徳徳In-LabTestingStepsVacuumTestTestTestmHeatingTestMechanicalTestUltimateMaximumTemperatureTemperatureStabilityPumpingspeedRotationandrevolvingPositioningcontrolSputteringCapabilityTestGasFlowControlWorkingPressurecontrol0501001502002503000.02.0x1024.0x1026.0x1028.0x1021.0x1031.2x1031.4x103Resistance(O)Temperature(K)x=0.033x=0.014x=0.048x=0.062x=0.024(GaMn)Asx=1.4~6.2%-5-4-3-2-10123451.50x1021.55x1021.60x1021.65x1021.70x1021.75x102Rxx(O)B(Tesla)T=4.2KT=25KT=50KT=75KB?planex=0.0240204060801001201400.05.0x1011.0x1021.5x1022.0x1022.5x102Rxx/(Rxy/B)Temperature(K)10529Ax=0.014Tc=54KCurie-WeissLawFit