CIS系列化合物薄膜太阳能电池的制造工艺1

CdTeFirstSolar2008196MW161MW147MWQ-cells2009FirstSolar4180040.8%20089Q-Cell40.8%CdTeCdTeCdCuInSe2(CIS)CIS2007460MW/660MW/201171000MW/CISCISCIS2009“”20091116CIS„„¾¾¾„CIS¾¾¾-CdTeCdTeFirstSolar2008196WM,161WM147wm,Q-cells20094:Q-Cells(092)142-62FirstSolar(091)41816840.2%[phone].6%[phone](084265-5(091)14632.1%JAsolar(091)34-28(091)12121.7%-CdTe™CIS2007460WM/660MW/201171000MW/™CISWurthSolar200830MW/Q-CellsSolibro130MW/45MW/200990MW/22010135MW/.CIGSCIGS-GaAs,(AlGa)As,InP-CdTe--2CISCuInSe2,CuIn,GaSe2CuInS2TiO2,ZnOI-VCdTeCuInSe2(CIS)-105cm-1(Si100)CuGaSe2CuInS2Eg;1.1~1.5eVCISCdTe------™CISCdTe------------CIS™1974BellCdS/CIS(=12%)™1976MaineCds/2CISCIS+Se™1978BoeingSERI(NREL)DOE™1980BoeingZnO/(Cd,Zn)S/CIGS/Mo/10%™1986ARCO(SSI):ZnO/CdS/CIS(Ga/)/Mo/14%™1992Euro-CIS:MgF2/ZnO/CdS/CIS(Ga)/Mo/15%™1994NREL:MgF2/ZnO/CdS/CIGaS/Mo/16%™1995:NREL:MgF2/ITO/ZnO/CdS/CIGS/Mo/17%™CIGS:+™1996ZnO/Zn-In-Se/CIGS/Mo/14%ZnO-In-Se:ZnO/Zn-O-S/CIGS/Mo/14%ZnO-O-S:CBD™1998SSI:CISCIS------~1um~650·~20%¾¾¾CIGS-----CIGS-----//In/Cu-Ga()/Mo/Cu(In,Ga)(S,Se)2[CIGSS]Mo/CIGS-------1997.3.717.6%;24.8JETCIGS------CuInGaSe2MoMoSe2CIGS--Cu/Ga+InGa/Ga+In-180-18.4%18.5-18.9%19.0-19.3%FraunhofeNREL19%CIGS------1.Mo2.1P13.CIGS4.CdS5.2P26.ZnO7.3P38.CIGS------shellsolarShellsolarAVANCISWurthSolarMoDCDCDCDCCu(In,Ga)(S,Se)2Na()Cu(In,Ga)Se2Na()Cu(In,Ga)(S,Se)2RPTNa()Cu(In,Ga)Se2Zn(O,S,OH)CBDIn-SCBDCdSCBDi-ZnORFCdSCBDi-ZnORFTCOZnO:BMOCVDZnO:AlDCZnO:AlDCZnO:AlDCCISshellsolarShellsolarAVANCISNREL()Cu(In,Ga)(S,Se)2/Cu(In,Ga)Se2RPT/Cu(In,Ga)Se2Eff(%)13.613.119.9Jsc(mA/cm2)37.335.335.5VocV5715570.692FF0.6380.6670.810cm2345649380.419200520032008CuInSe2CuInSe2Cu-Se™CISCu™CuInSe2In-SeCu2Se-In2Se3N2CISCuCuInCu-SeIn-SeCIGS----Cu(In,Ga)Se2——In,Ga2Se3——™2In,Ga2Se3CIGS3CuInGaSe2™3CIS(In,GA)3Se5Cu.CuIn,Ga2Se3™CIGCCuIn2Se3CuIn5Se8CuIn3Se5In,Ga2Se3™In,Ga2Se3CuIn,Ga2Se3,(In,Ga2Se3CuIn,GaSe2112220CIS--™1CIS™2CIS™3CIS™CISSe(E0=+0.75V)Cu(E0=+0.34V)In(E0=-0.34V),™Ga(E0=-0.53V),In™Se+6+40-2-SoloPower()-™MoRTPCIGS™13.8%12.25%100cm29.6%1m2,103W:-ETH()-™Cu,In,Ga·()CIGS5%,6.7%.™:.CIGSETHCIGSMo-IBM-™(1)Cu,InGaCIGS(2)(3)CIGS121.4umCIGSCIGSIBMCIGS49010.1%JSC=24.6mA/cm2,Voc=590mVFF=0.71=0.45cm2-ISET-™CIS13.6%Mo13.0%10.4%9.6%198520CIS-NanosolarCIS-NanosolarCIGSCIS14%CIS-/-™NEDO™11umCIGS2CIS3Mo4CIGS5CIGSAl/n-ZnO:B/i-ZnO/CdS/CIGS/Mo/CISCIS