电子显微镜入门手册(FEI)

nanananananananananananonononononononononoteteteteteteteeteteeechchchchchchchhnononononononololololololololllllgygygygygygyyygygyܹ䮼ۉጱ၂ྲ৥EM200ISBN978-0-578-06276-1(TheresPlentyofRoomattheBottom).............................................2..............................................................3.......................................9.....................................20............................26DualBeam™......................................28...................................................32........................................................342219591229·(RichardFeynman)(Caltech)(There’sPlentyofRoomattheBottom)2009501001000.05nm20FEI20301949EM100FEIFEI(There’sPlentyofRoomattheBottom)·19591229(Leeuwenhoek)··550mikrosskopeo17··(AntonyvanLeeuwenhoek)(1632-1723)·400•0.2mm0.2mmLCDErnstRuska4©TUBerlin(7μm)(100μm)LM1000200nm100nm202010ErnstRuska1931(TEM)1986100nm0.05nm4000400TEM(1pm=10-12m)(400-700nm)10wavelengthgoodresolutionpoorresolutionwavelengthhighfrequencylowfrequency5lightsourcespecimenobjectivelensGa+LMIsourcelens1extractorscan&stigoctopoleslens2lightbeamelectronsourceelectronbeamscan&stigcoilslens3specimen(thick)electronbeamimpactareasecondaryelectronscollectorsystemvacuumturbo/diffpumproughinglinefirstcondenserlenscondenserapertureprojectionchamberfluorescentscreenelectronsourceSEMTEMlightmicroscopeFIBsecondcondenserlensobjectivecondenserlensspecimen(thin)minicondenserlensobjectiveimaginglensdiffractionlensintermediatelensfirstprojectorlenssecondprojectorlensturbo/diffpumproughinglinesuppresseroctopolealignmentblankingplatesblankingaperturespecimen(thick)ionbeamimpactareasecondaryelectronsorionscontinuousdinodedetectoranodegunaligncoilslens1lens2objectiveapertureselectedareaaperture180016objectivelenscondenserlenslightsourceprojectorscreenslidefluorescentscreenslideprojectorTEMspecimen(thin)apertureelectronbeamobjectivelenscondenserlenselectronsource2MaxKnoll1935ManfredvonArdenne1937(SEM)1942ZworykinHillierSnijder50nm1nm1Titan™80-300(nanobridge)7TEMSEM(STEM)ManfredvonArdenne1938PhilipsEM200(PhilipsElectronicInstruments)OngSingPoenSTEM196925nmSTEMTEMSTEM0.05nm(FIB)SEM(Ga+)FIBFIBFIBSEM(FIB/SEM)FEIDualBeam™FIB/SEMSEM2000nm(10–9)μm(10-6)1000nmÅngström,Å0.1nmmicron(10-12)810-2(1cm)10-3(1mm)10-6(1μm)10-5(10μm)10-8(10nm)10-10(0.1nm)antAntonyvanLeeuwenhoek1632-1723ErnstAbe1840-1905RobertHooke1635-1703ErnstRuska1906-1988plantcellanimalcellyeastvirusproteincomplex200nm1000(200nm)(0.2mm)39Titan™80-300Al-Cu-Li-Mg-AgSTEM/0.5μm10TEMspecimen(thin)condensersystemobjectivelensprojectorlenselectronsource(LaB6lab6)(FEG)1000LaB6Wehnelt2700°C2000Wehnelt4).LaB6LaB610LaB611anodeelectronbeamWehneltcylinderfilamentfilamentsourcehighvoltagegenerator600080kV150,000/(1.5x108m/s)300kV230,000/(2.3x108m/s)λhpm0eUvc10kV12.3x10-12m(12.3pm)200kV2.5pm10(1pA=10–12A)1/1.6x10–196000200,000/3XSchottkySchottkySchottky(FEIXFEG)4-55-10LaB6104HIV12••••••XX••5(C)(P)6):(Cs)(Cc)TEMSTEMOttoScherzer1947CCCCPPPPelectronbeam5CP13Tecnai™F20Titan™TEMds=1/2CsĮ3dc=CcĮ(¨E/E0)6CsCc300kVSi110CsHR-TEM14CCDCCDCCD1510-8Pa(ETEM)ETEMETEM(EFTEM)EFTEMEFTEMX760760(Pa)(SI)torrmbar=1bar=1000mbar=100000Pa=760torr=7602.5x10–5Pa7x101216XYZXYZ17320nm300-500nm0.5μm3mm0.1μm(LACBED)18vitrobot(Vitrobot™)3mm0.3mm(0.1μm)(FIB)19CATMRISPASPASPASPA20SEMelectronsourceelectronbeamscan&stigcoilslens3anodegunaligncoilslens1lens2specimen(thick)electronbeamimpactareasecondaryelectronscollectorsystemvacuumturbo/diffpumproughingline1nm(SE)21600FEIQuanta™••50-30000•••(BSE)•X•••STEMSEBSESEBSEX(eV)X22SEBSEX-ray1kV1EBIC1nm1kVX7SEXBSESESTEMXBSE232000=0.25mm2000nm(2μm)250,000H2O0°C600Pa4.6torr4.6mm650-1300Pa(5-10torr)50eV8BSEBSESE24(ESEM)ESEM9)/ESEMX1-10nm25cascadeamplificationgaseousenvironmentssecondaryelectronsprimaryelectronbeamsignalamplificationintheESEMdetector9ESEMXYZXY50300360STEMSTEMXX26STEMSTEMXSTEM0.05nmSTEMSTEM(SE)STEM(BSE)STEM(HAADF)BSEHAADFZXXXX(EDX)X100nmSTEM10-20nmSTEMXÅngstromX10-12XXXXXFEITecnaiOsiris™27XXXXXXX1X(WDX)XXXWDXEDXXX(EELS)EELSSTEM282820002501(FIB)FIBFEIDualBeam™FIB52°FIBDualBeam™1nAv2aEEIBmilling-002FIBFIB29FIB/FIB(LMIS)LMISZnOFIB(LMIS)30Taylorcone1000Å100ÅSEMFIBBoersch1110DualBeam™52°FIB520-301LMIS100//FIB50LIMIS31(ALU)LMISLMISFEI1000FEI3232XNMREM(MEMS)FIBDualBeamS/TEMS/TEM33–-(nanocharacterization)STEMTEMDualBeam(EBSD)X(EDSX)TEM(EFTEM)nanoprocessesESEMETEMnanoprocessesnanoprototypingNanoprototyping34(SEM,FIB)(TEM)(Ångström)10.1nm29890°()EDXXEDSXXXEELS(FIB)ESEM35ETEMX/XFEGFIB(DualBeam)FIBSEMLMIS1(μm)(10-6m)1000nm1(nm)(10-9)360°36SEMSTEMTEMWDXXXWDXXWehneltXX10-0.01nmXFEIDanielBeniacPublicHealthAgencyofCanadaLyubovBelova,RoyalInstituteofTechnologyRandyBurgess,HewlettPackardCliffordBarnesUniversityofUlsterLauraTormoCifuentes,MuseoNacionaldeCienciasNaturales-CSICPhilippeCrassous,IfremerAngelaDiFiore,RJLeeGroup,IncChristianGspan,InstitutfürElektronenmikroskopiePaulGunning,Smith&NephewFransHolthuysen,PhilipsResearchJimItoYorkhillHospitalGlascowScotland,UKWann-NengJane,AcademiaSinicaCraigJohnsonAvigailKellerC.KisielowskiNCEM,UCBerkleyAlexeyKolomiytse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