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11瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingFFS(FringeFieldSwitch)ProcessBrief2004/5/6FABIVArrayFABIVArray建廠小組建廠小組22瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingOutline•AdvantageofFFS•6PEPsFFSProcessFlow•5PEPsFFSProcessFlow33瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitching44瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitching55瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitching66瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitching77瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingAdvantageofFFS•HighTransmittance•WideViewAngle•NoOCNeeded•NoAdditionalCsAreaNeeded•SmallFeedThroughVoltage•CrosstalkLess•LessProcessDependence88瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitching6PEPsFFSProcessFlow99瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingWhereχisanglebetweenLCandpolarizeraxisdiscellgapliselectrodespacingK2iselasticconstant∆εisdielectricanisotropy∆nd=0.32µmT=T0sin2(2χ)sin2[πd∆n(θ,φ)/λ]Vth=πldK2ε0∆εIPSFFSl/d1or0Design¾Vth,Tvs.larenotlinearlydependent¾Largeprocesswindowl/d1l/d=01010瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingPEP1(6PEPs)•GlassInput•ITO1PreClean•ITO1Sputter(400A)•PEP1Photo•TotalPitchMeas.•ITO1WetEtching•PEP1StripperCommonPADTFT1111瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingPEP2(6PEPs)•M1PreClean•M1Sputter(AlNd/Mo=2500/500A)•PEP2Photo(15000A)•PEP2TotalPitchMeas.•M1WetEtching•PEP2StripperCommonPADTFT1212瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingPEP3(6PEPs)CommonPADTFT•3LayerPreClean•3LayerCVD(G1/a-Si/n+=3000/1400/300A)•PEP3Photo(15000A)•IslandDryEtching(RIE)•PEP3Stripper1313瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingPEP4(6PEPs)CommonPADTFT•M2PreClean•M2Sputtering(Mo/Al/Mo=150/2500/750A)•PEP4Photo(15000A)•M2WetEtching•N+Cut(RIE)•PEP4Stripping1414瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingPEP5(6PEPs)CommonPADTFT•P-SiNPreClean•P-SiNCVD(3000A)•PEP5Photo(20000A)•ContactDryEtching(RIE)•PEP5Stripping1515瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingPEP6(6PEPs)CommonPADTFT•ITO2(Pixel)PreClean•ITO2(Pixel)PreBake•ITO2(Pixel)Sputter(1400A)•PEP6Photo(15000A)•ITOWetEtching•PEP6Stripping•PEP6TotalPitchMeas.•Anneal•TEG•ArrayTester1616瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitching5PEPsFFSProcessFlowHalfTone/M1/ITO11717瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingPEP1-DryEtching(5PEPs)•ITO1WetEtching•MoWSF6/O22ndDryEtching(Common)•PEP1Stripper•GlassInput•ITO1PreClean•ITO1Sputter•MoWSputter•PEP1Photo(HalfTone)•TotalPitchMeas.•MoWSF6/O21stDryEtching1818瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingPEP1-WetEtching(5PEPs)•ITO1WetEtching•PRAshing•M1WetEtching(Common)•PEP1Stripper•GlassInput•ITO1PreClean•ITO1Sputter•M1Sputter•PEP1Photo(HalfTone)•TotalPitchMeas.•M1WetEtching1919瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingPEP1-DetailBreakdown(5PEPs)HalfToneorSlitExposure2020瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingPEP2(5PEPs)•3LayerPreClean•3LayerCVD(G1/a-Si/n+=3000/1400/300A)•PEP2Photo(15000A)•IslandDryEtching(RIE)•PEP2StripperCommonPADTFT2121瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingPEP3(5PEPs)•M2PreClean•M2Sputtering(Mo/Al/Mo=150/2500/750A)•PEP3Photo(15000A)•M2WetEtching•N+Cut(RIE)•PEP3StrippingCommonPADTFT2222瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingPEP4(5PEPs)•P-SiNPreClean•P-SiNCVD(3000A)•PEP4Photo(20000A)•ContactDryEtching(RIE)•PEP4StrippingCommonPADTFT2323瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司HannStarHannStarDisplayCorp.DisplayCorp.InPlaneSwitchingPEP5(5PEPs)•ITO2(Pixel)PreClean•ITO2(Pixel)PreBake•ITO2(Pixel)Sputter(1400A)•PEP5Photo(15000A)•ITO2WetEtching•PEP5Stripping•PEP5TotalPitchMeas.•Anneal•TEG•ArrayTesterCommonPADTFT