中科院 微电子机械系统设计(MEMS)课件

IntroductiontoMEMSSpring2012WeidongYiDesign,Analysis,FabricationCourseOverviewPart1IntroductiontoMEMSPart2MicrofabricationFundamentalsPart3MicrosystemFabricationProcessesPart4Mechanics,andTransductionPart5ElectronicInterfaceDesignPrinciplesPart6MEMSDesignCaseStudiesTextsbook:1.StephenD.Senturia,MicrosystemDesign,KluwerAcademicPress,20012.CourseReader(SelectedReferencePapers)Part1IntroductiontoMEMSWhataretheGoalsofthisCourse?AccessibletoabroadaudienceminimalprerequisitesDesignemphasisexposuretothetechniquesusefulinanalyticaldesignofstructures,transducers,andprocessflowsPerspectiveonMEMSresearchandcommercializationcircaCourseMechanicsLectures:Monday,Wednesday10:00-12:00Homework:bi-weeklyassignmentsdistributedonThursdaysandduethefollowingThursdayattheclassbeginningExam:(TBA)OfficeHours:(TBA)Creditbreakdown(approximate)10%homework30%finalProject60%finalexamLectureOutlineToday’sLectureWhatisMEMSHistoricaltourofMEMSMEMSandnanotechnologyMicroElectroMechanicalSystemsMEMSDefinedWhatisMEMSMEMSinvolvebothelectronicandnon-electronicelementsthermal,magnetic,fluidicandopticaldevicesMEMSare“systems”inthetruesensePackaging,systempartitioningintocomponents,calibration,signal-to-noiseration,stability,reliabilityMEMSmayinvolvelargearraysofmicrofabricatedelementsDNAarray,infraredimagingdevices,bothreflectiveandrefractiveprojectiondisplaysExamplesofMEMSDevicesinkjet-printercartridgesaccelerometersMicroenginesinertialsensorsmicromirrors,opticalscannersfluidpumps,chemical,pressureandflowsensors.BiosensorsDimensionalRanges1mmL300mmlateraldimensionsSurfacemicromachinedstructures…“classicMEMS”300mmL3mmBulksilicon/waferbondedstructures…stillcallthemMEMSandcovertheminthiscourse10nmL1mmNanoelectromechanicalsystems…NEMSBatchFabricationTechnologyPlanarintegratedcircuittechnology1958-1.Thin-filmdepositionandetching2.Modificationofthetopfewmmofthesubstrate3.Lateraldimensionsdefinedbyphotolithography,aprocessderivedfromoffsetprintingResult:CMOSintegratedcircuitsbecametheultimate“enablingtechnology”bycirca1980Moore’sLawDensity(andperformance,broadlydefined)ofdigitalintegratedcircuitsincreasesbyafactoroftwoeveryyear.Moore’sLawMoore’sLawInthe1990sthenumberoftransistorsonmicroprocessorscontinuedtodoublenearlyevery18months.TherateofchangefollowedanearlypredictionmadebyAmericansemiconductorpioneerGordonMoore.In1965Moorepredictedthatthenumberoftransistorsonacomputerchipwoulddoubleeveryyear,apredictionthathascometobeknownasMoore’sLaw.Inthemid-1990schipsincludedtheIntelPentiumPro,containing5.5milliontransistors;theUltraSparc-II,bySunMicrosystems,containing5.4milliontransistors;thePowerPC620,developedjointlybyApple,IBM,andMotorola,containing7milliontransistors;andtheDigitalEquipmentCorporation'sAlpha21164A,containing9.3milliontransistors.Bytheendofthedecademicroprocessorscontainedmanymillionsoftransistors,transferred64bitsofdataatonce,andperformedbillionsofinstructionspersecond.OtherBatchFabricationProcessesHistorically,therearen'tthatmanyexamplesoutsideofchemicalprocessesHowever,that’schanging:Soft(rubber-stamp)lithographyParallelassemblyprocessesenablelow-costfabricationofMEMSfrommicro/nanocomponentsmadeusingotherbatchprocesses…“heterogeneousintegration”ABriefHistoryofMEMS:1.Feynmann’sVisionRichardFeynmann,Caltech(NobelPrize,Physics,1965)AmericanPhysicalSocietyMeeting,December29,1959:“WhatIwanttotalkaboutistheproblemofmanipulatingandcontrollingthingsonasmallscale.….Intheyear2000,whentheylookbackatthisage,theywillwonderwhyitwasnotuntiltheyear1960thatanybodybeganseriouslytomoveinthisdirection.”“…AndIwanttoofferanotherprize--…$1,000tothefirstguywhomakesanoperatingelectricmotor---arotatingelectricmotorwhichcanbecontrolledfromtheoutsideand,notcountingthelead-inwires,isonly1/64inchcube.”…hehadtopaytheelectricmotorprizeonlyayearlater1958RobertNoyce–FairchildandJackKilby(NobelPrize,Physics,2000)-TexasInstrumentsinventtheintegratedcircuitBytheearly1960s,itwasgenerallyrecognizedthatthiswasthewaytomakeelectronicssmall…andcheaper.TheplanarprocessallowedfortheintegrationofmultiplesemiconductordevicesontoasinglepieceofsiliconPlanarICTechnologyHarveyNathansonandWilliamNewell,gotasurface-micromachinedresonantgatetransistor,(Westinghouse,1965)Thedeviceoperatesahigh-QelectromechanicalfilterDidHarveyhearaboutRichardFeynman’stalkin1959?Idon’tthinkso…PlanarICTechnologyPlanarICTechnologyWhyDidn’tMEMSTakeOffin1965?Resonantgatetransistorwasapooron-chipfrequencyreferencemetalshaveahightemperaturesensitivityanddon’thaveasharpresonance(low-Q)…specificapplicationdidn't“fly”In1968,RobertNewcomb(Stanford,nowMaryland)proposedandattemptedtofabricateasurfacemicromachinedelectromagneticmotorafterseeingtheWestinghouseworkEnergydensityscalingforthistypeofmotorindicatedperformancedegradationasdimensionswerereduced…MaterialsincompatibilitywithStanford’sMicroelectronicsLabresearchfocusonelectronicdevicesbecameamajorissueMoreRecentHistory1982-KurtPetersen’s