpömm,,Zemax4,CMOS,MTF,,CMOS,,,5[1]GoodmanJ,IntroductiontoFourierOptics[M].NewYork:McGraw-HillInc,1968.[2],CCD[J],,2003,23(7):830.[3],CMOSAPS[J],,2006,33(5):104.20061123,200nm,2,25,1970,,,,1ö3,200nm,200nm,,20nm,2007,80()2228