长方光电iHawkXtrme-Copper-wire-bonding调试与生产

长方光电Copperwirebonding张永军1/9/2011ASMPacificTechnologyLtd.©2009CopperwirebondingBaseinformationMachine:IHawkXtremeSerialNo:XK06-003LeadFrame:一詮10R×6C×3indexDie:三安7×8milPadopening:3×3milJiaBocopperwire(镀钯)E/L:6-15%T/S:5CNSize:0.9milASMPacificTechnologyLtd.©2009CopperwirebondingiHawkXtremerunningstatusKSconnxrunningstatusConnxcopperwirebonding会撞断capillary，KS在更新SoftwareConnx生产状态不稳定，断线频繁Connx更换霍力士镀钯copperwire与capillary，状态不稳定，断线频繁Date生产材料MissingballNSOLNSOPstatus8/30/20119K000stable8/31/201142K200stableASMPacificTechnologyLtd.©2009CTMrequirementCustomerrequirementWirepull(0.9mil,Cu)8gBallShear(0.9mil,Cu)6g/mil2Ballsizenotexceedbondpad(75um)漏电测试ASMPacificTechnologyLtd.©2009CopperwirebondingiHawkXtreme&KScopperwirebondingqualitycontrastMachineWirepull(g)iHawkXtreme131313111212Connx111112111313Machine漏电测试(9k)漏电不良%iHawkXtreme1.5％Connx2％ASMPacificTechnologyLtd.©2009CopperwirebondingMachine1stbondball(connx较IHX圆）2ndbondshape（connx与IHX无差别，取决瓷嘴）iHawkXtremeconnxASMPacificTechnologyLtd.©2009BallshearevaluationCTMdoesn’thaveballshearmeasuringapparatus,theyusedaneedletopushout1stbond,andthencheckIMCofpadsurfaceneedleQC通过用针笔挑，1stbond和2ndbond有少许残留印迹，通过客户的要求。具体ballshear，待产品送香港协助测试结果。ASMPacificTechnologyLtd.©2009PerformancedataanalysisMcmajorstoppagerecordM/CS/NXK06－003Date30Aug2011Gold/CopperJiaBoCu-Pd（镀钯）Device3528(2wires,60/unit)WireSize0.9milGrossUPH14578MTBA0:08:31(machinerelatedMTBA89)ProductionTime1:59:18Output27684NSOP0padcontaminatedordirty2noobviousmaterial-problem0NSOL0falsealarmOnoobviousmaterial-problem0ShortTail0LeadPR7Leaddeform0DieLifting0noobviousmaterial-problem0missball2DiePR0Skipdie5ASMPacificTechnologyLtd.©2009PerformancedataanalysisMcmajorstoppagerecordM/CS/NXK06－003Date31Aug2011Gold/CopperCu（镀钯）Device3528(2wires,60/unit)WireSize0.9milGrossUPH14517.9MTBA0:06:38（machinerelatedMTBA41min)ProductionTime3:06:36Output43606NSOP0padcontaminatedordirty2noobviousmaterial-problem0NSOL0falsealarmonoobviousmaterial-problem0ShortTail0LeadPR8Leaddeform0noobviousmaterial-problem0missball14DiePR0Skipdie6remark14中有8次是LF污染所致，清洗LF后无断线，2次是die粘胶ASMPacificTechnologyLtd.©2009CopperwirebondingiHawkXtreme两天生产数据ASMPacificTechnologyLtd.©2009CopperwirebondingMissingball原因分析8/30/2011生产9K材料无一次missingball，在bonding前用氩气清洗机清洗用copperwirebonding的3528材料，以排除材料的不稳定性8/31/2011生产的42K3528材料在上午9：30至下午15：40生产过程中没有missingball，随后的一片3528材料开始出现连续的missingball问题，为了排除客户材料的不确定性，再次将材料清洗，没有解决。将镀钯copperwire即将用来bonding的wire扯去一定长度的wire后继续bonding，在没有调试参数的前提下missingball问题消失，此问题的原因可能是镀钯copperwire的工艺的不稳定性导致的。Windowclamp建议目前客户的3528W/C是采用压tiebar的设计，这种压材料的方式导致3528cup是压不紧，对copperwirebonding可能造成潜在的断线问题，建议采用压cup的设计方式。ASMPacificTechnologyLtd.©2009Copperwirebonding产品bonding效果图ASMPacificTechnologyLtd.©2009ParametersettingEFOparametersettingWiresize0.9milEFOdelay2msTotaltaillength350μmEFOtime0.75msEFOcurrent55mAGapwidewarningvolt5000Tailcurrnt30mATailtime0.1μSASMPacificTechnologyLtd.©2009ParametersettingBQMsetting1stbondpowerlevellow2ndbondpowerlevelhigh1stbondpowercontrolConst-P2ndbondpowercontrolConst-p1stbondrisetime22ndbondrisetime3ASMPacificTechnologyLtd.©2009Parametersetting1stbondparameterStanbypower45Contactpower0Contacttime2Contactforce40Basetime15Basepower60Baseforce50ASMPacificTechnologyLtd.©2009Parametersetting2ndbondparametersettingStandbypower20Contacttime3Contactforce0Contactpower200Basetime15Basepower80Baseforce90Releaseforcetime2Releaseforce50ASMPacificTechnologyLtd.©2009ParametersettingLoopparametersettingprofileSTD-QALoopheight350ReverseheightadjustmodeautoReverseheight383Neckangelfactor60Reverseangle30Loopheightcorrection0Loopheightscalefactor0ASMPacificTechnologyLtd.©2009SummaryofCuPdwirebondingAccordingtoCTMQAfeedback,bondingqualitycouldreachCTMrequirementbasicallyMccouldrunproductioncontinuouslyifmaterialisgoodenoughCurrentUPHisaround15K/hourMachinerelatedMTBAis41minsKSconnxmissingballfrequencyforJIabo&Hereauscopperwirebonding,KSserviceaskforhelptocontinuecopperwirebondingKSconnxhitcapillaryduringrunning,S/Wupdating.ASMPacificTechnologyLtd.©2009TheEndThankYou