()fengtang_chang@dtech.com.tw(VolatileOrganicCompounds,VOCS)VOCSVOCS(MEADMSONMP)MEA(MassTransferZone,MTZ)VOCS19025VOCS8971MEANMPPGMEPGMEA(Acetone)(IPA)[1],[2],[3][4],[5]--VOCSVOCS5~20[5]-[10]90%VOCS180~200()11()()1618011.5211801334IPAPGMEPGMEADMSONMPMEA1801050mm400mm1/43/411(123)1VOCSVOCSSeibuGiken22SeibuGikenmm50mm400//10:1:1mmΦ3.0H1.63mm0.2Kg/m3210m23200-0.73BETm2/g400ZSM-5zeolite400kj/kg1.047()1.VOCS(MEADMSONMP)200400VOCSIPA(1)50mm25mmZ50Z350(Z=400mm)(2)15030min(3)2004002(4)20IPA8000ppm3IPAIPA2.1801.5(1)A.180B.50mm100mma.I15030minb.IIVOCS(NMPDMSOMEA)24c.III2Z50VOCSVOCSIIVOCSC.1801.5(2)A.150mm1500mm190~200B.50mm100mma.I15030minb.II2Z50VOCSVOCSC.3m/s10000()3IPA20030~50%40070~90%Z50Z350400200(200400)Z50Z350Z350Z50VOCS3g%IPAgIPAgIPA%%z500.733.4721.070.110.5230.98200z3500.140.7717.640.100.5834.81z501.468.1418.180.241.3581.321400z3500.965.3118.270.241.3580.99z501.729.4618.340.150.8551.01200z3500.412.2618.340.130.6941.49z501.9310.6218.430.271.5190.832400z3501.397.7318.150.241.3279.18z500.492.3920.610.160.7645.87200z3500.130.6220.480.140.6840.88z500.94.6919.400.231.2072.293400z3501.326.7219.790.221.1568.930.050.3216.340.271.67-21312VOCS340020024002(abZ350cZ50)()1.3180VOCS2255502VOCS180O231802.4190100001903452Z508000190251VOCS561/52/53/54/5L(L400mm)4/5LMEAVOCS6()VOCSMEA4/5L()400270~90%200(DiscType)(RotaryCarouselType)()VOCS180~200VOCS()()VOCSVOCS1.VOCS(1)180200220(2)2.VOCSVOCSLocalCondenserPre-FilterDe-MisterVOCS3.(1)VOCSVOCS(2)(3)20~30%(7)74.(1)VOCs300oC(2)8RTO+H/E(Thermaleffectiveness)95%8RTOwithdesorb.H/ESeibuGiken1.19962.19983.19954.R.P.Brookman,E.FlahertyandD.K.Weadock,“EngineeringforToxicGasAbatement”,SemiconductorInternational,October,1988.5.89126.F.T.Chang,P.S.PeiandY.K.Chuah,“PerformanceofHoneycombVOCSconcentratorsforAnExhaustGas.”,20008thConferenceonAerosolScienceandTechnology,pp.552-557(2000)7.Y.Mitsuma,H.YamauchiandT.Hirose,“AnalysisofVOCReversingAdsorptionandDesorptionCharacteristicsforActualEfficiencyPredictionforCeramicHoneycombAdsorbent.”,J.Chem.Eng.Japan,Vol.31,pp.253-257(1997)8.Y.Mitsuma,H.YamauchiandT.Hirose,“PerformanceofThermalSwingHoneycombVOCConcentrator”,J.Chem.Eng.Japan,Vol.31,pp.482-484(1997)9.Y.Mitsuma,Y.Ota,T.KumaandT.Hirose,“PracticeoftheVOCAbatementbyThermalSwingCeramicMonolithAdsorbers”,Proc.4thJapan-KoreaSymposiumonSeparationTechnology,pp.479-482,TokyoJapan(1996)10.T.Kuma,T.Hirose,Y.MitsumaandY.Ota,“RemovalEfficiencyofVolatileOrganicCompounds,VOCS,byCeramicHoneycombRotorAdsorbents,”Proc.5thInt.Conf.FundamentalsofAdsorption,LeVan,M.D.ed.,pp.465-472,Kluwer,AcademicPublisher,Boston,USA(1996)