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1厦门工学院本科生毕业设计(论文)题目:利用CVD化学气象沉积法制备石墨烯的研究姓名:闫建林学号:1205101033系别:材料科学与工程系专业:材料专业年级:2012级指导教师:杨凤娟2016年月日2独创性声明本毕业设计(论文)是我个人在导师指导下完成的。文中引用他人研究成果的部分已在标注中说明;其他同志对本设计(论文)的启发和贡献均已在谢辞中体现;其它内容及成果为本人独立完成。特此声明。论文作者签名:日期:关于论文使用授权的说明本人完全了解厦门工学院有关保留、使用学位论文的规定,即:学院有权保留送交论文的印刷本、复印件和电子版本,允许论文被查阅和借阅;学院可以公布论文的全部或部分内容,可以采用影印、缩印、数字化或其他复制手段保存论文。保密的论文在解密后应遵守此规定。论文作者签名:指导教师签名:日期:3利用CVD化学气象沉积法制备石墨烯的研究摘要石墨烯是最新被研发出来的具有单层二维结构的纳米材料,石墨烯具有许多独特的性质,例如室温下体现出来的反常量子效应、高电子迁移速率、抗热传导率以及良好的机械性能,使其具有广泛的应用空间,2010年诺贝尔物理学奖说明曾指出,由石墨烯这种新型碳材料所引发的全球性的材料革命正在发生着。这就是石墨烯为什么被称为材料界未来之星的原因。但是我们要研究新材料的应用前景就必须从怎样制备出高质量的石墨烯入手,只有制备出具有较高质量的石墨烯,我们才能够对于他的特性进行分析。现在使用的制备石墨烯的主要方法,就是CVD化学气相沉积法,这种方法所生产出来的石墨烯有极大的质量和极大地生长面积。本文内容主要介绍了制备石墨烯的化学气象沉积法,并且通过改变载气氮气和甲烷的浓度,总结出了对于制备出具有质量高、面积大的石墨烯所需要达到的工艺条件和工艺要求,又利用氧化还原法做了对比试验,比较了两种工艺的优点和缺点。并且设想了以后石墨烯的发展方向。关键词:石墨烯,化学气象沉积,红外光谱,制备,氧化还原法,拉曼光谱,扫描电子显微镜4PreparationofgraphenebyCVD(chemicalvapordepositionmethod)AbstractGrapheneisthelatesttobedevelopedbythetwo-dimensionalnanomaterialshaveasinglelayerstructure,graphenehasmanyuniqueproperties,suchasroomtemperaturemanifestedanomalousquantumeffects,ahighelectronmobilityrate,thermalconductivityandgoodmechanicalproperties,ithasabroadapplicationspace,the2010NobelPrizeinNeo-bitinstructionshaspointedout,bythematerialsrevolutionofthisnewcarbonmaterialgraphenecausedaglobaltakingplace.Thatiswhythegrapheneiscalledthematerialssectorrisingstarsofreasons.Butweneedtostudyprospectsofnewmaterialsmuststartfromhowtopreparehigh-qualitygraphene,graphenepreparedonlywithhigherquality,wewillbeabletoanalyzehischaracteristics.Asthemainmethodforthepreparationofgraphene,CVDchemicalvapordepositionmethodhavetheattentionofthescientificcommunity,becausethismethodproducedgraphenesentencehasgreatqualityandgrowingarea.Thispapermainlydescribesthechemicalvapordepositionmethodforpreparinggraphene,andbychangingtheconcentrationofthecarriergasofnitrogenandmethane,aswellasdifferentgrowthsubstratetocomparetheoutforthepreparationofahighquality,largearealitergrapheneneededachieveprocessconditionsandrequirements,andwehaveaboldvisionforthefutureuseofthegraphenepreparedbyCVDmaybethedirectionofdevelopment.Keywords:graphene,chemicalvapordeposition,infraredspectroscopy,preparation,oxidation-reductionmethod,Ramanspectroscopy,scanningelectronmicroscopy5目录第一章绪论..................................................................................................................61.1研究背景.............................................................................................................61.2石墨烯的结构与性质.........................................................................................61.2.1石墨烯的结构........................................................................................61.2.2石墨烯的性质.........................................................................................81.3制备石墨烯的常用方法...................................................................................111.3.1化学及液相剥离法...............................................................................111.3.2氧化还原法...........................................................................................111.3.3SiC外延生长法....................................................................................121.4对制备出石墨烯的转移...................................................................................121.4.1理想的石墨烯转移技术的特点..........................................................131.4.2典型的石墨烯转移技术......................................................................131.5研究内容...........................................................................................................14第二章石墨烯的CVD化学气相沉积法制备实验.................................................152.1化学气相沉积法制备石墨烯的研究历程.......................................................152.2CVD工作原理..................................................................................................162.3实验药品和设备...............................................................................................162.4对衬底的预处理...............................................................................................192.5石墨烯的生长过程...........................................................................................192.6比较实验利用Hummer法氧化还原石墨烯..................................................212.7总结...................................................................................................................24第三章对石墨烯样品的主要性能表征....................................................................253.1原子力显微镜(AFM)..................................................................................253.2扫描电子显微镜...............................................................................................283.3XRD表征..........................................................................................................30第四章关于本次实验及论文的总结........................................................................32参考文献......................................................................................................................33致谢辞........................................
本文标题:利用CVD化学气相沉积法制备石墨烯的研
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