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廠務系統縮寫名詞解釋Abbreviation(缩写)FullName(全名)中文说明CUPCentralUtilityPlant中央动力厂房GEXGeneralEXhaust普通及热排气SEXScrubberEXhaust酸排气VEXVolatileorgaiccompoundEXhaust有机溶剂排气AEXAmmoniaEXhaust碱性排气PCWPlantCoolingWater工艺冷却水PVProcessVacuum工艺真空HVHouseVacuum真空吸尘CWCityWater自来水FMCSFailityMonitoringControlSystem厂务监控系统MCCMotorControlCenter马达控制中心CCTVCloseCircuitTelevsion闭路电视PAPublicAdresssystem广播系统FAFireAlarmsystem火灾报警系统UPWUltraPureWater超纯水FWWFluorideWaste低浓度氢氟酸废水IWWIndustryWasteWater工艺废水OWWOrganicWasteWater有机溶剂废水DAHWDrainAmoniaHydrideWaste含氨废水RCLRecyclewater制程回收循环水RCMReclaimwater制程回收再利用水HFWHighFluorideWastewater高浓度氢氟酸废水BGWBackgridingWastewater晶背研磨废水SAWSulfuricAcidWastewater硫酸废液PAWPhosphoricAcidWastewater磷酸废液SWStripperWastewater剥离液废水TWThinnerWastewater清洗废液PIXPixwastewaterPIX废液SLOWOxideslurrywastewater介电质研磨废水SLWPMetalslurrywastewater金属研磨废水SLWPPolyslurrywastewater多晶硅研磨废水PN2ProcessN2制程用氮气GN2GeneralN2一般用氮气CDACompressorDryAir压缩干燥空气VMBValveManifoldBox阀箱AHUAirHandlingUnit空调箱MAUMake-upAirUnit外气空调箱VAVVariableAirVolumebox可变风量风箱FFUFanFilterUnit风车过滤器HEPAHighEfficiencyParticulateFilter高效率过滤器ULPAUltraLowPenetrationFilter超高效率过滤器A/SAirShower空气浴尘室CUPCentralUtilityPlant中央动力厂房FMCSFailityMonitoringControlSystem厂务监控系统MCCMotorControlCenter马达控制中心VFDVariableFrequencyDevice变频器空調系統電力系統廠務系統縮寫名詞解釋Abbreviation(缩写)FullName(全名)中文说明CCTVCloseCircuitTelevsion闭路电视SCADASupervisoryControlAndDataAcquisition监视控制和数据搜集系统MCCMotor马达控制中心ControlCenterVFDVariableFrequencyDevice变频器UPWUltraPureWater超纯水ROReverseOsmosis逆渗透膜TOCTotalOrganicCarbon总有机碳MBMixed混床BedUFUltraFiltration超滤SCStrong强阳离子CationSAStrong强阴离子AnionWAWeak弱阴离子AnionDODissolved溶解氧OxygenMDMembrane脱氧膜DegasifyGFGravity重力式过滤器FilterDIDeionize去离子水CQCContinuous连续品质控制系统QualityControlVMBValve閥箱ManifoldBoxVMPValve閥盘ManifoldPanelGMSGas气体监测系统MonitoringSystemCDSChemical化學系统DispenseSystemSDSSlurry化學研磨系统DispenseSystemESHEnvironment环境安全卫生Safety水處理系統氣體/化學系統环境安全卫生廠務系統縮寫名詞解釋Abbreviation(缩写)FullName(全名)中文说明HealthSCBASelf自给式空气呼吸器ContainedBrathingApparatusHVACHVACAHUAir空调箱HandlingUnitMAUMake-up外气空调箱AirUnitVAVVariable可变风量风箱AirVolumeboxFDFire防火风门DamperFSDcombinedFire防火防烟风门SmokeDamperSDSmoke防烟风门DamperPHXPlatedtype板式热交换器HeatExangerFFUFan风车过滤器FilterUnitHEPAHigh高效率过滤器EfficiencyParticulateFilterULPAUltra超高效率过滤器LowPenetrationFilterA/SAir空气浴尘室ShowerA/LAir气闭门室LockDCCDry干盤管CoolingCoilFCUFan小型冷风机CoilUnitSFSmoke消防排烟风车FanEFExhaust通风排气风车廠務系統縮寫名詞解釋Abbreviation(缩写)FullName(全名)中文说明FanCUPCentral中央動力廠房UtilityPlantGEXGeneral普通及熱排氣EXhaustSEXScrubber酸排氣EXhaustVEXVolatileorgaiccompound有機溶劑排氣EXhaustAEXAmmonia鹼性排氣EXhaustPCWProcess工藝冷卻水CoolingWaterPVPlant工藝真空VacuumHVHouse真空吸塵VacuumCWCity自來水WaterFMCSFaility廠務監控系統MonitoringControlSystemMCCMotor馬達控制中心ControlCenterVFDVariable變頻器FrequencyDeviceCCTVClose閉路電視CircuitTelevsionPAPublic廣播系統AdresssystemFAFire火災報警系統AlarmsystemUPWUltra超純水PureWaterROreverse逆滲透膜OsmosisTOCtotal總有機碳organiccarbonMBmixed混床bed廠務系統縮寫名詞解釋Abbreviation(缩写)FullName(全名)中文说明UFultrafiltration超濾SCstrong強陽離子cationSAstrong強陰離子AnionWAweak弱陰離子AnionDOdissolved溶解氧oxygenMDmembrane脫氣膜DegasifyGFgravity重力式過濾器.FilterDIdeionize去離子水FWWFluoride低濃度氫氟酸廢水WasteWaterIWWIndustry工業廢水WasteWaterOWWOrganic有機溶劑廢水WasteWaterDAHWDrain含氨廢水AmoniaHydrideWastewaterRCLRecyclewater製程回收循環水RCMReclaimwater製程回收再利用水HFWHigh高濃度氫氟酸廢液FluorideWasteBGWBackgriding晶背研磨廢水WastewaterSAWSulfuric硫酸廢液AcidWastePAWPhosphoric磷酸廢液AcidWasteSWStripper剝離液廢液WasteTWThinner清洗廢液Waste廠務系統縮寫名詞解釋Abbreviation(缩写)FullName(全名)中文说明PIXPIXwastePIX廢液SLW-OSLurry介電質研磨廢水WastewaterOxideSLW-MSLurry金屬研磨廢水WastewaterMetalSLW-PSLurry多晶硅研磨廢水WastewaterPolyPN2Process製程用氮氣N2GN2General一般用氮氣N2CDACompressor壓縮乾燥空氣DryAirVMBValve閥箱ManifoldBoxESHESHEnvironment环境安全卫生SafetyHealthSCBASelf自给式空气呼吸器ContainedBrathingApparatusISOInternational国际标准化组织OrganizationforStandardizationPOUpointofuse（产品的)使用地点;（服务的）提供地点