管b标准作业b程序1

爐11.爐立了LCD了2.:切離狀例漏力23.綠亮行亮4.1175671012111682934131415311920212218233242526272829301.狀例RunStopPause狀2930,狀2.3.4.行5.行6.行25”Program”7.WindowsXP8.9.行10.度(度)11.度(度)12.度(度)13.度14.度15.度16.爐17.行數(連數)18.(TEOS說例說)19.20.流量21.流量22.流量23.(DigitalOutput)24.25.26.Profile()27.Service()28.行(量)29.行30.行31.度SpikeTC度ProfileTC度TEOS流量TEOS度TEOSTEOS路力參參參41.Wet-Bench2.行爐3.行爐爐“Locked”5.“Continue”來”Park”狀unload復Stand-By狀行6.Unload來復Stand-By行Boat若5~10冷易Boat57.Boat冷(Paddle)(Boat)(Baffle)8.度量25不(1)亮率爐(2)爐BOAT-OUT9.6(Paddle)10.“Program”行來行留行行11.行“Start““Yes“行了12.爐錄RUNNumber….料13.行BigPUMP離BoatLoader切離行14.15.BoatBoat-Out冷16.量度17.18.719.Stand_By“Program”,”Stand_Byinx00oC“來留行行20.行“START““yes“行了21.行”Stand_Byinx00oC”離22.N&K量度爐錄度狀23.爐24.爐行爐“Locked”度8SupervisorPC1.SupervisorPC12341.zLoadfileSupervisor()讀zTerminalFileTerminal()讀zActualdataScanTerminal料zHistoryScanTerminal料SupervisorHistoryzcommunicationSupervisorTerminalzAbout行Supervisor理理2.爐3.zGraphs歷料Run來zOverview爐zEvens爐錄料Run來zPrograms爐行行爐()zService參數()92.GraphsRUN料(1)AboutAccess(2)student123410(3)(4)No.1度111度力1000MFCGasSiH4N2_HN2_LTube01(top)Poly-SiMax.flows300sccm5slpm500sccmGasDCSNH3N2_HN2_LTube02NitrideMax.flows200sccm500sccm5slpm500sccmGasTEOSO2N2_HN2_LTube03TEOSMax.flows138sccm1slpm5slpm500sccmGasGeH4SiH4N2_HN2_LBank-ITube04SiGeMax.flows60sccm300sccm5slpm500sccmGasN2O2H2N2OTube05(top)Wet/DryoxideMax.flows20slpm10slpm20slpm10slpmGasN2O2Tube06Drive-inMax.flows20slpm10slpmGasN2O2Tube07P+AnnealMax.flows20slpm10slpmGasN2FG(5%H2inN2)Bank-IITube08H2-SinterMax.flows20slpm10slpm(5)No.2ZoomReset狀212(6)若No.3BatchnumberFilterOFF..年FilterON狀13(7)滑沈3DCSNH3沈沈3.ProgramRUN1.1RUN2.2Program列LocalFile()Open3.Open便12144.列TerminalFileSave5.若RewriteOK156.3List料料7.4行8.若5show/edit若RUN6AtivateinOven復ProgramName(RUN狀不)456316(1)爐(T5WetOxide例)1.StandBy狀不2.Loading1度BOAT-IN3.N2Purge爐爐(力裂)4.Loading2度BOAT-IN(力裂)5.StabN2復度(7001000度力裂)6.TempRamp度(N2)7.TempStable度(N2度)8.OpenO2量9.PurgeH2LineN2路10.RampH2量N2N2流量11.StabFlame度12.WetOxide13.DryOxide量H2度14.AnnealOxide裡Defect15.Rampdown降度(BOAT-OUT度降度700)16.Unload1度BOAT-OUT來(力裂)17.N2Purge爐爐(力裂)18.Unload2度BOAT-OUT來19.Cooling冷來20.End爐見1.若Step9~Step12ABORT理:H2爐裡律Step13(DryOx)爐17(2)爐(T4PolySi例)1.StandBy狀不2.Loading1度BOAT-IN3.N2Purge爐爐(力裂)4.Loading2度BOAT-IN(力裂)5.SmallPump路(流Particles)(爐利)6.BigPump路7.PProcpump良度8.TempRamp度(N2)9.TempStable度(N2度沈)10.PumpdownN211.LeakTest漏爐漏12.PressureStable力沈13.Deposition沈14.Pump1沈爐15.N2Purge1爐離16.Pump2沈爐17.N2Purge2爐離降度18.BackFill1量(流)19.BackFill2量20.TestVacuum力力利BoatOut21.Unload1度BOAT-OUT來(力裂)22.N2Purge爐爐(力裂)181923.Unload2度BOAT-OUT來24.Cooling冷來25.End爐見1.行Step5(SmallPump)ABORT爐Step4(Loading2)來行2.行Step11(LeakTest)ABORT爐漏爐3.:若Step13ABORT理:SiH4爐裡律Step14(Pump1)爐爐行狀裡若行切理理不行爐