微纳米加工技术及其应用综述

http:*崔铮(),.,.,.,.,,,Overviewofmicro/nanofabricationtechnologiesandapplicationsCUIZheng(RutherfordAppletonLaboratory,CentralMicrostructureFacilityChilton,Didcot,OxonOx110QX,UK)AbstractIthasbeenrevealedthatmaterialsandstructuresonthemicroandnanometerscaledemonstratemanycharacteristicsdifferentfromtheirmacrodmiensions.Nanotechnologyhasbecomeahottopicincurrentresearchandindustrialapplications.Miniaturisationreliesonfunctionalstructuresanddevicesofmicroandnanometerdmiensions.Anoverviewispresentedofmicro/nanofabricationtechnologieswhicharethebasisfortherealisationofmicroandnanoscalestructures.Abriefdescriptionofthedifferencebetweensuchfabricationandconventionalmachiningisgiven,andafewprinciplesonhowtochooseanappropriatemicro/nanofabricationtechnologyforaspecificapplicationaresuggested.Currentchallengesarepresented,togetherwithapredictionoffuturedevelopments.Keywordsmicro/nanotechnology,micro/nanofabrication,microsystemtechnology,miniaturisation*2005-10-17Emai:[e-mail]1引言194712,50,.,,3C,(consumer),(computer)(communication).,,.,,1mm,,,.,..,.21,,.3435(2006)1http:微纳米加工技术的分类,..,.,..,...2004,60...[1]..2.1.1.(lithography).,,..,,.,,..,.1:,,.:(1),.,,,,;(2)35http:(3),.,..2060..4[2]:(1)(layering).,,.,,,,,.(2)(patterning)...,...(3)(doping).,.(4)(annealing).,,.,.,2SANDIA.,.1mm.....,.,.2SANDIA(SUMMiT)2.2,.,,,,.,.,.,10nm,.,.,..,.,10m.100m.,.,..3635(2006)1http:(top-down),..,(bottom-up).,,.,[3].,.,..3微纳米加工技术的应用,,....,:(1).,1m...50nm..(2).10..,.,.,.,.(3).,X,..,.,(300mm),.(4).,,.,.,,.(5),..,III-V.,,,.37http::,,,,...[1]....,,,..10,(system-on-chip,SoC)(systeminpackage,SiP)..,...,,..,(SiP).,,,,.3...4微纳米加工技术发展趋势.3(systemonchip),.,...,.50nm.10nm..45nm.,.!.50nm,,.X.X..X.,,,,.,,.,..[4]..3835(2006)1http:(foundry).,.....,.....10nm..,..,..,.5结束语,..,.50.(Feynman)1959,Thereisplentyofroomatthebottom!.[1]..:,2005[CuiZ.Micro-NanofabricationTechnologiesandApplications.Beijing:HigherEducationPress,2005(inChinese)][2]VanZantP.MicrochipFabrication:ApracticalGuidetoSemiconductorProcessing(5thEdition).McGraw-Hil,l2004[3]Ed.HochHC,JelinskiLW,CraigheadHG.NanofabricationandBiosystems:IntegratingMaterialsScience,EngineeringandBiology.CambridgeUniversityPress,1996[4]CuiZ.Standardisationformicrosystemtechnology:thewayforward.Proc.8thInternationalConferenceonCommercialisationofMicroandNanoSystems(COMS),2003.385,,!,.,9.8m/s216m/s2.,,,,().,,..!,,,.Phys.Rev.Lett.,2005,95:154501.(树华编译自Physicswebnews7October2005).(105Pa),,9.6∀1010Pa(DesgreniersS,VohraYK,RuoffA.J.Phys.Chem.,1990,94:1117ShimizuK,SubaraK.Nature,1998,393:767).,,.LaboratoireLeonBrillouin(LLB)Goncharenko(GoncharenkoI.Phys.Rev.Lett.,2005,94:205701).0.5mm3,.,Gnocharenko8∀109Pa,.Gnocharenko:(),,..!,,RutgersCornell2002,!.(树华编译自PhysicswebNews,3June2005)39