ColorFilter簡介XMTMCF陳柏樺2012.08.29.◆什麼是ColorFilter?◆ColorFilter製法分類◆ColorFilter製法比較◆ColorFilter製程◆廈門天馬ColorFilterLayoutBM/PS1BM/PS2OC-LineR-LineG-LineB-LineCFSputterTPSputterArrayPhotoSpare:玻璃基板流向。BM/PS1:天馬購入的Robot,設備商負責整合。:設備商自帶的Robot。L/DPre-PhotoCleanerCoaterHP/CPMuraCheckTitlerDeveloperAOIU/LDExposureNikonOVENBM/PS2:天馬購入的Robot,設備商負責整合。:設備商自帶的Robot。L/DPre-PhotoCleanerCoaterHP/CPMuraCheckTitlerDeveloperAOIU/LDExposureHitachiOVENChippingCheck:玻璃基板流向。CF&TPSputter:天馬購入Robot,In-LineSystem設備商負責Indexer及整合。:HandlingSystem,含在Sputter主設備內。Thanks!Q&A