Disco-研磨抛光机

300mmDGPFullyAutomaticGrinder/Polisher8761DGP8761DGP876025mDGP87603CMPEPadPoligrindUltraPoligrind2-13-11143-8580Phone:[phone]Fax:[phone](-90kPa)kPa-90151L/minkW1.5L/min302.0251.5201.0300mmm2.5Z1Z22.5m2.5Z1Z22.5mRa0.005Z1Z2:#2000Ry0.13VAC200V10%kW12kW6kVA31MPa0.60.8MPa0.30.5L/minANR1,400700300L/minANR50MPa0.30.4MPa0.20.3MPa0.050.45MPa0.20.3L/min25L/min14L/min302.0251.5201.0L/min4m3/min42WDHmm1,6903,3151,800kg6,300DGP8761T1T2DFM2700DFM2800• -150.1ppm0.01m/99.5%• 20251• +2111• • GetteringDPSiUltraPoligrindUltraPoligrindExtrinsicGetteringDFM2700DFM2800DAFDieAttachFilmDBGDicingBeforeGrinding8000DGP87618000GUIGraphicalUserInterfaceDGPFullyAutomaticGrinder/Polisher8761