爱德华scrubber高处理量

ThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007ATLASProductrangeoverview2ThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007ATLASrange•Combustionabatementcombinedwithwetscrubbingstages•SuitableforEtchapplications•LowCoO,userfriendlysolution•Excellentreliabilityonharshestprocesses•PFCgasabatementcapabilityThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007ATLASConstruction4ThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007ATLASLayoutAllutilityconnectionsattopAllelectricshousedinfront-accessiblesectionTouch-sensitivecolourscreenInletpipeworkdesignavoidspowder&liquidtrappingHydro-cyclone:self-cleaningwaterfilteringdeviceEasilyaccessibleheatexchangerandwaterpumpsUseofCPVCcomponents,largediametersminimiseriskofblockageEverythinghousedinasinglecabinetIntegraldrip-trayCPVCisaFM-approvedflame-retardantplastic5ThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007GaspathWaterUntreatedprocessgasCombustionby-productsDetoxifiedgasFuel+AirThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007ATLASCombustionsection7ThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007Inlets•L-shapedpipework•Avoidblockagebysolid/liquidby-products•Upto6inlets•TMSoptionavailable•Inlettemperaturecontrol•Avoidby-productscondensation8ThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007Combustionsection•Initialgastreatment:combustion•Oxidationofdepositiongases•SiH4+O2SiO2+2H2O•Reductionofcleangases(NF3,F2)•2F2+CH4+O24HF+CO2•Anti-clogginginlethead•Inwardfiredcombustor•Porousceramicconstruction•Excellentcorrosionresistance•Provenpowderhandling•Safe(leak-proof,coldouterwall)ATLASInletsPneumaticactuatorsSpringsInletHeadSelfCleaningMechanismInletnozzle10ThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007Combustor150mm150mm11ThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007Combustor:InwardfiredcombustionFuelgas+AirProcessgasFlame-less,lowtemperaturecombustion12ThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007Benefits1:Uniformtemperature•Flame-lesscombustion•Combustionatthewall•Heatradiationtothecenter•Lowtemperature~800oC•LowNOxemissions(10ppm)•UniformTemperature•Nohotspot,Nocoldspot•Combustorlengthof300mm=Longresidencetimeinahotenvironmentat800°C•HighDRE13ThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007Benefit2:Powderhandling-NoblockagesConstantflowofgas(Fuel+Air)acrossceramiclinerpreventpowderdeposition.Burnerstaysclean–Noblockages14ThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007Benefit3:NocorrosionOnlyceramicmaterialincontactwithhotgasesNocorrosionGreatersafetyGreateruptime800oCCeramicgasketPorousCeramiclinerCeramicpad15ThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007Benefit4:Safety•Outerwallofburneriscold(~40oC)•Safetotouch,noburninjury•O-ringsareusedincoldareaonly•Nometalpartincontactwithhotgas•VitoncanresistHFandHClbelow200oC•Burnerisleak-proof,Burnerstayleak-proof•NoriskofhotgasleakageThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007ATLASWetscrubbingsection17ThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007Wetscrubbingsection•C-PVCconstruction•Flameretardantplastic•Corrosion-resistant•Highefficiencyscrubbingperformance•Watersolubleby-products(HF,HCl…etc.)•Insolubleparticles(SiO2)18ThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007WetscrubbingsectionCyclonicde-mistingPackedTowerWatertankHeatexchangerCyclonicwaterfilteringWaterpumpsQuenchWeir19ThecontentofthispresentationisconfidentialandshouldnotbedistributedtoathirdpartywithoutpriorauthorizationfromEdwards.©EdwardsLimited2007Wetstage–CoolingsectionQuenchsectionWeir–section800oC50oC20Thecontentofthispresentationisconfidentialandshouldnotbedistributedtoathi