Imagemaster-PRO4中文操作手册

ImageMasterPRO41.1220V(34A800W1.21.2.11.4(12.(23.(1.2.21.((VGAIn)VGAInTVIn)2.()(3)3.()(3)4.(SN:267841/23425-231.2.31.(XYZCOM_1)(5)2.9CCD(63.()(7)4.()(8)1.2.41.X,Y(X,Y(9)2.””(10)56/7891025-233.”””111.2.5Reticle(Chart1.Chart(V)(12)1.2.61.(13)2.[4(Photopic-eyeChart3.Chart()(13)4.()Chart(ChartChart1mm)1.2.7CCD1.2CCD125mmCCD(Lens1.5~3mm)150mmCCD(Lens3~6mm)1112Chart1325-232.1CCD9CCD1CC8()CCD3.(14)4.CCDCCD(15)5.CCD(a)CCDCCD(16)(b)CCD6.CCD(90)1.2.8Lens1.(2V)2.5~15umC-2001.31.2pcs1pcsOSRAMHLX(15V150W2.4pcs4pc6V5W1415162.1ChartCCD1.(17)2.CharRET-6711/3’’1/6’(18)3.MTF.||EFS|T184.CCD6.7.8.91:1.CCD(2.3.4.5)4:3.(19)5.Chart(Field_Postion)CCD(20)V609EFL=2.5mmChart1.15524.192018CCD(9)Chart172.21.1.11/10(0.2)1.210arcsec2.MTF2%3.MTF3%2.31.3000K(124(12C2.CCDCCD(a)Align(b)CCDCCD()2.4()1.LogIn2.1(GoldenSample)(1,1)3.1x1”X1”4.CCD5.(1,1)(6.7.”TrayGenerator2.5”8.(9.MTF2.5(Chart)_2.5.11.(21)3(FFL)()2.(FFL)3FFL3FFL0.03mm3.(22)3.13.23.32.5.2Chart1.()(23)2.(3.4.(EFL=100mm(24)5.((25)212422236.3478(25)7.2Chart(26_1)8.ChartChart(26_2)9.CCDCCD(27)2526_126_2272810.CCD(28)11.CCD3.1MTFPro4Ver1.95MTF1.Outputfolder-2.Softwarevi–9x/measurementData:.()3.Operator.4.Batch()5.Lot()6.Startbatch.7.Worktime:(,)/(,.)8.Avgtime/sample:.9.MesNo.10.PassOK.11.FailNG.12.ThresholdOKNG.13.Coarse.14.Eraselast.15.Measure.OKNG()-()-()-()-3.21.MTFPro4Ver1.95.2.(a).([Listallfiles])(b)X(c)()3.ConfigurationFil6*6OKNG9CCD.4:3(2345)1:1(6789).SMTF,TMTF.4.(a)().(b)Startbatch().(c)(5.452Chart(29)6.Coarse()7.Measure()8.45Chart(29)9.OKNG(NGOK)10.”ViewTray”29OKNG3.31.(1500)2.Chart3.4.11.ChartZ2.3.9CCD()X,YX,YX,YNGX,YCCDMTFCCD+MTFCCD+(um)4.A.MTFB.C.CCDD.CCD+MTFE.CCDF.G.(ThroughFocus)H.4.2MTF(ConfigurationFile)1.ConfigurationFileOpen:Reload:(Reload)Edit/Creat:(ConfigurationFile)Close:2.MTF(ConfigurationFile)a.MTF:CCDSMTF(OK)TMTF(OK)STSMTF()TMTF()STMTFb.(EFEFLEFLEFL()MTF(5)()PassOK(FFL).MTFc.CCD(”H”””)Triopticsd.1(s)1:1CCD.(ImagePlane)4.3MTF1.ToolsOptions:PolarDiagram:2.Options:a.Trinamic(TriopticsZPRO43)b.AutoFocusConfigurationFile(MTF)ConfigurationConfigurationFilec.Instrument()TFTFTSXCCDTSCCDChartChartHChartd.CCDCamera()`e.MTF(ConfigurationFileConfiguration)CCDCCD10~2403CCD231(1000,3000,2000)(2f.Chart(Reticle)g.”H”””ChartCCDCCDChartMTF/EFLPass/FailChartChartZXYMTFCSVPro1()2,3,4,5CCD1h.EFL/FFLi.P90.=Position_Zaxis+FFL_result(),(Ref),()3Row,Columns.(Row)3.PolarDiagram()4.4ImagePlane1.ImagePlane1.2.12.3.1ImagePlane4.5MTFProVer.2.91.MTFProVer.2.92.,0.24.6(FeedBack)1.2.CreateNewLog3.C:\MTFPRO4SoftwareV1_9X\AssistantLogFileMasterLens5.1Z(1)1.ToolsOptions()Other“Movedriverbackaftermeasure”“0”()2.(TriopticsFFL=0.773mm)(Coarse)(Measure)3.Position()4.ChartFlangerefposition=FFL(0.773)+Position(36.325)0.773+36.325=37.09ToolsOptions()EFL/FFLFlangerefpositio05.ZToolsOptions()EFL/FFLCalibrateFFLmasterlens37.098FFL6.(1,1)(1,1)(“Listallfiles”7.”Measure”(Measure)8.”TrayGenerator2.5”9.(:6x6)()(1,1)210.TrayGenerator”Addtogetherresultsfromfiles11.(Edit)ZToolsOptions()EFL/FFLCalibrateFFLmasterlens”0””0”Z5.2MasterLens1.OK2.ImagePlaneMTFProVer.2.9Angle3.ThroughFocusET2005-D01ThroughFocus4.MTF(MTFProVer.2.9)