16:38516:384.24.34.44.54.64.716:384.112312PN316:384.2——-NN+NN+SiO2(a)(b)16:381EF,2NEFsEFMEFM-SNsFSFMeEEφ=−16:38a——(b)——M-SMS+−I+++MS−+I+++++++++VVM-S“”16:38PNM-SIVM-SPNI-VPNIsIs————/——PM-SPN()exp()1sqViVInkT⎡⎤=−⎢⎥⎣⎦16:38I-Vnn1.4n=1.05~1.11107(4.2):jjPnRgRα−↓=↑=↓==16:38(a)(b)CpCjRjRsLs16:38M-SkTBRsRsRj012πcsjfRC=cf2sjndsjnRRPtkTBRR+==+2dnt≈16:38PNLsCsCjRjRs16:38I−VIS10-1610-13AVqkTn11.20.5()exp()1sqViVInkT⎡⎤=−⎢⎥⎣⎦0dd(1)jjCQCVVγφ==−0jCφγ16:38uA/uWmV/uWmViβ22121ijsvfqnkTCRRβω=×+γ16:38:dBmMMSSTiβvfR/ivfvfnMRRRβ=+nRnR1.2knR=ΩvfR16:384.34.3.11mWW)(tvS)(tvL0VLZ16:38()cos()cosLLLSSSvtVtvtVtωω==LSVV()ifv=L++′′++′++=++==tVtVVftVtVVftVVftVtVVfvfissLLssLLLLssLLωωωωωωω220!21000cos)cos(cos)cos()cos()coscos()(16:38,Vsg(t)()j0coseLntLLnnfVVtIωω∞=−∞+=∑00cosd(cos)()dLLLLvVVtifVVtgtvωω=+′+==()(e1)vSifvIα==−0(cos)()eLLVVtSgtIαωα+=j01()e2cosLntnnLnngtgggntωω∞∞=−∞===+∑∑()2j01ed2LntnLggttωωπ−=π∫16:38V0Vt0ItIV0Vt0gtgV00cosLLVVtω+0cosLLVVtω+vvV0(a)(b)16:38:001201()(cos)cos[2cos2cos2]coscoscos()LLSSLLSSSSnSLSnitfVVtVtggtgtVtgVtgVntωωωωωωωω∞=′=+=+++=+±∑L1()cosifSifitgVtω=ifSLωωω=−SLωωifLSωωω=−LSωω16:380ωif2ωL−ωS=ωiωLωS3ωL−ωS2ωLωL+ωS=ω+3ωL2ωL+ωSω)ifSLωωω=−16:38i()cos()()cos()LLLLSSSSvtVtvtVtωϕωϕ=+=+()1()cosifSifSLitgVtωϕϕ⎡⎤=+−⎣⎦SLωω()1()cosifSifLSitgVtωϕϕ⎡⎤=+−⎣⎦LSωωSvLvj()j(),j(),()eeeLsLsLsnmnmtnmnmnmtnmnmitIIϕϕωωωω∞∞++=−∞=−∞∞∞+=−∞=−∞==∑∑∑∑&&16:384.3.316:38:(1)(2)(3)mSifLpp=(dB)10lg()mSifLpp=16:38——T0=290K——0nnSPFP=0nPnSP16:38Pn0Pn0=kTm∆fPnSPnS=kT0∆f/LmTm∆ftmtm=tm≈10nmSSBmmnSnSPkTfFLtPP∆===SSBmFL≈00122nDSBmmmPFLtkTfL==∆000nmPTkTfT=∆16:38-Lm,FmGif,Fif(DBS)(dB)(dB)(dB)3dBmAmifFLF≈+−SSBDSB)()()(dBFdBLdBFifmmA+≈1≈mtmifmmALFFF11−+=)1(−+=ifmmmAFtLF16:38GA,FALm,FmGif,Fif(1)1ifmmAAAFLFFFGG−−++AmFAFASSBGLGFFifm)1-(2)1(2222+−+=16:381dB16:3816:384.416:384.4.14fS32fifVjS41fLG16:384.4.2/2——/29018016:38/290Lf0ZD1D20Z4gλ20ZSfφl02ZiffD2D1lφZ0Z3Z0Z2Z2RZ0Z1=RZ0Z1Z2=02RZZ3=Z0SfLfiff16:38900D1D212()cos()2()costSSSSSSvtVtvtVωωπ⎫=−⎪⎬⎪=⎭12()cos()()cos()2LLLLLLvtVtvtVtωω=−π⎫⎪⎬π=+⎪⎭4.604.6116:38D1D2D1D2101201()2cos(π)π()2cos()2nLnnLngtggntgtggntωω∞=∞=⎫=+−⎪⎪⎬⎪=++⎪⎭∑∑SLωωifSLωωω=−111211()cos()()cos()22()cos()cos()22ifSSLSififSSLSifitgVttgVtitgVtgVtωωωωωω⎫ππ⎡⎤=−−−π=+⎪⎢⎥⎣⎦⎪⎬ππ⎡⎤⎪=−+=−⎢⎥⎪⎣⎦⎭16:38D1D2121()()()2cos()2ifififSifitititgVtωπ=−=+ωL−ωifBBωLωL+ωifω16:38wLwifD1D216:38fSfiD1D24.604.60D1D22SfB±2ifB±()()12()cos()cos2nnLifnnLifvtVtvtVtωωωω⎫⎡⎤=±−π⎣⎦⎪⎬π⎡⎤=±+⎪⎢⎥⎣⎦⎭1121()cos()cosnnifnnifitgVtitgVtωω=⎫⎪⎬=⎪⎭12()()()0nnnititit=−=16:384.604.614.21D1D2mnm=n=1π22j(π)j()1,j()j()2,()ee()eeLSLSnmnmtnmnmnnmtnmnmitIitIωωωωπ∞∞−−⋅+=−∞=−∞∞∞⋅+=−∞=−∞⎫=⎪⎪⎬⎪=⎪⎭∑∑∑∑&&2212jjj()j,()()()e(ee)eLSmnnmtnnmnmitititIωωππ∞∞−−+−π=−∞=−∞=−=−∑∑&22jjee0mnππ−−−=()0it=16:38180Sfi1(t)i2(t)D2D14gλi(t)iffLf4gλ3dB16:38D1D2D1D2012()cos()cosSSSSSSvtVtvtVtωω=⎫⎬=⎭12()cos(π)()cosLLLLLLvtVtvtVtωω=−⎫⎬=⎭4.714.7216:38D1D2101201()2cos(π)()2cosnLnnLngtggntgtggntωω∞=∞=⎫=+−⎪⎪⎬⎪=+⎪⎭∑∑LsωωLsifωωω−=[][]⎪⎭⎪⎬⎫=−=−=−−=tVgttVgtitVgttVgtiifssLsififsLssifωωωωπωωcoscos)(cos)(cos)(11211116:38D1D216:383dBg/4g/4SfD1D2Lfiff16:3821D223/42D2D1221LfD2D116:38344gλ4gλ4gλ4gλ4gλ2134fiffS3412LffifLfSf(a)(b)16:38()16:38l50Rb34Rbfs341ZcD2fpZ0D1Rbl4gλ4gλ4gλ34gλfifjdddZRX=+00022bcRZZZZρ==050bbZRRρ==16:38LfSfrZcZcZcZD1D216:3816:384.4.34416:384eLeSmfnf±±LSmfnf±±024,em=LeLoSmfnf±±135,om=LoLeSmfnf±±oLoSmfnf±±024,en=L135,on=Lm=nm=4116:38441/43dB16:3823116:384.2716:3816:384.4.4RF180°Balun610GHz180°BalunLO12GHz+10dBm180°BalunIF26GHzX16:384.4.54.1..3.7GHz3.5GHz3.9GHz.F8dB70MHz.5015dB1.5dBifF=2Sρ2.5LρD2D1lφZ0Z3Z0Z2Z2RZ0Z1=RZ0Z1Z2=02RZZ3=Z0SfLfiff16:381.13dB2Schottky5.5GHzF6.5dB215050032.86rε=0.76mmh=0.02mmt=16:382.1——34mW5003.7GHzf=01.03j0.7Z=−2ρ=40.155glλ=12Rρ==ΓajΓb(∞,∞)(0,0)(1,0)Rmin=KRmax=S0X0X(∞,∞)(0,0)(1,0)Gmin=KGmax=S0B0B1B=1B=−0.5B=0.5B=−0.5G=1G='bjΓ'aΓ16:3821Z3Z2ZΩ0RZ0Z0RZ0ZΩΩΩ2ZW1W2W3Tl1l2l3l2l4W3l3W2W1l10.30.31.961.9613.961.960.390°W21.9616:38T11220.1512.780.35.2314.35mm4glWWλ=+××=+×=22130.150.1513.86mm4glλ=+×+×=33220.1514.83mm4glWWλ=+××=4l4410.20.30.15553.040.25.230.30.769.04mmllWH=+−×=×+×−×=16:384.116:384.1ADS16:384.116:384.116:384.116:38l2l4W3l3W2W1l10.30.31.961.9613.961.960.390°W21.9631W50R=9.9mmZr050WRα90α=°03.7GHzf=16:382120W=0.30mm3Zo=120Ώg/413.96mml2l4W3l3W2W1l10.30.31.961.9613.961.960.390°W21.9616:38l2l4W3l3W2W1l10.30.31.961.9613.961.960.390°W21.9616:384.516:38LLL16:384.5.14gλ4gλl+l/4+/4=16:384.5.2sLωωiLs2ωωω=−fS2Z0D3BD4π/2Z0R034Z02Z04gλ24lλ+1l2D2fiffLMAD111D1()cos()()cos(3/2)SSSLLLvtVtvtVtωπωπ=−⎫⎬=−⎭22()cos(()cos()D2/)2SSSLLLvtVtvtVtωπω=⎫⎬=−⎭33D3()cos()()cos(2)SSSLLLvtVtvtVtωπωπ=−⎫⎬=−⎭44()cos()D4/()c(22os)/SSSLLLvtVtvtVtωωππ=−=−⎫⎬⎭1233131exp()()(0)exp()2222224222ifABiiiiiiiiiiπππππππππ=+−=∠−∠−+∠−−∠−=∠+∠−−=∠sLωω16:38MM2A2LSifff−=SfSfLfSLffSLiffff=+SLiffff=−Lifff−Lifff+16:38416:384.6-5000GHz5000GHzDMK279016:384.6.116:384.35LORFIF16:384.35LORFIF16:384.35LORFIF16:384.35LORFIF16:38L0D1D2L016:3816:384.37LOLORFIF16:384.37RFLORFIF16:38LORFIF16:384.39LOLORFIF16:384.39RFLORFIF16:3