SEMI-S22-1103-2003

SEMIS22-1103©SEMI20031SEMIS22-1103SAFETYGUIDELINEFORTHEELECTRICALDESIGNOFSEMICONDUCTORMANUFACTURINGEQUIPMENTThissafetyguidelinewastechnicallyapprovedbytheGlobalEnvironmentalHealthandSafetyCommitteeandisthedirectresponsibilityoftheNorthAmericanEnvironmentalHealthandSafetyCommittee.CurrenteditionapprovedbytheNorthAmericanRegionalStandardsCommitteeonSeptember3,2003.Initiallyavailableat:Paragraphsentitled“NOTE”arenotanofficialpartofthisdocumentandarenotintendedtomodifyorsupercedeit.NOTICE:Conformancetothe“should”provisionsofthisguidelineisnecessarytodeclareconformancetothisdocument.Conformanceto“may”,“suggested”,“preferred”,“recommended”,“NOTE”,or“RelatedInformation”provisionsisnotnecessarytodeclareconformance.1Purpose1.1Thisguidelineprovidesasetofdesignbasedelectricalsafetyconsiderationsforproductionequipmentusedinthesemiconductorindustry.1.2Basicproductsafetyconcernscanbeaddressedbysatisfyingthedesign,construction,andtestingprinciplessetforthinthisdocumentorbysatisfyingtherequirementsofapplicableelectricalsafetystandards.2Scope2.1Thissafetyguidelineappliestosemiconductormanufacturingequipment.2.2Thisdocumentcontainsthefollowing:1.Purpose2.Scope3.Limitations4.ReferenceStandards5.Terminology6.AlternateMethodsofConformity7.DesignPhilosophy8.GeneralConsiderations9.FacilitiesElectricalConnection10.ProtectionAgainstElectricShock11.ProtectionAgainstRiskofElectricalFire12.BondingtotheProtectiveConductor13.SafetyCircuits14.InterfaceControl15.ElectricalEnclosures16.ConductorsandCables17.WiringPractices18.ElectricMotors¼HorsepowerandLarger19.AccessoriesandLighting20.Markings21.TechnicalDocumentation22.Testing2.3Includedinthissafetyguidelinearedesignconsiderationsforelectricalsafetyinterlocksthatprotectagainstelectricalaswellasnon-electricalsafetyhazards;andnon-electricalinterlocksthatprotectagainstelectricalsafetyhazards.2.4Thisdocumentappliestotheelectricaldesignforallequipmentusedtomanufacture,measure,assemble,andtestsemiconductorproductsunlesstheequipmentisspecificallyexcluded.SeeSection3,Limitations.NOTE1:Thissafetyguidelineismostusefulforsemiconductormanufacturingequipmentwherenorelevantproductsafetystandardexists.2.5Thissafetyguidelineappliestoequipmentintendedtobepoweredbyhazardousvoltagesorhazardouselectricalpower.NOTE2:TheofficialvaluesinthisguidelineareexpressedintheInternationalSystemofUnits(SI).Valuesthat:a)areexpressedinInch-Pound(alsoknownas“USCustomary”or“English”)units,b)areenclosedinparentheses,andc)directlyfollowvaluesexpressedinSIunitsarenotofficial,areprovidedforreferenceonly,andmightnotbeexactconversionsoftheSIvalues.NOTICE:Thissafetyguidelinedoesnotpurporttoaddressallofthesafetyissuesassociatedwithitsuse.Itistheresponsibilityoftheusersofthissafetyguidelinetoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatoryorotherlimitationspriortouse.SEMIS22-1103©SEMI200323Limitations3.1Thissafetyguidelinedoesnotapplytoequipment,subassemblies,andcomponentsthathavebeencertifiedbyanaccreditedtestinglaboratoryandusedwithintheircertificationparameters,orthatconformtoarelevantinternationalornationalproductsafetystandardasdefinedbythescopeofthatstandard.NOTE3:Criteriaforjurisdictionalacceptancemayvaryandshouldbetakenintoaccountalthoughitisbeyondthescopeofthisdocument.3.2Thissafetyguidelineisnotintendedtoaddressanyrequirementspertinenttoexplosiveatmospheres,hazardouslocations,and/orhazardousprocessmaterials.3.3Thissafetyguidelinedoesnotapplytosupportequipmentthatisanintegralpartofthefacility,suchasfacilityairconditioning,facilityfiredetectionorfireextinguishingsystems,orfacilitypowerdistributionsystems,whichincludemotor-generatorsetsandtransformers.3.4Thissafetyguidelinedoesnotincludedesignspecificationsforperformanceorfunctionalcharacteristicsoftheequipment.4ReferencedStandards4.1SEMIStandardsSEMIE33—SpecificationforSemiconductorManufacturingFacilityElectromagneticCompatibilitySEMIS1—SafetyGuidelineforEquipmentSafetyLabelsSEMIS2—Environmental,HealthandSafetyGuidelineforSemiconductorManufacturingEquipmentSEMIS3SafetyGuidelinesforHeatedChemicalBathsSEMIS8—SafetyGuidelineforErgonomicsEngineeringofSemiconductorManufacturingEquipmentSEMIS10—SafetyGuidelineforRiskAssessmentandRiskEvaluationProcessSEMIS13—SafetyGuidelineforOperationandMaintenanceManualsUsedwithSemiconductorManufacturingEquipmentSEMI14—SafetyGuidelinesforFireRiskAssessmentandMitigationforSemiconductorManufacturingEquipment4.2IEC1StandardsIEC60112MethodfordeterminingthecomparativeandtheprooftrackingindicesofsolidinsulatingmaterialsundermoistconditionsIEC60204-1—SafetyofMachinery-ElectricalEquipmentofMachines,Part1:GeneralRequirementsIEC60417—GraphicalSymbolsforUseonEquipmentIEC60707—Flammabilityofsolidnon-metallicmaterialswhenexposedtoflamesources-ListoftestmethodsIEC60950SafetyofInformationTechnologyEquipmentIEC61010-1—SafetyRequirementsforElectricalEquipmentforMeasurement,Control,andLaboratoryUse—Part1:GeneralRequirementsIEC61346-1Industrialsystems,installationsandequ