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EquipmentforElectronicProductsManufacturingEPE176Sept．20091222(1，610054；2，400060)：，，。、。，。：；；12：TP393.06：A：1004-4507(2009)09-0010-04TheoreticDiscussiononTwelethErrorsModuleofVectorNetworkAnalyzerHUANGBing,WEIQiang,YANGKeyong,YIJunling(ChinaNavyForceMilitaryRepresentativeOfficetochendgduDistrict,Chengdu610054,ChinaSichuanInstituteofPiezoelectricandAcousto-opticTechnology,Chongqing400060,China)Abstract:StartingwiththemeasurementstructureoftheVNA,thispaperanalysessourceoferrorsandtheirdescriptions,introducesthebasictheoriesoferrorcorrection.Formulasofcalibrationmeth-odsarealsoproved.Thenwebuildexperimentalonwidebandlowlossdeviceundercalibrationandnon-calibrationconditions.Atlast,thisdissertationpresentscalibrationresultsanddiscussions.Keywords:VectorNetworkAnalyzerErrorCorrection12-ErrorsModule：2009-08-25、。、、、、。11、、。S11XS21X1··10EquipmentforElectronicProductsManufacturingEPE176Sept．20092。1213。S11XAR。S21XBR。S22XS12X2。2。。2。30dB(15dB)16dB24.5～48.9dB。3。(1)。A(2)。(3)。(4)。。3Mason412。EDFEDREXFEXRESFESRELFELRETFETR1232121ABR1()=-20×log[0.0316±(0.178)(0.158)]=-20×log[(0.0316±(0.028)]=24.5dB(-5.5dB).48.9dB(+18.9dB)14bB=300dB(0.0316)=16dB(0.158)=15dB(0.178)RABDUT3RFEXFS21X1FDFFSFS11XS22XELFETFS11XS12XS21XERPS12XELRS11XS22XESRETR1S12XRFS22XEXR4··11EquipmentforElectronicProductsManufacturingEPE176Sept．2009ERFERR。“D”direction“F”(Forward)“R”(Reverse)。12MasonSM,SSX12S11M、S21M、S12MS22MS11X、S21X、S12XS22X“”SS11X、S21X、S12XS22X1212S。312SOLT、、、。－11001。12。①S11S11X=S21X=S12X=S22X=0M1=S11=EDF②S11S11X=S22X=-1S21X=S12X=0M2=SS11M=EDF+(-1)ERF1-(-1)ESF③S11S11X=S22X=1S21X=S12X=0M3=So11M=EDF+(+1)ERF1-(+1)ESF④S21S11X=S21X=S12X=S22X=0M4=S21=EXF⑤S21S11X=S22X=0S21X=S12X=1M5=ST21M=EXF+ETF1-ESFELF⑥S11S11X=S22X=0S21X=S12X=1M6=ST11M=EDF+ELFERF1-ESFELF⑦S22S11X=S21X=S12X=S22X=0M7=S22=EDR⑧S22S22X=S22X=-1S21X=S12X=0M9=S022M=EDR+(+1)ERR1-(+1)ESR⑨S22S11X=S22X=1S21X=S12X=0M9=S022M=EDR+(+1)ERR1-(+1)ESR⑩S22S11X=S21X=S12X=S22X=0M10=ST12M=EXR11S12S11X=S22X=0S21X=S12X=1M11=ST12M=EXR+ETR1-ESRELR12S22S11M=EDF+ERFS11X(1-ELFS22X)+ELFERFS21XS12X1-ESFS11X-ELFS22X-ESFELFS11XS22X+ESFELFS21XS12XS21M=EXF+ETFS21X1-ESFS11X-ELFS21X-ESFELFS11XS22X+ESFELFS21XS12XS22M=EDR+ERRS22X(1-ELRS11X)+ELRERRS21XS12X1-ESRS11X-ELRS22X-ESRELRS11XS22X+ESRELRS21XS12XS12M=EXR+ETRS12X1-ESRS11X-ELRS22X-ESRELRS11XS22X+ESRELRS21XS12XS11X=S11M-EDFERF1+S22M-EDRERRESR!-S21M-EXFETF!S12M-EXRETR!ELF#$DS22X=S22M-EDRERR1+S11M-EDRERF!ESR-S21M-EXFETF!S12M-EXRETR!ELR%&ERFS21X=S21M-EXRETR!1+S22M-EDRERR(ESR-ELF%&)DS12X=S12M-EXRETR!1+S11M-EDFERF(ESF-ELR%&)DD=1+S11M-EDFERFESF!1+S22M-EDRERRESR!-S21M-EXFETF!S12M-EXRETR!ELFELR··12EquipmentforElectronicProductsManufacturingEPE176Sept．2009S11X=S22X=0S21X=S12X=1M12=ST22M=EDR+ETRERR1-ESRELR1212。EDF=M1ERF=2(M1-M2)(M3-M1)M3-M2ESF=M3+M2-2M1M3-M2EXF=M4ELF=M6-M1ESF(M6-M1)+ERFETF=(M5-M4)(1-ESFELF)EDR=M7ERF=2(M7-M8)(M9-M7)M9-M8ESF=M9+M8-2M7M9-M8EXR=M10ELR=M12-M7ESF(M12-M7)+ERFETR=(M11-M10)(1-ESRELF)1212S11X、S21X、S12XS22XS11M、S21M、S12MS22M“”S11X、S21X、S12XS22X。12。45、。AgilentE5071B160115kHz。0.000-200.om-400.om-600.om-800.om-1.000-1.200-1.400-1.600-1.800-2.000Tr1S21LogMag200.OmdB/Ref-1.000dB[F2D&M]Tr2S11LogMag10.00dB/Ref0.000dB[F2D&M](a)Tr1S21LogMag500.OmdB/Ref-22.75*dB[F2D&M]Tr2S21Delay10.00ns/Ref2.000lu*s[F2D&MSmo]-21.25*-21.75*-22.25*-22.75*-23.25*-23.75*-23.75*-24.25*-25.25*-25.75*-26.25*170.000000MHz-22.874dBBW:3347005800MHzCent:7008398700MHzLow:5334895800MHzHigh:8681901600MHzQ:2.0939Toss:-22874dB(b)5(a)0.4dB1dB。5(b)10ns。5。ECal。。：[1].[M].2008.[2][M].2006.[3].[D].2005.[4].[J].E[J],2004343329-336.[5]SilvonenKJ.Calibrationoftestfixturesusingatleasttwostandards”.IEEETransMicrowaveTheoryTech,1991,39(4):624－630.[6]ZhuNH,QianC,WangYL,etal.Frequencylimitationinthecalibrationofmicrowavetestfixtures[J].IEEETransMicrowaveTheoryTech,2003,51(9):2000-2006.5··13