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InvestigationandResearchMicroManufacturingandMicroSystemsMicro-Manufacturing01Micro-Manufacturingfeaturescanbedividedintothreecategories:1~10mm,1μm~1mmmicro-mechanmicro-mechanicalical,1nm~10μmnano-machinery.Micro-fabricationismanufacturingconductedinsizeofthehorizontalmicrometerornanometer.MicrofabricationmachinesMicronprocessingThemicro-millingprocessisaversatileandconvenientprocessformanufacturingthree-dimensionalmicrostructures.Micro-drillingismainlydrillingmicron-sizedholes.Micro-millingmachineDrillbitsformicro-drillingmachinesNanotechnologyNanodevicesanddeviceshavetheadvantagesofgreen,small,efficientandresource-saving.10nmprocesschips(Snapdragon835)Superhydrophobicnano-materialsNanotechnologyhasbeenusedinmanyareas,includingautomotive,aerospace,householdappliances,sportinggoods,telecommunicationsequipmentandmedicalsupplies.NanoscalerobotsforcancertreatmentNanogearsCarbonnanotubesareconsideredtobeexcellentmaterialsduetotheiruniquemechanical,electronicandchemicalproperties.Carbonnanotubescanbeusedinelectronicequipment,supercapacitors,lithium-ionbatteries,fieldemissionimaging,fuelcells,actuators,chemicalandbiosensors,andelectronicsources.CarbonnanotubesCarbonnanotubesCarbonnanotubesolarcellsMicrochannelheatexchangershavebeenappliedanddevelopedintermsofheattransfer.Theuseofthismicrochannelheatexchangercanproduceacompact,reliable,powerful,portabilityandhigh-throughputmicro-scalecombustionsystem.MicrochannelheatexchangerNano-dressingisaprocessthatcanprovideadvancedmaterialmolding.Nano-dressingofthetubeMicroSystems02Microsystembasedonmicron-scaletheory,withthewholesalemicroelectronicstechnologyandthree-dimensionalprocessingtechnologytocompletetheinformationacquisition,processingandimplementationfunctions.Microsystemsaresystemsthatintegratemicroelectronicsandmicromechanics.Applicationofmicro-systeminmicro-robotMicroelectronicdevicesMicro-weldingCPUtechnologydevelopmentprocessMicro-systemisashortresponse,fast,highprecisionsystem.Micro-electromechanicalsystems(MEMS)havebeenusedintheautomotive,aerospace,chemical,pharmaceutical,manufacturing,defenseandenvironmentalmonitoringareas.MEMSisinvolvedinthemainaspectsofmicro-processingmethods,micro-sensors,actuators,magneticMEMS,radiofrequency(RF)MEMS,microfluids,bio-MEMSandmicroelectromechanicalsystems.RFMEMSapplicationsThankyou