薄膜的表征分析方法【汇总】

StructuralAnalysisofThinFilmsStructuralAnalysisofThinFilmsQingQing--YuZhangYuZhangStateKeyLaboratoryofMaterialsModificationbyLaser,IonandStateKeyLaboratoryofMaterialsModificationbyLaser,IonandElectronBeamsElectronBeamsDalianDalianUniversityofTechnology,UniversityofTechnology,DalianDalian116024,China116024,ChinaWebsite://202.118.70.130;Emailto:[e-mail]™™⎯⎯•••⎯™™⎯•–••––•–™™⎯•––•–––•–––™™⎯••••⎯••⎯SRM197656.0058.0060.0062.00020406080IrelScintiLynxEyeXX™™XX((XRD)XRD)⎯nλ=2dsinθXX™™XX((XRD)XRD)⎯XX-raysourceIncidentbeamopticssampleDiffractedbeamopticsX-raydetectorSamplehandlingXX™™XX((XRD)XRD)⎯X•X•–Ni–Gobel+–•––XX™™XX((XRD)XRD)⎯X••Eulerian–X,Y,Z–θ,ϕ,χ••–XX™™XX((XRD)XRD)⎯X•–––••–XX™™–••–•θ∼2θ•2θ–••XX™™–•θ∼2θ•2θBragg––•–FinalProfile-0+FinalProfile-0+20253035404550556065707580101102103104105106CPS2Thetaθθλcos∆=KddddEr0−−=νσXX™™((GID)GID)⎯outofplane•()–0.5∼5o•()–2θ•–Z–θ=0o–χ=0oXX™™((GID)GID)⎯outofplane00-045-0387(*)-ZincAluminumIndiumOxide-InAlO3(ZnO)17-WL:1.5406800-File:4125_sample2_GID_(0,8deg).raw-Step:0.040?-Steptime:13.2s-Theta:0.800?-Creation:17.08.200510:25:02Lin(Counts)010002000300040002-Theta-Scale10203040506070stilamourphoushumpsarevisibled=1,69517substratepeak2030405060100020003000400050006000CPS2ThetaXX™™((GID)GID)⎯in-plane•(90o)–0∼6o••()–•ξ,ζ–•–XX™™((GID)GID)⎯in-plane•–2θ–χ–ϕ•–––RadialOperations:ImportFile:radfilm.raw-Type:2Th/Thunlocked-Start:46.0000?-End:49.0000?-Step:0.0100?-Steptime:15.1s-Temp.:25(Room)-TimeStarted:1014713408s-2-Theta:46.0000?-ThInt.[cps]0102030405060702θ[°]46.4474849layersubstratealpha1alpha2LaZrO_25nmfilmonSi(111)Operations:ImportFile:long2phifilm.raw-Type:Phi-scan-Start:0.00?-End:100.00?-Step:0.10?-Steptime:3.s-Temp.:25(Room)-TimeStarted:1014706944s-2-Theta:47.8485?-Theta:23.9242?-Chi:88.70?-Phi:0.Operations:ImportFile:longphifilm.raw-Type:Phi-scan-Start:90.00?-End:360.00?-Step:0.10?-Steptime:10.s-Temp.:25(Room)-TimeStarted:1014660992s-2-Theta:47.8485?-Theta:23.9242?-Chi:88.70?-Phi:Operations:Importgencloop-File:long_phi_good.raw-Type:Phi-scan-Start:-5.00?-End:360.00?-Step:0.10?-Steptime:0.5s-Temp.:25(Room)-TimeStarted:1045734528s-2-Theta:46.1228?-Theta:23.1144?-Chi:Lin(Cps)01000200030004000Phi-Scale0100200300XX™™XX115Sisub.60nmSiGe™™XX™™XX((XRR)XRR)⎯⎯XRRXRRXX™™XRRXRR⎯⎯XRRXRR•––––XX™™XRRXRR⎯⎯Sample:10µmdistance,0.1mmreceivingslitthicknessroughnessdensity[nm][nm][g/cm3]====================================zincoxide51.451.155.66FloatGlass0.852.30Sample:10µmdistance,0.1mmreceivingslitthicknessroughnessdensity[nm][nm][g/cm3]====================================zincoxide51.451.155.66FloatGlass0.852.30black=measurementred=simulationXX™™XRRXRR⎯⎯Sample:TA-TA320µmdistance,0.1receivingslitthicknessroughnessdensity[nm][nm][g/cm3]===================================tantalumoxide2.750.457.5Tantalum22.250.3014.5Float0.372.60Sample:TA-TA320µmdistance,0.1receivingslitthicknessroughnessdensity[nm][nm][g/cm3]===================================tantalumoxide2.750.457.5Tantalum22.250.3014.5Float0.372.60black=measurementred=simulationXX™™XRRXRR⎯⎯TaN/TiNXX™™XRDXRD⎯:Int[cts]1010010001e41e51e61e7ω[°]33.433.633.834.034.234.434.634.835.0nomonochromator3xGe220analyzerPrimaryopticSecondaryPathFinderoptic4xGe220symmetricslitGe220symmetric3xGe220analyzerXX™™XRDXRD⎯:triplebounceGechannelcutanalyzercrystalbeampathshuttermotorizedreceivingslitsampleXX™™XRDXRD⎯:Int[cts]11010010001e41e51e6ω[°]27.42829PathFinderHighIntensityBeamPathHighResolutionBeamPath™™((TEM)TEM)⎯(BF)⎯(DF):⎯(HRTEM)™™TEMTEM⎯™™TEMTEM⎯™™TEMTEM⎯™™TEMTEM⎯⎯⎯EDX⎯EELS™™TEMTEM⎯160nm710nm3500nm™™((LEED)LEED)⎯•(s−s0)·(pa+qb)=nλ•s·(pa+qb)=nλ⇒s·a=hλs·b=kλ⎯IAFMM∝⋅⋅⋅⋅222122222222sin()sin()sin()sin()KaKaKbKb™™LEEDLEED⎯LEED•20~500eV0.3~0.05nm™™⎯(a)Ni(100)-(2×2)-O(b)Ni(100)-C(2×2)-C(c)LEEDNi(100)-C(2×2)-C™™RHEEDRHEED™™MaterialsScienceofThinFilmsMaterialsScienceofThinFilms⎯DepositionandStructure⎯MiltonOhringAcademicPress