光学系统偏心测量原理及应用

319985OPTICALTECHNOLOGYNo.3May1998王肇勋(,130022):,,,,:,PrincipleandapplicationofthemeasurementofthecenteringerrorsinopticalsystemWangZhaoxun(ChangchunInstituteofOpticsandFineMechanicsChangchun130022)Abstract:Thedevelopmentoutlineandtheup-to-datelevelinthemeasurementofthecenteringer-rorsinopticalsystemsissummarized.Withbrieflyintroducingtheprincipleofmeasuringthecentreingerrorsintheopticalsystemandtransformationofitisbasicaxis,someoftheproblemsappearedisdis-cusses.Additionally,thispaperintroducessomeapplicationsofthemethodofmeasurementandpointsoutsomequestionsandskillwhichshouldbeconsidered.Atlastsomeexamplesinmeasurementpracticesformanyyearsarepresented.Keywords:centeringerror,measurement.,,,,,,,,,1,1(1,2,3,F),,,,OO1=1/2N1OO2=[1/2N2-(1-M2.1)OO1]/M2.1OO3=[1/2N3-(1-M2.1)OO1-M3.1(1-M3.2)OO2]M3.1õM3.2OOF=[1/2NF-(1-MF.1)OO1-MF.1(1-MF.2)OO2-MF.1õMF.2MF.F-2(1-MF.F-1)OOF-1]/MF.1õMF.2õMF.F-1OO1OO2OOFMijijN1,N2NF,67,Ni;,Ni,,,,,,,,,:,,,,,,,,,,,,,,,,,,2:[(W1OO1X)2+(W2OO2X)2(WFOOFX)2][(W1OO1Y)2+(W2OO2Y)2(WFOOFY)2]W1WF,,,Wi,Wi=1/Ci,Ci,,Wi=1/ri2:1984450mm,,,,,,,,,;,,,,,,15,,,:,,,,,,6819985,,,,,,,,,,,1988,:F,,,,,,,(23),3,,,3,,1X40NA0.6　　　　　　表1　某胶合物镜偏心测试结果(mm)(mm)nd(Lm)()(Lm)()-39.1729.3823.2441.74681.41.80600.21000.96.30.21.40.65.30.21.8,0.5,0.5PC-1500,,BASIC,,,,,:10,,[5],,,,,,:(1),,;(2),,,,,;(3),21Lm25Lm,1.328,6.7,0.47Lm16.75Lm,0.3629.63,4.2(下转第77页)693:,,8h,,,2,,,8h,4355,5125mm,,0180360,,2:R1440mm,0.0016mm,0.73;R2131.069mm,0.0004mm,0.58;R377.361mm,0.0001mm,0.15;R4216.73mm,0.0003mm,0.311..“Ÿµ¨,1994,32(8):43462,.,,1996,25(2):76813,..,1996,32(3):594,,..,1996,17(4):42455,,..,1996,(4):4447(上接第69页)表2　某10倍投影光刻物镜偏心要求及装配结果(mm)(Lm)(Lm)()()116521.112.51.3926721.136.23.50320420.962.00.9747020.565.91.65582153.861.30.97613622.023.03.05735442.012.31.17823223.691.83.2996710.513.11.591012532.065.03.4111386104.045.32.161216841.514.91.86133820.5110.72.73142610.477.83.66156372016.756.55.42164321.529.77.36173900256.811.30.36186330.819.92.781912164.4710.37.63204466.3328.129.632128364.754.43.46225331.0811.74.2123209104.299.94.24,0.851120/mm,1060/mm,:300/mmMTF52.2400/mmMTF45.2500/mmMTF38.5600/mmMTF31.8,(GCA4800-005),1.25Lm1Lm1AIngalls,Pestrecov.CenteringofOpticalSystems.J,Opt.Soc.Am.1948(38):3432.ÌӚNH(16).“ÓŸ¨,1982(5):44473..,1980(1):1-114,.().,1984(5):32-405WolfgangEmmerich,ChristianHofmann.HightechnologyinOptics-prerequisiteforhightechnologyinmicro-elec-tronics.JR,1986(4):193-1966.DIN3140.Tell9,1978773: