飞秒激光在材料微加工中的应用

张兴权周建忠王广龙(,212013):飞秒激光脉冲以超高速和超高峰值特性将其能量全部准确地集中在限定的作用区域,可对所有材料实现冷加工由于在加工的过程中不产生冲击波,汽化物质也不把热量传给相邻的物质,因此避免了加工过程中热损伤的产生,得到了较高加工质量和传统长脉冲激光加工相比,它有着加工材料广泛性精确性高能耗低等无法比拟的独特优势,在材料的微细加工等高技术领域有着广泛的应用前景:;;FemtosecondlaseranditsapplicationsinmicromachingingZhangXingquan,ZhouJianzhong,WangGuanglong(JiangsuUniversity,Zhenjiang212013,China)Abstracts:Femtosecondlaserpulseswithultrashorttimedurationandultrahighpeakpowercanfocustheirtotalenergyintoalimitedvolumeveryquicklyandveryaccurately,sothatthemeltedandboilingmaterialscannottransfertotheothermaterialbeingcuttheheatandshock,whichcauseconsiderabledamagetotheareasurroundingthecutthatcanrangefromchangesinthegrainstructuretocracking.Therefore,itrealizesthenonthermalandnondamagemicromachiningofanymaterialsandpreciselyremovesthematerialandleavesthesurroundingareasintheiroriginalstate.Italsohasotheradvantagesthatconventionallongpulseslasermachiningcannotcomparewith.Ithaswidespreadapplicationsinmicromachining.Keywords:femtosecodlaser;mircomachining;application1960,,,1962Q,Q,,1965,,2080,,(fs),5fs,:2004-10-14::,,1970,(~800nm),,,,(109W)(1012W),1015~1018W/cm2,1加工机理,,,420051综述专稿,,,,;(10-15s),,[1];,,,,2加工特点,[2,3]2.1,,,,,,,,,2.2,,,,,,,,,,2.33D,n,,,,,,,1m,,,,0.1m,1/10(1),,12.4,,10fs,0.3mJ2m1018W/cm2,10ns,300J,3飞秒激光在微加工中的应用3D,(),,2a,2b,,,,,,,,5综述专稿20051,,[4]2(),,,,,,[5]3,,3,,1999M.Albota[6],2002SatoshiKawata,,,,10m7m[7,8](4)/,(MEMS),4,TNTPETN[9],,,4结束语,,,:[1]ChinAH,SchoenleinRW,GloverTE,etal.UltrafaststructuraldynamicsininsbprobedbytimeresolvedXraydiffraction.Phys.rev.Lett,1999,83:336~339[2]GoldmenJR,PrybylaJA.Ultrafastdynamicsoflaserexcitedelectrondistributioninsilicon.Phys.Rev.Lett,1994,72:1364~1366[3]VonderLindeD,TintenKS,BialkowskiJ.Lasersolidinteractioninthefemtosecondtimeregime.Appl.Surf.Sci,1997,109/110:1~10[4]Brucecraig.Ultrafastpulsespromisebetterprocessingoffinestructures.LaserFocusWorld,1998(9):79~88[5]LiYan,ItohKazuyoshi,Wataru,etal.Threedimensionalholedrillingofsilicaglassfromtherearsurfacewithfemtosecondlaserpulses.Opt,Lett,2001,26(23):1912~1914[6]MariusA,DavidB,etal.Designoforganicmoleculeswithlargetwophotonabsorptioncrosssections.Science,1998,281:1653~1656[7]SatoshiKawata,SunHongBo,TomokazuTanaka,etal.Finerfeaturesforfunctionalmicrodevices.Nature,2001,412:697~698[8]TomokazuTanaka,SunHongBo,SatoshiKawata.Rapidsubdiffractionlimitlaser.micro/manoprocessinginathresholdmaterialsystem.Appl.Phys.Lett,2002,80:32~314[9]PerryMD,StuartBC,BanksPS,etal.Ultrafastpuslelasermachiningofdielectricmayerials.J.A,1999,85:6803~6810620051设计研究