柔性铰链相关外文翻译

外文翻译毕业设计题目：柔性铰链微运动的测量与控制方法原文1：APrecisionCapacitanceCellforMeasurementofThinFilmOut-of-PlaneExpansion–PartIII:ConductingandSemiconductingMaterials译文1：一种精密电容测量薄膜平面扩张的第三部分：导体和半导体材料原文2：Circularareflexiblehingestiffnesscharacteranalysis译文2：圆弧型柔性铰链刚度特性分析APrecisionCapacitanceCellforMeasurementofThinFilmOut-of-PlaneExpansion–PartIII:ConductingandSemiconductingMaterialsAbstract—Thispaperdescribestheconstruction,calibration,anduseofaprecisioncapacitance-basedmetrologyforthemeasurementofthethermalandhygrothermal(swelling)expansionofthinfilms.Itisdemonstratedthatwiththisversionofourcapacitancecell,materialsranginginelectricalpropertiesfrominsulatorstoconductorscanbemeasured.Theresultsofourmeasurementsonp-type100-orientedsinglecrystalsiliconarecomparedtotherecommendedstandardreferencevaluesfromtheliteratureandareshowntobeinexcellentagreement.IndexTerms—Capacitancecell,coefficientofthermalexpansion(CTE),guardedelectrode,highsensitivitydisplacement,innerlayerdielectrics,polymers,thinfilms.I.INTRODUCTIONTHEcoefficientofthermalexpansion(CTE)isakeydesignparameterinmanyapplications.Itisusedforestimatingdimensionaltolerancesandthermalstressmismatches.Thelatterisofgreatimportancetotheelectronicsindustry,wherethermalstressescanleadtodevicefailure.Foraccuratemodelingofthesesystems,reliablevaluesareneededfortheCTE.Traditionally,displacementgaugetechniquessuchasthermomechanicalanalysis(TMA)havebeenutilizedfordeterminingtheCTE.However,standardtestmethodsbasedonthesetechniquesarelimitedtodimensionsgreaterthan100mm[1-2].Thisisproblematicformaterialswhichcanbeformedonlyasthinlayers(suchascoatingsandcertaininnerlayerdielectrics).Additionally,thereissomequestionastowhethervaluesobtainedonlargersamples(bulkmaterial)arethesameasthoseobtainedforthinfilms,evenwhentheeffectsoflateralconstraintsareincludedinthecalculations.Ithaslongbeenrecognizedthatcapacitance-basedmeasurements,inprinciple,canofferthenecessaryresolutionforthesefilms.Forapairofplane-parallelplatecapacitors,ifthesampleisusedtosetthespacingoftheplatesdwhilebeingoutsideofthemeasurementpath,thenforaconstanteffectiveareaoftheplatesA,thecapacitanceinavacuumvacCisgivenbythewell-knownequationdACvac0(1)where0isthepermittivityoffreespace(mpF854.80).Withthesampleoutsideofthemeasurementpathandonlyairetweentheelectrodes,thevacuumcapacitanceisobtainedromthemeasuredcapacitanceCbyairvacCC(2)whereairisthedielectricconstantofair.Inthreepreviouspapers,thedesignanddatareductiontechniqueswerepresentedforourthree-terminalcapacitance-basedmetrologyforthinpolymerfilmmeasurements.Thefirstpaper(I)describedtheinitialdesignbasedongold-coatedZerodur.However,severalproblemswereencountered.ItwasdiscoveredthatZerodurdisplaysferroelectricbehavior,withanapparentCurietemperatureof206℃asdeterminedbyfittingwithaCurie–Weisslaw.TherapidchangeinthedielectricconstantoftheZeroduralongwithacouplingfromthecentralcontactthroughtheguardgaptothehighelectrodecreatedanapparentnegativethermalexpansion.Thesecondproblemwiththeinitialdesignwaswiththegoldcoating.Thiscoatinghadthetendencyto“snowplow”whenscratchesformedinthesurfacecreatingraisedareaswhichwouldresultinshortswhenmeasurementswereperformedonthinsamples.Thesecondproblemwiththegoldwasthatitunderwentmechanicalcreepunderloading.Toresolvetheseproblems,anewelectrodewasdesignedfromfusedquartzcoatedwithnichrome.Agroovefilledwithconductivesilverpaintwasaddedtothebacksideofthebottomelectrodearoundthecentralcontacttointerceptanyfieldlinesbetweenthecentralwirecontactthroughtheguardgaptothehighelectrode.Thenewdesignwasdescribedinthesecondpaper(II)alongwiththermalexpansionmeasurementson0001-orientedsinglecrystalsapphire(32OAl)anda14-mthickinnerlayerdielectricmaterial[10].ItwasrecognizedinIIthatthedatareductionwassimpleaslongastheairfillingthegapbetweenthecapacitorplateswasdry.However,toexpandtheutilityofthecapacitancecelltohygrothermalexpansion(i.e.,swellinginahumidenvironment),thethirdpaper(III)describedthedatareductiontechniquesnecessaryforuseofthecapacitancecellunderhumidconditions.Fig.1.Schematicoftheelectrodes.Notethattheshadedareascorrespondtothenichromecoating.TheresolutionoftheinstrumentwasdeterminedinIIandIII.Fordry,isothermalconditions,thecapacitancecellcanmeasurerelativechangesinthicknessontheorderof710,fora0.5-mmthicksample;thiscorrespondstoaresolutionontheorderofm11105.Underdryconditionsinwhichthetemperatureischanged,thereproducibilityofarelativethicknesschange(e.g.,forCTEmeasurement)isontheorderof610.Finally,underhumidconditions,theultimateresolutionisprimarilyafunctionoftemperature—theactualvaluesofwhicharegiveninIII.InII,adeficiencywasrecognizedinthedesign.Neithersemiconductingorconductingmaterialscouldbeusedasthematerialfortesting.Thiswasespeciallythecaseforsilicon,whichformsaSchottkybarrierwithnichromeandactsasavoltagerectifier.Additionally,becauseofthenatureoftheinterface,the1kHzmeasurementfrequencygeneratesultrasoundwhichresultsintheepoxycontactsbeingshakenloose.WementionedbrieflyinIIthatifthetopelectrodehadaguardringadded,thesamplecouldbeheldat