采用MEMS技术高选择性_电子调谐式低温滤波器

EquipmentforElectronicProduactsManufacturingEPEErivM.Prophet,JurgenMusolf,BettyF.Zuck,SilverioJimenez,KennethE.Kihlstrom,BalamA.Willemsen(SuperconductorTechnologiesInc.,SantaBarbara,CA93111USA)Highly-SelectiveElectronically-TunableCryogenicFiltersUsingMonolithic,Discretely-SvitchableMEMSCapacitorArraysErivM.Prophet,JurgenMusolf,BettyF.Zuck,SilverioJimenez,KennethE.Kihlstrom,BalamA.Willemsen(SuperconductorTechnologiesInc.,SantaBarbara,CA93111USA)Abstract:AlowlosselectronicallytunablefilterwasdemonstratedusingHTS/AuMEMSswitchedcapacitorarrays.Thetwo-polefilterwastunedbysimultaneouslyvaryingthecapacitanceofeachresonatorbyequalamounts.AKfactorofbetween3,500and5,000wasdemonstratedforsinglepoleresonators.Thetotaltuningrangewasabout25%withanaverageQof7,000at77K.Keywords:Cryogenicelectronics,Filters,Microelectro-mechanicaldevives,Circuitsanddevices.EquipmentforElectronicProduactsManufacturingEPEEquipmentforElectronicProduactsManufacturingEPEEquipmentforElectronicProduactsManufacturingEPEEquipmentforElectronicProduactsManufacturingEPEEquipmentforElectronicProduactsManufacturingEPEEquipmentforElectronicProduactsManufacturingEPEnnFckpkpFc1