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1620057,,100084:,,:;;PowerMEMS;;TK46:1004132x(2005)51000805overviewofResearehonMieroEnginesL1YongZengMingChenXupengWuXinWangFeiStateKeyLaboratoryofTribology.TsinghuaUniversity,Beijing,100084Abstraet:Thispaperoverviewedseveraltypiealmieroenginesbeingdevelopedworldwidetemptsfortheminiaturizationofmieroengines.Thedesignandfabrieationofminiaturizedorseribed.AndsomeviewsabouttheehallengesandtrendsinthemieroengineresearehwerealsoKeywords:mieroengine;mierofabrieation;powerMEMS;mieroeombustionndintrodueedourmlcroenglnesWeret-UeglvenO,t.,(MAV)1~10ow.,,40~50MJ/kg,0.3~0.7MJ/kg,,6%,5,.,,,.,,,()1,(),:20050409:8,,,,,,,,,,,,,,.,,,,,,,,,,,,,,,,MEMS,1996,EpsteinSenturiaTPowerMEMS,.,:,;,,MITGasTurbine1996MEMS,,l,Zlmm,3mm.,smm6mm,,,,,.1200000r/mim,soom/s,0.369(0.29L)..nN17W40ooor/min.3l,:¹,1200r/min,,º,»(6,25).Katholieke,,(turninganddiesinkingEnM),z20mm10mm,,31~36W[,2.3(miorointernaombustionswingengine,MICSE),,,,,,W4,61mmx61mmx34mm,,[s]Zow,549(),ZommxZommx42mm,1m3,102.SH:,,14.4%,37.ZW21.IW42atholieke2.2(UCB)(mierowankelengine)...,,.3,12.6mm,9300r/min,2.7Wlmm2.4mm,10~100mw,.5,,,,,.(MICSE),.,16200571.2.3.4.5.S6.7.8.9.P,KAIST(mierothermophotovoltaiesystem,TpV)[,Georgia[l0]1.2.3.4.5.6.3,,.3.1,617mmx20mm,76omm3,,,,,,,,,,,,.,,3.2,,,7.,,..,,,,,,,.,,,,,5~20H:,.10,3.3(mierorotaryjetengine),8()..().,600,45,.,,():~,/~/..199mm,,100~2r/min,10%,10~Zow.,,,,.,..,(),.:,;,t.,.;89,4,,,:;.,/,,,/.,,.,,,,,,,[ll,(quenehingdistanee)(,,),0.6lmm,1.smm[l,,.,5..:(1),,(2),,.(3),.(4)MEMS,.(5),.,,,.,:[1EpsteinAH,Senturia5D.AnInformalSurveyofPowerMEMS,TheInternationalSymPosiumonMieroMeehaniealEngineering,Tsukuba,Japan,20032SehmidtMA.POrtableMEMSPowerSourees.2003IEEEInternationalSolidStateCireuitsCon-ferenee,SanFraneiseo,2003[3PeirsJ,ReynaertsD,VerplaetsenF,etal.Devel-oPmentofaMieroGasTurbineforEleettiePowerGeneration.MME2003,the14thMieroMeehaniesEuroPeWorkshoP,Delft,TheNetherlands,2003,1620057,,150001:,1;;:,;;;:059:1004132x(2005)51001203ReviewofNanometreTeebnologyandItsApPlieationsTanXiaoyunHaerbinInstituteofTeehnology,Haerbin,150001Abstract:ThispaPerpresentedthefollowingeontents:newtypesofmaterialsorsubstanees,eleetronieinformationandmilitarysystem.DevelopmentaltrendofnanoteehnologyinbiomediealseieneewasdiseussedProspeetively.Depietingthequantumtunnelingeffeetsinnanometersealeandnanomaterial,iteanmakeehangesinstruetureorenergystate,thesPeeiditiesofshysiesandehemistrywillbehappened.Themieroeleetronies,photoeleetron,eomputerandweaponwillbedevelopedgreatly.Forward,geneoreelleanbeeontrolledandrepairedinnanoteehnology.Keywords:nanometer;nanoteehnology;seareh;trend;eellO21.,,,,:20050325,..,,,,,FuK,KnobloehAJ,MartinezFC,etal,signandExPerimentalResultsofSmallScaleRotaryEngine.2001ASMEInternationalMeehaniealEn-gineeringCongressandExPosition,NewYork,2001DahmWJ,NIJ,MijitK,etal.MieroInternalCombustionSwingEngine(MICSE)forPortablePowerGenerationSystems.AIAAPaper,20020722.(Presentedatthe40thAIAAAerosPaeeSei-eneesMeeting,Reno,NV,2002),,,.//.,2004,33(4):4~8WhalenS,ThomPsonM,BahrD,etal.Design,FabrieationandTestingofP3MieroHeatEngine.SensorsandAetuatorsA:Physieal,2003,104(3):290~298ParkDaeEun,LeeDaeHoon,YoonJunBO,etal.DesignandFabrieationofMieromaehinedIn-ternalCombustionEngineasaPowerSoureeforMierosystems.15thIEEEInternationalConfereneeonMEMS2002,LasVegas,20029YangWM,ehousK,ShuC,etal.MieroCom-bustionResearehforAPPlieationtoMieroTher-mophotovoltaieSystems.EnergyConversionandManagement,2003,44:2625263410KirtaM,Menon5.SimulationofaCombustionDrivenMieroEngine.AIAAPaper20010944.(Presentedatthe39thAerosPaeeSeieneesMeetingandExhibit,Reno,NV,2001)11,..,2003,8(6);58458512Turns5R.AnIntroduetiontoCombustion.aston:MeGrawHillIne.,2000():,,1962../MEMSl1.79,,198,,1977.,,1981..,.198112