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:,,1975,20007:1999-08-16,:2000-04-302.45GHz(730000)2.45GHz(ECR)600W,22kV,6mm,I(H1++H2++H3+)90mAECR,,,TL503.3(ECR),,,2.45GHzECR,,,,11,,7cm,7cm-,6mm3mm6mm,,,,,,fce=28B0(1),fce(GHz);B0(T)fce2.45GHz,(1),B8.7510-2T,,B08.7510-2TCMA[1],,,(X),(R)241Vol.24,No.120011NUCLEARTECHNIQUESJanuary2001©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.2.45GHzECR,,11.,2.,3.,4.,5.,6.,7.,8.Fig.1Thestructureofionsource1.Microwavewindow,2.Permanentmagnets,3.Solenoids,4.Plasmachamber,5.Plasmaelectrode,6.Accel-decelelectrodes,7.Ceramics,8.Faradaycup,10181020/m3,BECR,,RF2(RF2-UH2)+ce2pe2cos2=0(2),RF;UH;ce;pe;KB,(X),=/2;(R),=0(2),R,,,1©B/BECR©1.5,Sakudo[2],1©B/BECR1.3,,(Te10eV),22.121.,2.,3.,4.Fig.2Themicrowavesystem1.Transitionwaveguide,2.Three-stubtuner,3.Magnetron,4.Tuner,,(2),,,,,,,,,,,,,8.78.140180,4424©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.18001300(2)3,,10%3a,43Fig.3Theconfigurationofaxialmagnet4-Fig.4Power-totalionbeam2.2,,,05A,0310-3T,(3),,a,8.7510-2T,,b,9.310-2T,3(1):H2,600W,3.110-3Pa,24cm3/min,22kV,-5kV,6mm,I(H1++H2++H3+)90mA,318mAcm-211Table1TheparametersoftheionsourceandothersimilansourcesLANLUSA[3]ChalkRiverLabCanada[4]CEAFrance[5]IMPChinaExtractionvoltage/kV75509522Ionbeamintensity/mA1309510890Ionbeamdensity/mAcm-2224475215318(2),,,(3),,30kV,,541:2.45GHz©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.42.45GHz,,,,,,,,,,ECR,,!1GellerR.ElectroncyclotronresonanceionsourceandECRplasmas,London:InstituteofPhysicsPublishing,1996.1562SaukdoN.Thephysicsandtechnologyofionsource,NewYork:WileInterscience,1989.2293JosephSherman,AndrewArvin,LashHansborough,etal.RevSciInstr,1998,69:100310084TerenceTaylor,JozefF.Mouris.NuclInstrMeth,1993,A336:155GobinR,FranceA,BeauvaisPY,etal.RevSciInstr,1998,69:10091011A2.45GHzsinglechargestateECRionsourcewithpermanentmagnetDINGJunzhangZHAOYubinLIUZhanwengZHAOHaoweiYUANPingCAOYunLEIHailiangZHANGZiminZHANGXuezhenZHANGWenGUOXiaohongWANGHuiFENGYuchengLIJinyuMABaohuaGAOJiyuanSONGPeiLIXixia(InstituteofModernPhysics,theChineseAcademyofSciences,Lanzhou730000)AbstractA2.45GHzsinglechargestateECRionsourcewithpermanentmagnethasbeendevelopedatIMP.Thephysicalprincipleandstructurearepresented,andthemicrowavesystemandmagneticconfigurationareintroducedinthispaper.Amixedion(H1++H2++H3+)beamcurrentof90mAcanbedeliveredfromasingleapertureof6mmwithmicrowavepowerof600Watextrac2tionvoltageof22kV.KeywordsECRionsource,Microwave,Plasmafrequency,PermanentmagnetCLCTL503.36424©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.