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:1004-2539(2010)11-0086-05(,100048)微型机电系统产生的背景及其研究意义,列表对比了微电机主要类型和特点,介绍了微传动系统的研究现状和新出现的微型谐波齿轮传动形式,最后推导出行星式波发生器微型谐波齿轮传动比计算公式微型机电系统微电机微传动系统微型谐波齿轮SummaryonMicro-mechanicalDriveTechnologyQiaoXuweiXinHongbing(CollegeofMechanicalEngineering,BeijingTechnologyandBusinessUniversity,Beijing100048,China)AbstractAtfirst,thebackgroundofMEMSanditssignificancearebrieflyintroduced,andthemaintypesandcharacteristicofmicro-motorsarelisted.Then,thepresentresearchstateofmicrotransmissionsystemandthenewlyappearedmicroharmonicgeartransmissionsystemareintroduced.Finally,thetransmissionratiocalculationformulaofthemicro-harmonicgearboxwithaplanettypewavegeneratorisderivedout.KeywordsMEMSMicromotorMicrotransmissionsystemMicroharmonicgear11959,(RichardFeynman)ThereisPlentyofRoomattheBottom,[1],2070[2],Middelhoek1989[3],1987IEEEMicroRobotsandTeleoperatorsSmallmachines,Largeopportunities,(micro-electro-mechanicalsystem,MEMS),[4]1988,,(60~120)m[5],,1989,NSF(NationalScienceFoundation),MEMS[6],MEMS,()MEMS,,,,1[7]MEMS[8][9-10]MEMS,,,,,,,8620101,,,,,MEMS,,,,MEMS,,,1,,,,1[11-15]1,,,,,,(),,,2/mm/(r/min)()/mA[15]4mm5500003.5Nm[16]291(wisconsion)100m2150000100nNm600423m4.5120000600(Georgia)500m1.55001.2nN.m5001.4mm62000116nN.m500()2mm2501.5N.m120[17]160[17]161[18]3.551nNm4653.75nNm1.830~508734112,[19-20],,3[21]3;,,,,,,,;,;,;,,,,();,;,,;;,,;,;,;,;;,,;,();,,,,,,,,(),,RutheffordAppleton700(2)[22](Micro-gear)(Micro-reducer),,,,LIGA,1192m500m,200m,,4[23-26]4;,,,(10m~1mm)LIGALIGA[16]8-11[17]62-81,[17]186-198588201053K-2[27]44.2/113Nm4mm3K-[28]10mm[29]Sumitomoi=6,11,15,20,21,25,0.736kW;i=102,1.1kW[30]i=73mm,1.8mm,22.8mm,25.2mm,24mm,,,,,,2550000r/min,3.5Nm,,,,,,,,,3,,,,,,Micromotion(3),,3[31]44[32]ih:ip,ifhrirhf,ifhrirhf,,4,4,12,:(1),ip=rs+r0rs,ifhr=zrzr-zf,r0=rs+2rp-w0ih=ipifhr=rs+r0rszrzr-zf=rs+rs+2rp-w0rszrzr-zf=(2+2rp-w0rs)zrzr-zf(1)(2),893411ip=rs+r0+w0rs,irhf=zfzf-zr,r0=rs+2rp-w0ih=ipirhf=rs+r0+w0rszfzf-zr=(1+r0+w0rs)zfzf-zr=(2+2rprs)zfzf-zr(2),zr;zf;rsrp;r0;w02~8,50~500,100~4000,,,,5,,,,,[1]FeynmanRP.TheresPlentyofRoomattheBottom:Aninvitationtoenteranewworldofphysics[J].CaliforniaInstituteofTechnologyJournalofEngineeringandScience,1960,23(5):23-36.[2]TerrySC,HermanJH,AngekJB.AGasChromatographAirAnalyserFabricatedonaSiliconWafer[J].IEEETransElecrtonDevices,1979(26):1880.[3]MiddelhoekS,AudetSA.SiliconSensors[M].NewYork:AcademicPress,1989:1641-1658.[4]FluitmanJ.MicrosystemTechnology[J].ObjectivesSensorsandActuators,1996,56:151-166[5]TerrySCA.MiniatureSiliconAccelerometerwithBuiltinDamping[C]DigestIEEESolid-stateSensorandActuatorWorkshop,June6-9,1988.HiltonHeadIsland.NewJersey:IEEE,1988:114-116.[6]ThompsonXV.NewMicrosystemsApplication,FastGrowth[EB/OL].(2002-01-20)[7],.[J].,2008(7):105.[8],.[J].,2004(1):119.[9].[J].,2005,6(1):27.[10],,.[J].,2005,20(5):2.[11],,,.[J].,2006,24(2):144-146.[12],.[J].,2001,(6):12[13],,,.[M].:,2005:152-163.[14],,.[J].,2002,24(6):447-449.[15],,,.MEMS[J].,2009,42(8):61-64.[16],.[M].:,2006:8-11,291.[17],.[J].:,2006:62-81,160-161,186-198.[18],,,.[J].,2008(7):227-229.[19],,,.[J].,2004,2(2):121.[20],,,.21()[J].,2001(1):7.[21].[EB/OL].[2010-05-20]=3.[22],.[J].,2005,21(1):41-42.[23].[M].:,2002:352.[24],.[M].:,2008:38-43.[25]ModafeA,GhalichechianN,FreyA,etal.Microball-bearing-supportedelectrostaticmicromachineswithpolymerdilectricfilmsforelecrtomechanicalpowerconversion[J].JournalofMicromechicsandMicroengineering,2006(16):182-190.[26]KimD,LeeS,JinY,etal.MicrogasbearingsfabricatedbydeepX-raylithography[J].MicrosystemTechnologies,2004(10):456-461.[27].[EB/OL].[2010-05-20].=SNAD000000184230&dbname=SNAD&uid=WEEvREdiSUtucElBVzBwcXFvREtJek1SQWJzS3B1TT0=#,2003,11.[28].3K-[D].:,2009:15-22.[29].[J].,1999,23(2):42-43.[30],,,.[J].,2003,27(3):12-13.[31]MicromotionGmbH.MicroHarmonicDriveGearBox[EB/OL].[2010-05-20][32],.[M].:,1985:243-245.:20100403:(3082005):(1984-),,,902010