半导体设备标准

SEMIS8-0307E©SEMI1995,20071SEMIS8-0308SAFETYGUIDELINESFORERGONOMICSENGINEERINGOFSEMICONDUCTORMANUFACTURINGEQUIPMENTThissafetyguidelinewastechnicallyapprovedbytheglobalEnvironmental,Health,andSafetyCommittee.ThiseditionwasapprovedforpublicationbytheglobalAuditsandReviewsSubcommitteeonDecember20,2007.Itwasavailableat:TheofficialvaluesinthisguidelineareexpressedinTheInternationalSystemofUnits(SI).Valuesthat:•areexpressedininch-pound(alsoknownas“USCustomary”or“English”)units,•areenclosedinparentheses,and•directlyfollowvaluesexpressedinSIunitsarenotofficial,areprovidedforreferenceonly,andmightnotbeexactconversionsoftheSIvalues.NOTICE:Paragraphsentitled“NOTE”arenotanofficialpartofthissafetyguidelineandarenotintendedtomodifyorsupersedetheofficialsafetyguideline.Thesehavebeensuppliedbythecommitteetoenhancetheusageofthesafetyguideline.1Purpose1.1Theseguidelinesprovideergonomicsdesignprinciplesandconsiderationsforsemiconductormanufacturingequipment.1.2Thepurposeoftheseguidelinesistopromotecompatibilitybetweentheuserandtheequipmentinthemanufacturingenvironment.Thefollowinggeneralprinciplesareintegraltotheergonomicsdesignandevaluationofequipment:1.2.1Theequipmentshouldbedesignedtooptimizesafetybydistributingtasks.Tasksshouldbedistributedamonghardware,software,anduserstomakethebestuseoftheirrespectivecapabilitiesandtominimizelimitationsandhazards.Appropriatedistributionoftaskswillalsooptimizeperformance.1.2.2Equipmentshouldbedesignedtominimizepotentialforerrorsandmishaps,byconformingtousers’expectations.1.2.3Theequipmentdesignshouldreducefatigueandinjurybyfittingtheequipmenttotheexpectedbodysize,strength,andrangeofmotioncharacteristicsoftheuserpopulation.Suchdesignwillalsofacilitatetaskperformance.2Scope2.1Theguidelinesaddresssafetyaspectsofergonomicsengineeringinthedesignofsemiconductormanufacturingequipment.Itshouldbenotedthatinordertoensurecomprehensivecoverageofpotentialsafetyhazards,someguidelinesalsoaddressgeneraldesigngoalsforeffectivehuman-machineperformance.Theguidelinesapplytothedesign,operation,maintenance,andserviceofsemiconductormanufacturingequipment,aswellas,toalimitedextent,equipmentinstallation(see¶7.3).NOTICE:Thissafetyguidelinedoesnotpurporttoaddressallofthesafetyissuesassociatedwithitsuse.Itistheresponsibilityoftheusersofthissafetyguidelinetoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatoryorotherlimitationspriortouse.3Limitations3.1International,national,andlocalstandards,codes,andregulationsmustbeconsultedtoensurethatequipmentmeetsregulatoryrequirements.3.2Humanfactorsdatacompiledinreferencesandspecificationsareinfluencedbythepopulationfromwhichtheyweredrawnandthereasontheywerecollected.Humanfactorsdesigncriteriaaresometimesbasedonstudiesusingfewsubjectsorarecontext-specific.Ergonomicsexpertsshouldbeconsultedwheredatadevelopmentorinterpretationisrequired.SEMIS8-0307E©SEMI1995,200723.3Theequipmentdesignshouldincorporatereasonableaccommodationsforuserswithspecialneeds,suchasleft-handednessandcolorblindness.Wherefeasiblethedesignshouldalsoaccommodateuserswithhearingorvisionimpairmentsand/orphysicaldisabilities.Itshouldbeunderstoodthatalthoughdesigningforthetargetuserpopulationwillaccommodatesomeuserswithspecialneeds,theseguidelinescannotanticipateandfullyaccommodateallsuchusers.3.4ExistingmodelsandsubsystemsthatmeetpreviousversionsofSEMIS8shouldcontinuetomeettheguidelinesofSEMIS8inforceatthetimeofdesign.ModelswithredesignsthatsignificantlyaffecttheergonomicdesignoftheequipmentshouldincludeconformancetothelatestversionofSEMIS8fortheredesign.NOTE1:Conformancewiththisdocumentisbelievedtobeasuitablesubstituteforconformancewithitspredecessors.3.5ConformancewiththeguidelinesinAppendix1(SESC)constitutesconformancewithSEMIS8.4ReferencedStandardsandDocuments4.1SEMIStandardsandSafetyGuidelinesSEMIE95—SpecificationforHumanInterfaceforSemiconductorManufacturingEquipmentSEMIS1—SafetyGuidelineforEquipmentSafetyLabelsSEMIS2—Environmental,Health,andSafetyGuidelinesforSemiconductorManufacturingEquipmentSEMIS10—SafetyGuidelineforRiskAssessmentandRiskEvaluationProcess4.2CEN/CENELECStandards14.2.1EuropeanNorm(EN)standardsarelistedhereinforapplicationtosemiconductormanufacturingequipmenttobeusedintheEuropeanUnion(EU).AsENstandardsareintendedforusewithabroadrangeofindustrialandconsumerproducts,conflictswithSEMIsafetyguidelinesarelikely.Additionally,provisionalEN(prEN)standardsaresubjecttorevisionpriortoadoption.EN894-2—Safety/ErgonomicsforDisplaysEN894-3—Safety/ErgonomicsforControlActuatorsEN60204-1—SafetyofMachinery–ElectricalEquipmentofMachines,Part1–SpecificationforGeneralRequirements4.3MilitaryStandard2MIL-STD-1472—HumanEngineeringDesignCriteriaforMilitarySystems,Equipment,andFacilities4.4NFPAStandard3NFPA79—ElectricalStandardforIndustrialMachinery4.5ISOStandard4ISO9241—ErgonomicRequirementsforOfficeWorkwithVisualDisplayTerminals4.6OtherStandardsandDocumentsHumanscale,TheMITPr