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:2003-04-07:2003-05-22,,(,361005):,MEMS,300,:;;;MEMS:TP212:B:1002-1841(2003)09-0008-02HigeTemperaturePressureMicrosensorBasedonModelIdentificationZHANGDan,FENGYong2jian,ZHENGZhi2xia(Dept.ofMechanicalandElectricalEngineering,XiamenUniversity,Xiamen361005,China)Abstract:Measuringinhightemperatureisaproblemindireneedofsloving.Akindofhightemperaturecapacitivepressuremi2crosensorbasedonmodelidentificationisintroduced.ThemicrosensorismadeofRCsignalfilterandsignalmodelidentification.Cangetacapacitorafterinspiringthefilterandmodelidentification.Itcanworkinaconditionlessthan300.Thehightemperaturemeasuringsystemwithhighprecisionavoidsthetroubleofamplifyingsignalinhightemperature.KeyWords:ModelIdentification;HighTemperature;PressureSensor;MEMS1,PN,100,PN,,2080,200,100,300-,PN,,,-350.,-,SOI()[1]SOS(),,4:;;MOS;,,,,,,,,[2]MEMS,MEMS,300;,22.1,,,MEMS,,,,,2.2,MEMS:[3]C=(S/d),=818510-11,,C=50pF,S=r2,d=115m,S=81474610-7m2,r=0152mmR=(1/S),,=101526310-5cm,R=1000,0102mm,012m,S=410-12m2,I=380m.10V,011A,,,82003©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.(S)=1RCS+1(1)G(j)=1RCj+1(2)A=1(RC)2+1(3)R=1000,C=50pF,21;,2pF,22;,,10,23;,,193,24,,,,,,23.23.2.1,2,G(j)=1/RCj+1,A=1(RC)2+1.A,,RC,R,R,C,3.2.2(3),A,,,R2C2y=1R2C2x2+1(4)y2=1R2C2x2+1(5)R2C2=a,y2=1ax2+1(6)y-2=ax2+1(7)y-2-1=ax2(8)X=x2,Y=y-2-1Y=aX(9)aR2C2350pF1000,,,RC510-9,R1000,C50pF,3,,4(49)99©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.[1]..:,1996.[2]..:,1999[3].MCS51.,1999[4].MCS51.,1997[5]..,1996.[6].LW.,2001.(46),,,,,,,,,,1MHz5,,,[1],,,..:,1999.[2]..:,1989.[3]..:,1977.(9),a,R2C2=214557e-15,R=1000,C=491556pF,50-491556=01444pF.,4,TCR=0103851:1////-50803107010001005011931951001385100150157311520017581402501940174,,,22//pF()/pF()0504918075050491844100505010921505050122120050501260250504916914,,,,,,[1].SOI.,2003,9(2):36-37.[2]...:,2000:96-110.[3].MEMS..:,2002:44-46.!©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.