红外焦平面阵列技术现状和发展趋势

2005.5[1]N×M(FPA)smart[2][34]121//[5]2005.5SensorWorld[6]3[7]1HgCdTeSi2(a)Z2(b)4TDI51μm3μm3μm5μm8μm14μm1SIROICSI3MOSSI2SFDROIC3(SI)12Z212005.5(SFD)5(DI)6(FEDI)7(CM)8(RL)2005.5SensorWorld×128NETD0.3K1ms200012[8]BaxSr1-xTiO31987TI2884256256256256AGM-130320256StormShadow/ScalpE-G256256InSb-2-A640512InSb(THAAD)640480InSbF-22V-22F18-E/F90MSFPAsMSFPAs2010MSFPAs6404802048204860004000[9]SPOT43000Sofradir1500[10]2000Raytheon/Hughes/RIE12812840μmROIC0.8μmCMOSfoundry2001Rockwell128128//6.01011cmHz1/2W1()1.61012cmHz1/2W-1()2000Leti/LIR/DRSvia-holeLeti/Sofradia9(CTIA)10(RTIA)2005.5()20482048640480345(300K)6[1].[C].P298-473.[2].[J].1999Vol.211P6-9.[3].[J].2004Vol.33(5):P441-444.[4],,.[J]..Vol.33No.1Feb.2003P8-12.[5].[J].No.12000P38-41.[6],.[J].,ol.17No.1Feb.2003P48-50.[7].[J].,No.92003P1-8.[8].[J].,Vol.32002P14-17.[9].[J].,Vol.23No.1Jan.2001P3-8.[10],.[J].,Vol.26No.3May2004P1-5.[11]EricR.Fossum.CMOSimagesensors:electronicCamera-On-A-Chip[J].IEEETransactionsonelectrondevices,Vol.44,No.10,Oct.1997p1689-1698[12]R.H.Nixon,etal.256×256CMOSactivepixelsensorcamera-on-a-chip[J].IEEEjournalofsolid-statecircuits,Vol.31,No.12,Dec.1996p2046-2050[13]NottonPR..Statusofinfrareddetectors[J],SPIE,1998.3379:102-114[14]Tsung-HsinYu,etal.AnewCMOSreadoutcircuitforuncooledbolometricinfraredfocalplanearrays[J].ISCAS2000-IEEEinternationalsymposiumoncircuitsandsystems,May.2000p:493-496[15]StuartKleinfelder,etal.Fourmillionframe/sCMOSimagesensorprototypewithon-focal-plane64-framestorage[J],SPIE,2003.5210:1-8[16]SunetraK.Mendis,etal.CMOSactivepixelimagesensorsforhighlyintegratedimagingsystems[J].IEEEjournalofsolid-statecircuits,vol.32,No.2,Feb.1997P187-197ThePresentDevelopmentAndStatusOfInfraredFocusPlaneArrayTechnologyAbstract:Infraredthermalimagingtechnologyismaindetectionmethodforcountrysecurity,whichhasbeenwidelyappliedinsatellite,missile,fighterplaneandsoon.Atonetime,theuncooledinfraredimagetechnologyisappliedinindustry,medicaltreatmentandothersmoreandmorewiththedevelopmentoftechnologyandthedeepdecreaseofproductioncostespecially.Thetheory.structureandsortofinfraredfocusplanearrayaredescribedinthispaperinwichtheemphasisesareanalyzingallkindsofcharacteristicsofread-outcircuitandcomparingworld-wideresearchandproductionworks.Keywords:uncooled;thermalimage;infraredfocusplanearray6100540288320256413668253634