激光位移传感器在物体表面形状测量中的应用

Oct.2010：1007-1180(2010)10-0070-03（,130033）：，，。，。，，。0.3μm，2μm。：；：TP212.1：ADOI：10.3788/OMEI20102710.0070LaserDisplacementSensorUsinginShapeMeasurementZHUWan－bin(StateKeylaboratoryofAppliedOptics,ChangchunInstituteofOptics,FineMechanicsandPhysics,ChineseAcademyofSciences,Changchun130033,China)Abstract:Laserdisplacementsensordisplacementmeasurementisanon-contactmeasurementwithmoreprecisionandawiderangeofapplications.Inthispaper,alaserdisplacementsensormeasurestheworkpiecepointsontwo-dimensionalandachievestheobjectshapehigh-precisionmeasurement.Laserdisplacementsensorisdriventoscansurfacesthroughtheone-dimensionalelectricdisplacementplatform,andthenthemeasurementdataisprocessed,further,theobjectthesurfacemorphologyisrecoveredaccordingtodataprocess.Thedisplacementsensorresolutionis0.3μm,one-dimensionalelectricdisplacementplatformrepeatedpositioningaccuracyishighthan2μm.Keywords:super-resolution;imageprocessing;maximumaposteriori*：（27-2009),（20080339)OMEInformation2710Vol.27No.1070Oct.2010，、、[1]。。，。，。，[2]。，，，。，。22.1，：，，，，CCDPSD（），。，，。1。2.22：，，，。3。X，Y，X，，。Y，，Y。X，，，65536，，X。1θ1θ2axbθ3x′3XYOMEInformation2710Vol.27No.10271Oct.2010、、。KysanElectronics（）35BYG002，0.02mm，0.3mm；KeyenceLK-G80，80mm，±15mm，50kHz，0.3μm。，1.636641μm。3.14。，，。Excel，。，1，。2，。3.2。，Y。，，，。，，，[3]。，。，，90°，，。，。4，。，，，。4xyxy[1]，，.[J].·，2006，17(5)：604-607.[2]，.[M].：,1998.[3]，，，.[J].，2001，22(1)：21-23.：（1963－），，，，，，1987（)，。E-mail:[e-mail]2710Vol.27No.1072