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157CVDPVD,,,(,116024)(1999-03-30)DEVELOPMENTOFCVDANDPVDSUPERHARDCOATINGSYuShiji,DingZhenfeng,LiuDongping,MaTengcai(NationalkeyLaboratoryofMaterialsModificationbyLaserlonandElectronBeamDalianUniversityofTechnology,Dalian116024)Abstract:Inthispapersomerecentdevelopmentsofthesuperhardcoatingsofdiamonddia2mond-likecarbon(DLC),C-BNandC-Nweresummarized,theresearchsonfoursuperhardcoat2iongspreparationwereemphaticallyintroduced.Keyword:superhardcoatings,CVD,PVD:-,4:CVDPVD:TG135+.5TG154.5:A:1006-7086(1999)03-0157-06(HV)4000,,SP3,(HV)10000,c-BN-C3N4SP3(SP3),,(CVD)(PVD),CVDPVD,CVDPVD,(),c-BNDLC-C3N41,80(),[1],Vacuum&Cryogenics531999915853,(),,(CH3C2H2)SP2(),SP3,CVD:,,;,WC-Co,,CVD,,,Saijo[2]WC,,,,,Nesladek[3]10.04m;2m25m,;10.04m[4],FujitsuKawarada[5],200m/hIdemitsuCOH2CVD(PCD),,56,,159CVDPVD2,,,(HV6000)(DLC),SP3SP2(a-C),SP3(a-C:H),,SP3,(ta-CH)(ta-C),SP3(70%),PVDPCVDWalter[6]RF-PACVD5Kumar[7](PLD)HeXM[8]Ar+1300eVNe+-CHn+(DLC),DLC--Ar+DLC-,Roth[9]ECR-MVPCVD,56,Marques[10](),Miyake[11]ECR-PCVD10%25%()a-CHSi(0.007),,3c-BNc-BN(HV7000),c2BN,,c2BNc-BNPVDc-BNKesterMckenzie(IBAD)[1213]N+Ar+,N+c-BNc-BN,16053()Kesterc-BN:1a-BN;h-BN;,,c-BN[12],c-BN200nm,c-BNc-BN,c-BNReinke[14],c-BNKlotzbucher[15]-c-BN4C-NC-N-C3N41989LiuCohen-Si3N4,-C3N4[16],,-C3N44.83105MPa,(4.35105MPa)-C3N4(HV10000)-C3N4,CNXC-N,C-N-C3N4,CVDECR-PCVDN/C-C3N41993Niu[17]-C3N4,C3N4,C-N-C3N4Cheng[18]TEMC-N,-C3N4C-N,,(HV)15007000YuMK[19]C-NC3N4(0.5m)TED-C3N4SuXW[20]C-NAESN/C,N/C0.54TEM-C3N4(0.1m)4450kgf/mm2,109cmHeJL[21](PECVD)-C3N4C-NC-NC=N,N2,N2SP3-CN,-C3N4-C3N4,-C3N4161CVDPVD5SP3,,,,,,,(TiN),,[1]MatsumotoS,SatoY,KamoMetal.Vapordepositionofdiamondparticlefrommethane.J.Mater.Sci.,1982,17:3106[2]SaijoK,YagiM,ShibukiKetal.Theimprovementoftheadhesionstrengthofdiamondfilms.Surf.Coat.Technol.,1990,43/44:30[3]NesladekM,SpinneuynJ,AsinariCetal.ImprovementadhesionofCVDdiamondfilmstosteelandWC-Cosubstrate.DiamondRelat.Mater.,1993,3:98[4]ChatterieeS,AG,NicholsAetal.Analysisofsurfacepreparationtreatmentsforcoatingtungstencarbidesubstrateswithdiamondthinfilms.J.Mater.Sci,1997,32:2827[5]KawaradaM,TakeuchiS.Mechinicalapplicationofthinandthickdiamondfilmsbythechemicalvapordepositionprocess.Sufr.Coat.Technol.,1991,49:359[6]WalterKC,KungH,LevineTetal.CharacterizationandperformanceofMater.Res.Soc.Symp.Proc.,1995,354:87[7]KumarA,EkanayakeU,KapatJS.Characterizationofpulsedlaserdepositeddiamond-likecarbonfilms.Surf.Coat.Technol.,1998,102:113[8]HeXM,LiWZ,LiHD.Diamond-likecarbonfilmsynthesizedbyionbeamassisteddepositionanditstriboogicalproperties.Surf.Coat.Technol.,1996,84:414[9]RothD,RauB,RothSetal.Large-areaandthree-dimensionaldepostitionofdiamond-likecarbonfilmsforindustrialapplication.Surf.Coat.Technol.,1994.68/69:783[10]MarquesFC,LacerdaRG,OdoGYetal.Onthehardnessofa-C:HfilmpreparedbyCH4plasmadecomposition.ThinSolidFilms,1998,332:113[11]MiyakeS,KanekoR.Microtribologicalpropertiesandpotentialapplicationofhardlubricatingcoating.ThinSolidFilms,1992,212:256[12]KesterDJ,AileyKS,DavisRT.Depositionandcharacterizationofboronnitridethinfilms.J.Vac.Sci.Technol.,1994,A12:3074[13]MckebizieDR,CockayneDJH,MullerDAetal.Electronopticalcharacterizationofc-BNthinfilmspreparedbyrcactiveionplating.DiamondRelat.Mater.,1993,3:970[14]ReinkeS,FrendenstainR,KurilischW.Ontheroleofionbombardmentincubicboronnitridedeposition.Surf.Coat.Technol.,1997,97:263[15]Klotzbucher,MergensM,WesnerDAetal.PropertiesofcubicboronnitridethinfilmsdepositedbyahybridRF-PLD-technlque.Surf.Coat.Technol.,1998,100/101:388(166)16653[1]MallenerW.Plasma-sprayedcoatingsforplasma-facingcomponents.1998IEEE,884[2]..:,1991.144[3]Tore-SupraTeam,Towardslongpulse,highperformancedischargesinTORE-SUPRA:experimentalknowledgeandtechnologicaldevelopmentsforheatexhaust.FusTech.,July1996,Vol.29,No4[4]VANJG.ProgressinthedevelopmentofcoatingsforplasmafacingcomponentsinNET-ITER.17thSOFTRoma,September1418,1992:,,196510198419913,,1997,(161)[16]LiuAY,CohenML.Predicationofnewlowcompressibilitysolids.Science,1989,245:841[17]NiuC,LuYZ,LieberCM.Experimentalrealizationofthecovalentsolidcarbonnitride,Science,1993,261:334[18]ChengMY,LinX,DravidVPetal.GrowthandcharacterizationofC-Nfilms,Surf,Coat.Technol.,1992,54/55:360[19]YuMK,CohenML,HallerEEetal.ObeservationofcrystallineC3N4.Phys,Rev.,B.1994,49:5034[20]SuXW,SongHW,CuiFZetal.Formationof-C3N4grainsbynitrogen-ion-beam-assisteddeposi-tion.Surf.Coat.Technol.,1996,84:388[21]HeJL,ChangWL.PreparationandcharacterizaionofRF-PECVDdepositedfilmscontaining-C3N4microcrystallites.Surf.Coat.Technol.,1998,99:184:,,19701992,1995,1998999919997212558721,,,,,,,,99725,()(),99()