过滤精度和清洁度水平关系

AppendixD62...TargetCleanlinessLevelsComponentsRecommendedFiltrationServoValves•••ProportionalValves•••VariableDis-placementPumps•••CartridgeValves•••PistonPumps•••VanePumps•••Pressure/FlowRateControlValves•••SolenoidValves•••ISOCode12/10/713/11/814/12/915/13/1016/14/1117/15/1218/16/1319/17/1420/18/15NASCode123456789AbsoluteFiltrationRecommended3µm6µm10µm10µm