声表面波加速度传感器关键技术的研究全文案例分析电子版

论文题目：声表面波加速度传感器关键技术的研究专业：检测技术与自动化装置硕士生：（签名）指导教师：（签名）摘要加速度传感器广泛应用于工业生产的很多领域，但是传统的加速度传感器由于其自身的一些缺点使得它无法在一些高精尖领域应用。声表面波加速度传感器作为一种灵敏度极高，线性度好以及抗干扰能力极强的惯性传感器已经在航空航天和汽车制造等领域内得到了广泛应用。因此，深入研究声表面波加速度传感器的传感机理及其检测技术，不仅具有理论意义，而且具有工程实用价值。本文改进了传统悬臂梁式声表面波加速度传感器的差动结构，并完善了整个声表面波加速度传感器的信号检测系统。本论文在悬臂梁式SAW加速度传感器研究方面取得的具体成果有：1.为配合后续的混频电路以及全新的频率测量方法，对传统声表面波加速度传感器的差动方案进行了改进，抑制了温度干扰因素对加速度传感器的影响，而且降低了其加工制作的难度。2.为了使得频率计数单元能正常工作，设计了低通滤波放大电路，使用Multisim10对其进行了仿真研究，仿真结果表明所设计的滤波放大电路完全满足系统要求，各项参数均接近理论值。3.通过对于系统输出频率的测量可以计算出相应加速度的大小，传统的等精度测频法存在对标准信号计数的1误差，本文将传统等精度测频法进行了改进消除了1误差。4.传统的测频法对于低频信号的测量误差较大，本文提出了利用基于声表面波带通滤波器的闸门时间可变测频法，提高了低频信号的测量精度。关键词：声表面波(SAW)；悬臂梁式SAW加速度传感器；滤波器；等精度；频率研究类型：应用基础研究Subject:TheStudyonCrucialTechnologyinSAWAccelemeterSensorsSpecialty:DetectionTechnologyandAutomationEquippmentName:MaHuicheng(Signature)Instructor:LiuJunyao(Signature)ABSTRACTAccelerationsensorsarewidelyusedinmanyareasofindustrialproduction.Butduetotheirownshortcomings,traditionalaccelerationsensorsareimpossibleinsomeareasofapplicationofsophisticated.SAWaccelerometerasahighsensitivity,excellentlinearity,aswellasstronganti-interferenceabilityinertialsensorshasbeenwidelyusedinaviationandaerospaceandautomotivemanufacturingfield.Therefore,thein-depthstudyofSAWaccelerometersensingmechanismanddetectiontechnology,notonlyoftheoreticalsignificance,butalsoofpracticalengineeringvalue.ThispaperimprovesthedifferentialFabricofthetraditionalcantilever-typeSAWaccelerationsensorandperfectthewholesignaldetectionsystemofit。Theexactachievementsinthecantilever-typeSAWaccelerationsensorofthispaperarefollowingby:1:Totieinwiththefollow-upmixercircuitandthebrand-newmeasurementmethod,thetraditionaldifferentialprogramsoftheSAWaccelerationsensorhasbeenimproved,whichwellrestrainttheimpactontheaccelerometeroutofthetemperaturedisturbance,andalsoreducesthedifficultyofitsmanufacture.2:Inordertomakefrequencycountunitcanworkproperly,designslow-passfilteramplifiercircuit,usesMultisim10forasimulationresearchofthem.Theresultsshowthatthedesignedfilteramplifiercircuitisfullymeetthesystemrequirements,alltheparametersareclosetothetheoreticalvalue.3:Wecancalculatethecorrespondingaccelerationthroughthemeasurementofthesystemoutputfrequency.Thetraditionalmethodofequivalentprecisionfrequencymeasurementhave1errorsofstandardsignal,thispaperhaveimprovedthemethodtoeliminatetheerror.4:Thetraditionalfrequencymeasurementhasalargerbandwidthforlow-frequencysignals.Thispaperpresentsthegatetimevariablefrequencymeasurementwhichappliedtheall-passfilterofSAWtoimprovethelow-frequencysignalmeasurementaccuracy.KeyWords:SAW(SurfaceAcousticWave)SAWaccelerometerwithCantileverBeamFilterEqualprecisionFrequencyThesis:ApplicationFundamentalResearch目录I目录摘要.........................................................................................................................................IABSTRACT......................................................................................................................II目录.........................................................................................................................................I1绪论........................................................................................................................................11.1SAW加速度传感器先进性分析[1][2][3][4][58]...................................................................11.2SAW加速度传感器的应用............................................................................................21.3国内外SAW加速度传感器研究的现状及本论文任务..............................................21.4论文的结构安排...........................................................................................................32声表面波及声表面波器件....................................................................................................52.1声表面波的种类[1].......................................................................................................52.1.1瑞利波.................................................................................................................52.1.2电声波、乐甫波、和拉姆波............................................................................52.1.3声表面波叉指换能器.........................................................................................62.2声表面波器件............................................................................................................102.2.1声表面波延迟线[10][13]....................................................................................102.2.2声表面波谐振器[1]...........................................................................................112.2.3声表面波振荡器[1]...........................................................................................122.2.4声表面波带通滤波器[13][14].............................................................................132.3本章小结.....................................................................................................................143声表面波加速度传感器......................................................................................................153.1SAW加速度传感器的结构形式[1]...............