3.2AFMAtomicForceMicroscope1986G.BinningSPM12100nm100-200ZZxy33.2.1(PSPD)PSPD1nm43.2.25atomatom——1nm6atomatom——73.2.31.AFMAFM8AFM9102.AFMAFM(NC-AFM)11100-400KHz-12NC-AFM13AFMAFMNC-AFMAFM14AFMAFM15316AFMimages(5µm5µm)offilm(5%)Ru-PVK(a)and(5%)Ru-PBD(b).3nm2nm173.3STMAFM3.3.1MFM-18-193.3.2(EFM)EFM201SPM23456AFM7AFM821